A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

A process for recovering at least one fluid (e.g. xenon gas and/or krypton gas, etc.) from a feed gas can include utilization of a compression system, primary heat exchanger unit, a pre-purification unit (PPU), and other units to separate and recover at least one desired fluid. In some embodiments, fluid flows output from a first heat exchanger or separation system of the plant can be split so that a portion of a stream is output for downstream processing to purify xenon (Xe) and/or krypton (Kr) product flow(s) while another portion of the stream is recycled to a compression system or the PPU to undergo further purification and heat exchange so that the product output for downstream processing has a higher concentration of Xe or Kr. Some embodiments can be configured to provide an improved recovery of Xe and/or Kr as well as an improvement in operational efficiency.

The present invention relates to an adsorption process for xenon recovery from a cryogenic liquid or gas stream wherein a bed of adsorbent is contacted with a xenon-containing liquid or gas stream selectively adsorbing the xenon from said stream. The adsorption bed is operated to at least near full breakthrough with xenon to enable a deep rejection of other stream components, prior to regeneration using the temperature swing method. After the stripping step, the xenon adsorbent bed is drained to clear out the liquid residue left in the nonselective void space and the xenon molecules in those void spaces is recycled upstream to the ASU distillation column for increasing xenon recovery. The xenon adsorbent bed is optionally purged with oxygen, followed by purging with gaseous argon at cryogenic temperature (≤160 K) to displace the oxygen co-adsorbed on the AgX adsorbent due to higher selectivity of argon over oxygen on the AgX adsorbent. By the end of this step, the xenon adsorbent bed is filled with argon and xenon. Then the entire adsorbent bed is heated indirectly without utilizing any of the purge gas for direct heating. Operating the adsorption bed to near full breakthrough with xenon and displacing the adsorbed oxygen and other residues with argon, prior to regeneration, along with indirect heating of the bed, enables production of a high purity product ≥40 vol % xenon from the adsorption bed and further enables safely heating without any purge gas and ease for downstream product collection, even in cases where hydrocarbons are co-present in the feed stream.

Methods and systems for producing Xenon-133 are disclosed. A method for producing Xenon-133 includes collecting an off gas from a Molybdenum-99 production process in a storage tank. The off gas includes Xenon-133 and Krypton-85. The method further includes selectively adsorbing Xenon-133 from the off gas onto a charcoal column assembly such that Xenon-133 is selectively adsorbed onto the charcoal column assembly relative to Krypton-85. The method further includes desorbing the Xenon-133 from the charcoal column assembly by heating the charcoal column assembly, and condensing the Xenon-133 within a coil assembly.

Enhancements to the distillation column system and cycles for an argon and nitrogen producing cryogenic air separation unit are provided. The enhancements include systems and methods for: (i) recovery of xenon and krypton; (ii) production of oxygen product substantially free of hydrocarbons; and (iii) improvement in the design and performance of the super-stage argon column. The present systems and methods are further characterized in an oxygen enriched stream from the lower pressure column of the air separation unit is an oxygen enriched condensing medium used in the argon condenser.

Methods and systems for producing Xenon-133 are disclosed. A method for producing Xenon-133 includes collecting an off gas from a Molybdenum-99 production process in a storage tank. The off gas includes Xenon-133 and Krypton-85. The method further includes selectively adsorbing Xenon-133 from the off gas onto a charcoal column assembly such that Xenon-133 is selectively adsorbed onto the charcoal column assembly relative to Krypton-85. The method further includes desorbing the Xenon-133 from the charcoal column assembly by heating the charcoal column assembly, and condensing the Xenon-133 within a coil assembly.

A system and method for argon and nitrogen extraction and liquefaction from a low-pressure tail gas of an ammonia production plant is provided. The preferred tail gas of the ammonia production plant comprises methane, nitrogen, argon, and hydrogen. The disclosed system and method provides for the methane rejection via rectification and hydrogen rejection by way of a side stripper column or phase separator. The resulting nitrogen and argon containing stream is separated and liquefied in a double column distillation system.

The present invention relates to an adsorption process for xenon recovery from a cryogenic liquid or gas stream wherein a bed of adsorbent is contacted with a xenon-containing liquid or gas stream selectively adsorbing the xenon from said stream. The adsorption bed is operated to at least near full breakthrough with xenon to enable a deep rejection of other stream components, prior to regeneration using the temperature swing method. After the stripping step, the xenon adsorbent bed is drained to clear out the liquid residue left in the nonselective void space and the xenon molecules in those void spaces is recycled upstream to the ASU distillation column for increasing xenon recovery. The xenon adsorbent bed is optionally purged with oxygen, followed by purging with gaseous argon at cryogenic temperature (160 K) to displace the oxygen co-adsorbed on the AgX adsorbent due to higher selectivity of argon over oxygen on the AgX adsorbent. By the end of this step, the xenon adsorbent bed is filled with argon and xenon. Then the entire adsorbent bed is heated indirectly without utilizing any of the purge gas for direct heating. Operating the adsorption bed to near full breakthrough with xenon and displacing the adsorbed oxygen and other residues with argon, prior to regeneration, along with indirect heating of the bed, enables production of a high purity product 40 vol % xenon from the adsorption bed and further enables safely heating without any purge gas and ease for downstream product collection, even in cases where hydrocarbons are co-present in the feed stream.

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

Methods and systems for producing Xenon-133 are disclosed. A method for producing Xenon-133 includes collecting an off gas from a Molybdenum-99 production process in a storage tank. The off gas includes Xenon-133 and Krypton-85. The method further includes selectively adsorbing Xenon-133 from the off gas onto a charcoal column assembly such that Xenon-133 is selectively adsorbed onto the charcoal column assembly relative to Krypton-85. The method further includes desorbing the Xenon-133 from the charcoal column assembly by heating the charcoal column assembly, and condensing the Xenon-133 within a coil assembly.