A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of the effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.

A gas-fired, powered infrared burner unit comprising a perforate distribution plate configured as a tray and a porous foam metal burner element carried in the tray, the combination overlying the open top of a plenum box and sealingly fastened to an edge flange of said box by a retainer having a surrounding flange fastened to the plenum box flange by welding, staking or other means so as to eliminate the need for a gasket. The foam metal medium is constructed of a foam metal alloy to have a pore size of 1000 micros±5%, and produce, along with the perforations in the distribution tray, a port loading of between about 850 and 1,000 BTU/in.sup.2.

Disclosed are an infrared burner and a warmer. The infrared burner includes a cover, a chassis, a mounting bracket, a ceramic plate, a hollow air column and a strengthening net. The chassis is defined with a through hole. A bottom of the mounting bracket is mounted on the chassis and a top of the mounting bracket is mounted on the cover. The ceramic plate is defined with air holes and provided on the mounting bracket. The ceramic plate is enclosed with the mounting bracket. The chassis and the cover to form a combustion space. The hollow air column is defined with air holes and passes through the through hole to extend into the combustion space. A bottom of the strengthening net is connected with the chassis and a top of the strengthening net is connected with the cover, and the strengthening net is provided outside the ceramic plate.

A gas-fired, powered infrared burner unit comprising a perforate distribution plate configured as a tray and a porous foam metal burner element carried in the tray, the combination overlying the open top of a plenum box and sealingly fastened to an edge flange of said box by a retainer having a surrounding flange fastened to the plenum box flange by welding, staking or other means so as to eliminate the need for a gasket. The foam metal medium is constructed of a foam metal alloy to have a pore size of 1000 micros5%, and produce, along with the perforations in the distribution tray, a port loading of between about 850 and 1,000 BTU/in.sup.2.

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing processing tool and comprises: a plurality of treatment chambers, each treatment chamber having an effluent stream inlet for supplying a respective portion of said effluent gas stream to that treatment chamber for treatment therewithin. In this way, multiple treatment chambers may be provided, each of which treats part of the effluent stream. Accordingly, the number of treatment chambers can be selected to match the flow rate of the effluent gas stream from any particular processing tool. This provides an architecture which is reliably scalable to suit the needs of any effluent gas stream flow rate.

The invention provides a burner device 100 for providing thermal energy by combustion of an air-fuel mixture G, which burner device comprises a flame body 1 which delimits an interior space 11 which is connected via openings in the flame body 1 to an outer combustion surface 12 of the flame body 1, on which the combustion of an air-fuel mixture G, which is introduced into the interior space 11 and flows through the openings, takes place in one or more burner flames, and a flow guiding device 2 which comprises an axial flow channel 21, which is located mostly or completely in the interior space 11, for guiding through the air-fuel mixture G, which runs in particular parallel to a longitudinal axis LA of the flame body 1, the axial length of which is selected as a function of an oscillation frequency induced by the one or more burner flames.