A system and method for post-processing of polymeric items having a liquid component and a predetermined heat deflection temperature is provided. The system includes a washing station to spray water at elevated temperature and pressure on the items while maintaining the temperature of the item below the heat deflection temperature. Then using a water distillation system to separate the water from the water mixed with the liquid polymer component by evaporating the water using heating coils with surface that is not conducive to adhesion of the liquid polymer component and then condense the water vapor into liquid water. The system may further include a spin station to separate the liquid polymer component by spinning the item. The system may further include one or more processing stations to rinse the item, dry the item, cure the item, remove the item from a tray to which the item may be attached and clean trays after removing the item. A conveyor system may be used to automate the post-processing of the items.

The present invention provides a cleaning method and equipment thereof for object FOUP, comprising the following steps: firstly separating the object FOUP into a container lid and a container body, then conducting individual processes of wet washing, liquid removing and vacuum drying for the container lid and container body, and in the end combining the container lid and container body to complete the cleaning procedure of the object FOUP; specifically, during the liquid removing process, multiple wind knives are used to carry out liquid removing for the container body, and during the vacuum drying process after liquid removing, multiple thermal components are used to carry out vacuum drying for the container body under a vacuum environment; moreover, the present invention also includes the cleaning equipment to execute the above method, for the purpose of overcoming the problem that the wet cleaning process in the conventional automatic chip FOUP cleaning technique cannot effectively clean object FOUPs with relatively complicated internal structures.

The present invention provides a cleaning method and equipment thereof for object FOUP, comprising the following steps: firstly separating the object FOUP into a container lid and a container body, then conducting individual processes of wet washing, liquid removing and vacuum drying for the container lid and container body, and in the end combining the container lid and container body to complete the cleaning procedure of the object FOUP; specifically, during the liquid removing process, multiple wind knives are used to carry out liquid removing for the container body, and during the vacuum drying process after liquid removing, multiple thermal components are used to carry out vacuum drying for the container body under a vacuum environment; moreover, the present invention also includes the cleaning equipment to execute the above method, for the purpose of overcoming the problem that the wet cleaning process in the conventional automatic chip FOUP cleaning technique cannot effectively clean object FOUPs with relatively complicated internal structures.

A system and method for post-processing of polymeric items having a liquid component and a predetermined heat deflection temperature is provided. The system includes a washing station to spray water at elevated temperature and pressure on the items while maintaining the temperature of the item below the heat deflection temperature. Then using a water distillation system to separate the water from the water mixed with the liquid polymer component by evaporating the water using heating coils with surface that is not conducive to adhesion of the liquid polymer component and then condense the water vapor into liquid water. The system may further include a spin station to separate the liquid polymer component by spinning the item. The system may further include one or more processing stations to rinse the item, dry the item, cure the item, remove the item from a tray to which the item may be attached and clean trays after removing the item. A conveyor system may be used to automate the post-processing of the items.

A system and method for post-processing of polymeric items having a liquid component and a predetermined heat deflection temperature is provided. The system includes a washing station to spray water at elevated temperature and pressure on the items while maintaining the temperature of the item below the heat deflection temperature. Then using a water distillation system to separate the water from the water mixed with the liquid polymer component by evaporating the water using heating coils with surface that is not conducive to adhesion of the liquid polymer component and then condense the water vapor into liquid water. The system may further include a spin station to separate the liquid polymer component by spinning the item. The system may further include one or more processing stations to rinse the item, dry the item, cure the item, remove the item from a tray to which the item may be attached and clean trays after removing the item. A conveyor system may be used to automate the post-processing of the items.

A process for removing free liquids from oil base mud contaminated drill cuttings waste. A process is described wherein a high gravity centripetal separator and low temperature thermal process are cooperatively used to enhance the mechanical and thermal separation methods, resulting in improved efficiency of the hydrocarbon and water removal process. A process is also described wherein the oil base mud contaminated drill cuttings waste is heated to strip volatile constituents and excess water from the oil base mud contaminated drill cuttings to further enhance the mechanical and thermal separation methods resulting in improved efficiency of the hydrocarbon and water removal process. A less expensive process is also described where the oil base mud contaminated drill cuttings waste is heated to strip volatile constituents and excess water from the oil base mud contaminated drill cuttings to further enhance the recoverable liquids phase during mechanical separation. A conventional stripping process for oil base mud is also utilized.

A process for removing free liquids from oil base mud contaminated drill cuttings waste. A process is described wherein a high gravity centripetal separator and low temperature thermal process are cooperatively used to enhance the mechanical and thermal separation methods, resulting in improved efficiency of the hydrocarbon and water removal process. A process is also described wherein the oil base mud contaminated drill cuttings waste is heated to strip volatile constituents and excess water from the oil base mud contaminated drill cuttings to further enhance the mechanical and thermal separation methods resulting in improved efficiency of the hydrocarbon and water removal process. A less expensive process is also described where the oil base mud contaminated drill cuttings waste is heated to strip volatile constituents and excess water from the oil base mud contaminated drill cuttings to further enhance the recoverable liquids phase during mechanical separation. A conventional stripping process for oil base mud is also utilized.

A system and method for post-processing of polymeric items having a liquid component and a predetermined heat deflection temperature is provided. The system includes a washing station to spray water at elevated temperature and pressure on the items while maintaining the temperature of the item below the heat deflection temperature. Then using a water distillation system to separate the water from the water mixed with the liquid polymer component by evaporating the water using heating coils with surface that is not conducive to adhesion of the liquid polymer component and then condense the water vapor into liquid water. The system may further include a spin station to separate the liquid polymer component by spinning the item. The system may further include one or more processing stations to rinse the item, dry the item, cure the item, remove the item from a tray to which the item may be attached and clean trays after removing the item. A conveyor system may be used to automate the post-processing of the items.

A system and method for post-processing of polymeric items having a liquid component and a predetermined heat deflection temperature is provided. The system includes a washing station to spray water at elevated temperature and pressure on the items while maintaining the temperature of the item below the heat deflection temperature. Then using a water distillation system to separate the water from the water mixed with the liquid polymer component by evaporating the water using heating coils with surface that is not conducive to adhesion of the liquid polymer component and then condense the water vapor into liquid water. The system may further include a spin station to separate the liquid polymer component by spinning the item. The system may further include one or more processing stations to rinse the item, dry the item, cure the item, remove the item from a tray to which the item may be attached and clean trays after removing the item. A conveyor system may be used to automate the post-processing of the items.

A guard that receives a processing liquid removed off a substrate, is disposed so as to surround a substrate holding unit and a facing member in plan view. The guard forms, together with the substrate and the facing member having a facing surface facing an upper surface of the substrate, a space isolated from an ambient atmosphere. An inert gas supplying unit supplies an inert gas to the space to replace an atmosphere inside the space by the inert gas. A processing liquid supplying nozzle, which extends from an inner wall of the guard so as to be disposed inside the space in a state where the space is formed, supplies the processing liquid to the upper surface of the substrate.