Disclosed are implementations for minimizing substrate contamination during pressure changes in substrate processing systems. Over a duration of a pressure change (increase or decrease) in a chamber of a substrate processing system, a flow rate is adjusted multiple times to reduce occurrence of contaminant particles in an environment of the chamber. In some instances, the flow rate is changed continuously using at least one dynamic valve that enable continuous control over the pressure dynamics of the chamber.

An air treatment device includes a casing with an air inlet and an air outlet. Air flows through the casing and an air treatment section in the casing. The air treatment section includes a fan for generating a flow of air from the air inlet to the air outlet, a filtering means arranged within the flow of air, a first pressure sensor to measure a first pressure in the flow of air, a second pressure sensor to measure a second pressure in a room or cabin surrounding the air treatment device, and a control unit. The control unit is configured to adapt a speed of the fan based on the measured first pressure and the measured second pressure to control a flow of air through the air treatment device.

An air conditioner at least including a controller, a first fan unit, and a second fan unit arranged parallel to the first fan unit is disclosed. The controller performs a parallel operating control procedure, including a first control mode and a second control mode, to the first fan unit and the second fan unit respectively. When operating under the first control mode, the controller adjusts the rotating speed of one of the first fan unit and the second fan unit based on a first standard air volume, so the two fan units output the air volume equal to or approximate to the first standard air volume. When operating under the second control mode, the controller controls the rotating speed of both the first and second fan units according to a second standard air volume, so the two fan units output the same air volume.

There is presented a heating, ventilation and air conditioning (HVAC) system for conditioning air within a chamber, the system comprising: an inlet, an outlet, and a conditioning unit, the conditioning unit comprising a fan, and a heat exchanger configured to exchange heat with the air within the conditioning unit, wherein during operation, air is urged through conditioning unit by the fan such that heat is exchanged between the air and the heat exchanger, wherein the fan is configured to vary the flow rate of air urged through the conditioning unit to thereby control the amount of heat transferred between the air and the heat exchanger.

An air filter and a method of air filtration using the air filter are described. The air filter may comprise a filter media adapted to capture and filter one or more impurities from air. Further, one or more sound wave generators are attached at one or more sides of the filter media. The one or more sound wave generators generate acoustic waves to be propagated into the filter media. The air filter may further comprise a plurality of sensors positioned before the filter media and after the filter media. Further at least one fan is positioned before or after the filter media. Further an IoT is configured to control frequency of the acoustic waves generated by the one or more sound waves generators, and interconnected with power signal control panel parallel, AHU to control rotational speed of the at least one fan based on value provided by the plurality of sensors.

Provided is a flow rate adjusting device including: an ultrasonic flow metering portion; a flow rate adjusting portion; a control portion configured to control the flow rate adjusting portion so that the flow rate of the fluid measured by the ultrasonic flow metering portion matches a set value; a pressure sensor configured to measure a pressure of the fluid flowing into an upstream side of a measurement flow channel from an inflow port; and a storage portion configured to store information that associates the flow rate of the fluid obtained from the propagation time difference measured by the ultrasonic flow metering portion, the set value of the target flow rate, and the pressure measured by the pressure sensor with each other when the control portion controls the flow rate adjusting portion.

An air conditioning control system includes: an air pressure measurement unit (111) configured to measure an air pressure value; an air conditioning unit (136) whose wind direction and airflow volume are changeable; a wind velocity calculation unit (132) configured to calculate a wind velocity of wind received by a portable terminal (110) from a variation in a plurality of atmospheric pressure values and to specify a presence direction that is a direction in which the portable terminal (110) is present with respect to the air conditioner (130); an air conditioning control determination unit (134) configured to determine a wind direction and an airflow volume of the air conditioning unit (136) in accordance with the wind velocity and the presence direction; and an air conditioning control unit (135) configured to control the air conditioning unit (136) so that the determined wind direction and airflow volume are obtained.

An all-inclusive fluid flow device that can variably magnify differential pressure, measure, and control a flow of a fluid is described. Various procedures, including measuring, controlling, balancing, or calibration procedures can leverage a variably magnified differential pressure measurement. Differential pressure measurements can be measured across the fluid flow device such that a first pressure measurement is taken upstream of the fluid flow device while a second pressure measurement is taken downstream of the fluid flow device. Moreover, one or more of the various pressure measurements, and in particular the downstream pressure measurement, can be performed at stagnation zone where the flow has stagnated. Such can provide significant magnification and/or turndown capabilities and the magnification can vary based on a damper position and/or apertures dimensions.

A method and computing device for inferring an airflow of a controlled appliance operating in an area of a building. The computing device stores a predictive model. The computing device determines a measured airflow of the controlled appliance and a plurality of consecutive temperature measurements in the area. The computing device executes a neural network inference engine using the predictive model for inferring an inferred airflow based on inputs. The inputs comprise the measured airflow and the plurality of consecutive temperature measurements. The inputs may further include at least one of a plurality of consecutive humidity level measurements in the area and a plurality of consecutive carbon dioxide (CO2) level measurements in the area. For instance, the controlled appliance is a Variable Air Volume (VAV) appliance and a K factor of the VAV appliance is calculated based on the inferred airflow.

Disclosed are methods for measuring building health index using some mandatory and set of optionally configured parameters and utilizing building monitoring system having a connection to sensors in or pertaining to a building, and including central computing environment and one or more display devices showing the measurement. A building utilizing this method may be installed with one or more sensors, and which may be communicating to a locally installed communication device or a centrally installed computing environment that can collect the measurements over a period.