A refrigeration cycle apparatus includes a first refrigerant circuit including a first compressor, a first heat exchanger, a first refrigerant flow path of a second heat exchanger, a first expansion device, a third heat exchanger, and a second refrigerant flow path of a fourth heat exchanger, and a second refrigerant circuit including a second compressor, a fifth heat exchanger, a second expansion device, a third refrigerant flow path of the second heat exchanger, and a fourth refrigerant flow path of the fourth heat exchanger, a first refrigerant flows through, in order, the first compressor, the first heat exchanger, the first refrigerant flow path, the first expansion device, the third heat exchanger, and the second refrigerant flow path, the second refrigerant flows through, in order, the second compressor, the fifth heat exchanger, the second expansion device, the third refrigerant flow path, and the fourth refrigerant flow path.

A regenerator of a cryo-cooler uses helium both as a working gas and as a heat storage material. The regenerator includes cells whose exterior sides form flow channels through which the working gas flows. Each cell has connected first and second cavities enclosed by a heat-conductive cell wall. The cavities contain helium that is used to store heat. Each cells is shaped as a disk. The working gas flows both through the flow channels and around the regenerator so as to exchange heat with the helium in the cavities via the heat conducting cell wall. Each cell has a pressure-equalizing opening through the cell wall whose diameter is smaller than the thickness of the cell wall. The diameter of the pressure-equalizing opening is dimensioned to permit the pressure of the helium contained in the cell to change by a maximum of 20% during any working cycle of the cryo-cooler.

A GM cryocooler includes a valve portion which defines a valve group including a first intake valve, a first exhaust valve, and a pressure equalizing valve. A valve rotor of the valve portion includes a rotor plane which is in surface contact with a stator plane of a valve stator. The valve rotor includes a high pressure flow path which is open to the rotor plane to form a portion of the first intake valve, a low pressure flow path which is open to the rotor plane to form a portion of the first exhaust valve, and a pressure equalization flow path which is open to the rotor plane to form a portion of the pressure equalizing valve, and the high pressure flow path, the low pressure flow path, and the pressure equalization flow path are circumferentially arranged around a valve rotation axis on the rotor plane.

A regenerator of a cryo-cooler uses helium both as a working gas and as a heat storage material. The regenerator includes cells whose exterior sides form flow channels through which the working gas flows. Each cell has connected first and second cavities enclosed by a heat-conductive cell wall. The cavities contain helium that is used to store heat. Each cells is shaped as a disk. The working gas flows both through the flow channels and around the regenerator so as to exchange heat with the helium in the cavities via the heat conducting cell wall. Each cell has a pressure-equalizing opening through the cell wall whose diameter is smaller than the thickness of the cell wall. The diameter of the pressure-equalizing opening is dimensioned to permit the pressure of the helium contained in the cell to change by a maximum of 20% during any working cycle of the cryo-cooler.

A GM cryocooler includes a first cold head including a first displacer that is reciprocable in an axial direction, a first drive piston that drives the first displacer in the axial direction, and a first drive chamber that houses the first drive piston; a second cold head including a second displacer that is reciprocable in the axial direction, and a second cylinder that houses the second displacer; a first intake valve that is connected to both the first drive chamber and the second cylinder so as to supply working gas in parallel to the first drive chamber and the second cylinder; and a first exhaust valve that is connected to both the first drive chamber and the second cylinder so as to collect the working gas in parallel from the first drive chamber and the second cylinder.

A refrigeration cycle apparatus includes a first refrigerant circuit including a first compressor, a first heat exchanger, a first refrigerant flow path of a second heat exchanger, a first expansion device, a third heat exchanger, and a second refrigerant flow path of a fourth heat exchanger, and a second refrigerant circuit including a second compressor, a fifth heat exchanger, a second expansion device, a third refrigerant flow path of the second heat exchanger, and a fourth refrigerant flow path of the fourth heat exchanger. A first refrigerant flows through, in order, the first compressor, the first heat exchanger, the first refrigerant flow path, the first expansion device, the third heat exchanger, and the second refrigerant flow path. The second refrigerant flows through, in order, of the second compressor, the fifth heat exchanger, the second expansion device, the third refrigerant flow path, and the fourth refrigerant flow path.

An active gas regenerative refrigerator includes a plurality of compressor-expander units, each having a hermetic cylinder with a drive piston configured to be driven reciprocally therein, and a quantity of working fluid in each end of the cylinder. A piston seal in a central portion of the cylinder prevents passage of the working fluid between ends of the cylinder. Movement of the piston to a first extreme results in radial compression of one of the quantities of working fluid in a cylindrical gap formed between one end of the piston and an inner surface of the cylinder, while the other quantity is expanded in the opposite end of the cylinder. The piston includes a plurality of magnets arranged in pairs, with magnets of each pair positioned with like-poles facing each other. A piston drive is configured to couple with transverse magnetic flux regions formed by the magnets.

A regenerator of a cryo-cooler uses helium both as a working gas and as a heat storage material. The regenerator includes cells whose exterior sides form flow channels through which the working gas flows. Each cell has connected first and second cavities enclosed by a heat-conductive cell wall. The cavities contain helium that is used to store heat. Each cells is shaped as a disk. The working gas flows both through the flow channels and around the regenerator so as to exchange heat with the helium in the cavities via the heat conducting cell wall. Each cell has a pressure-equalizing opening through the cell wall whose diameter is smaller than the thickness of the cell wall. The diameter of the pressure-equalizing opening is dimensioned to permit the pressure of the helium contained in the cell to change by a maximum of 20% during any working cycle of the cryo-cooler.

A GM cryocooler includes a first cold head including a first displacer that is reciprocable in an axial direction, a first drive piston that drives the first displacer in the axial direction, and a first drive chamber that houses the first drive piston; a second cold head including a second displacer that is reciprocable in the axial direction, and a second cylinder that houses the second displacer; a first intake valve that is connected to both the first drive chamber and the second cylinder so as to supply working gas in parallel to the first drive chamber and the second cylinder; and a first exhaust valve that is connected to both the first drive chamber and the second cylinder so as to collect the working gas in parallel from the first drive chamber and the second cylinder.

A helium management control system for controlling the helium refrigerant supply from a common manifold supplies cryogenic refrigerators with an appropriate helium supply. The system employs sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. If the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.