A GM cryocooler includes a valve portion which defines a valve group including a first intake valve, a first exhaust valve, and a pressure equalizing valve. A valve rotor of the valve portion includes a rotor plane which is in surface contact with a stator plane of a valve stator. The valve rotor includes a high pressure flow path which is open to the rotor plane to form a portion of the first intake valve, a low pressure flow path which is open to the rotor plane to form a portion of the first exhaust valve, and a pressure equalization flow path which is open to the rotor plane to form a portion of the pressure equalizing valve, and the high pressure flow path, the low pressure flow path, and the pressure equalization flow path are circumferentially arranged around a valve rotation axis on the rotor plane.

An active gas regenerative refrigerator includes a plurality of compressor-expander units, each having a hermetic cylinder with a drive piston configured to be driven reciprocally therein, and a quantity of working fluid in each end of the cylinder. A piston seal in a central portion of the cylinder prevents passage of the working fluid between ends of the cylinder. Movement of the piston to a first extreme results in radial compression of one of the quantities of working fluid in a cylindrical gap formed between one end of the piston and an inner surface of the cylinder, while the other quantity is expanded in the opposite end of the cylinder. The piston includes a plurality of magnets arranged in pairs, with magnets of each pair positioned with like-poles facing each other. A piston drive is configured to couple with transverse magnetic flux regions formed by the magnets.

An active gas regenerative refrigerator includes a plurality of compressor-expander units, each having a hermetic cylinder with a drive piston configured to be driven reciprocally therein, and a quantity of working fluid in each end of the cylinder. A piston seal in a central portion of the cylinder prevents passage of the working fluid between ends of the cylinder. Movement of the piston to a first extreme results in radial compression of one of the quantities of working fluid in a cylindrical gap formed between one end of the piston and an inner surface of the cylinder, while the other quantity is expanded in the opposite end of the cylinder. The piston includes a plurality of magnets arranged in pairs, with magnets of each pair positioned with like-poles facing each other. A piston drive is configured to couple with transverse magnetic flux regions formed by the magnets.

An active gas regenerative refrigerator includes a plurality of compressor-expander units, each having a hermetic cylinder with a drive piston configured to be driven reciprocally therein, and a quantity of working fluid in each end of the cylinder. A piston seal in a central portion of the cylinder prevents passage of the working fluid between ends of the cylinder. Movement of the piston to a first extreme results in radial compression of one of the quantities of working fluid in a cylindrical gap formed between one end of the piston and an inner surface of the cylinder, while the other quantity is expanded in the opposite end of the cylinder. The piston includes a plurality of magnets arranged in pairs, with magnets of each pair positioned with like-poles facing each other. A piston drive is configured to couple with transverse magnetic flux regions formed by the magnets.

A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.