A method of fabricating a burner element for an abatement apparatus is disclosed. The method comprises: injection moulding a charge comprising metal particles and a flow compound into a mould defining the burner element to produce a moulded burner element; and sintering the moulded burner element. In this way, injection moulding is used to produce the burner element, which provides far more flexibility regarding the design and properties of the burner element and avoids the necessity of incorporating a perforated support into the burner element. This allows burner elements of more intricate design to be produced, as well as burner elements which are thinner than those produced using existing techniques, which increases the volume of a combustion chamber defined by that burner element for any external burner element size, which in turn increases the amount of effluent gas that can be treated for any burner size.

The present invention presents a scrubber burner composed of a preheating spray ring that is formed with a porous material with certain thickness, and that preheats and sprays the fuel gas in the preheating combustion space formed inside, a preheating guide ring equipped with multiple preheating guide holes that wrap the outer circumference of the aforementioned preheating spray ring, and that penetrates from the outer circumference to the inner circumference, and a preheating burner module equipped with a housing that forms a ring shaped gas channel that is separated from the outer circumference of the aforementioned preheating guide ring and through which the aforementioned fuel gas flows.

An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.

A method of cleaning a gas inlet nozzle of an abatement burner combustion chamber. The abatement burner intermittently receives gas for combustion from a feed process. The nozzle comprises a cleaning mechanism including a movable cleaning member for physically removing unwanted deposits from the nozzle. The cleaning member is movable from a retracted first position wherein the cleaning member is outside a path of a flame associated with the nozzle, to a second cleaning position wherein the cleaning member is in a path of the flame associated with the nozzle. The method comprises the steps of: a. identifying when the nozzle is out of use; b. moving the cleaning member from the first position to the second position while the nozzle is out of use; and c. returning the cleaning member to the first position before nozzle is in use.

A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.

Provided is a vacuum pump that can realize energy conservation when performing abatement of exhaust gas.

A vacuum pump that sucks in and exhausts exhaust gas includes a motor serving as a drive source, and a first controller that controls driving of the motor. The first controller monitors a state of the motor, and in a case in which the state of the motor is a specific state excluding when starting up and when stopped, outputs a specific signal (process signal) to an external entity.

An oxidizer head assembly includes a head body defining an inlet flange, an outlet flange, and a wall, where the inlet flange, the outlet flange, and the wall define a cavity positioned between the inlet flange and the outlet flange, a plurality of nozzles extending through the cavity, a fuel inlet in communication with the plurality of nozzles, where a fuel passes through the fuel inlet and the plurality of nozzles, a shield gas inlet in communication with the cavity, and a porous diffuser plate extending across the outlet opening, the porous diffuser plate including apertures for the plurality of nozzles and a plurality of pores, where a shield gas passes through the shield gas inlet, through the cavity, and through the plurality of pores of the porous diffuser plate around the plurality of nozzles.

Apparatus and methods are disclosed. The apparatus comprises: an abatement chamber of an abatement apparatus which treats an effluent stream from a semiconductor processing tool to provide a combusted effluent stream having effluent particles; and a first atomiser located downstream of the abatement chamber, the first atomiser being configured to produce droplets having a droplet size based on a particle size of the effluent particles to be removed from the combusted effluent stream. In this way, the atomizer may produce droplets which combine with or adhere to the effluent particles which assists in the removal of the effluent particles from the combusted effluent stream.

A process of making a fuel product from a non-combustible high protein organic material such as a biological by-product or waste material. The moisture content of the high protein organic material is mechanically reduced and dried to reduce the moisture content to less than ten percent (10%). The high protein organic material is pulverized to a particle size of less than about 2 mm. The high protein organic waste material is fed into a combustion chamber and separated during combustion such as by spraying high protein organic waste material within the combustion chamber. Temperature and combustion reactions within the combustion chamber are controlled by controlling the moisture in the combustion atmosphere and energy injections at or downstream of the combustion chamber. The concentration of protein thermal decomposition by-products, temperature, and residence time and/or additions of energy plasma within the combustion chamber environment are controlled to degrade hazardous polyfluoro compounds.

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool, the radiant burner comprises: a sintered metal fibre sleeve through which combustion materials pass for combustion proximate to an inner combustion surface of the sintered metal fibre sleeve; and an insulating sleeve surrounding the sintered metal to fibre sleeve and through which the combustion materials pass. In this way, a radiant burner is provided which does not crack due to rapid cycling caused by frequent idle steps during which the burner is extinguished. Also, by providing an insulating sleeve, the temperature within the radiant burner and the temperature of an outer surface of the radiant burner remain comparable with existing ceramic burners. This enables the radiant burner to be substituted in place of existing ceramic burners as a line-replaceable unit which does not suffer from cracking during such frequent and short-duration periods of process tool inactivity.