F23N2900/01002

Two-stage fluid control valve having a first stage mechanical valve and a second stage microvalve

A two-stage fluid control valve includes a first stage mechanical control valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage mechanical control valve is in the open position.

Two-Stage Fluid Control Valve Having A First Stage Mechanical Valve And A Second Stage Microvalve

A two-stage fluid control valve includes a first stage mechanical control valve movable between an open position and a leak-free closed position, and a second stage microvalve configured to control the flow of fluid through a fluid outlet of the two-stage fluid control valve when the first stage mechanical control valve is in the open position.