An apparatus for processing a substrate includes a reaction tube, a side cover, a heater, a first gas supplier, a second gas supplier and a controller. The reaction tube is configured to receive a substrate boat in which a plurality of the substrate is received to process the substrate. The side cover is configured to receive the reaction tube. The heater lines the interior of the side cover. The first gas supplier is provided to an upper portion of the side cover to supply a cooling gas at a first supplying rate to a space between the side cover and the reaction tube. The second gas supplier is provided to a lower portion of the side cover to supply the cooling gas at a second supplying rate different from the first supplying rate to the space between the side cover and the reaction tube. The controller controls the reaction tube.

Described herein are glass forming apparatuses with cooled muffle assemblies and methods for using the same to form glass ribbons. According to one embodiment, a muffle assembly for a fusion forming apparatus may include a muffle frame comprising a back wall, a front wall opposite the back wall, and a pair of sidewalls joining the front wall to the back wall in a closed-loop. At least one first cooling tube may extend through the back wall and the front wall across the closed-loop. At least one second cooling tube may extend through the back wall and the front wall across the closed loop such that the at least one second cooling tube is spaced apart from and parallel with the at least one first cooling tube.

A compound sintering furnace with managed contamination for debinding and sintering parts. An inner insulation layer is disposed within an outer insulation layer and has an internal hot face surrounding a work zone. A sealed housing surrounds the inner insulation layer and is composed of a refractory material capable of withstanding a service temperature greater than a debinding temperature and less than a sintering temperature. An outer heater system is configured to heat at least a portion of the sealed housing and externally heat the inner insulation layer to, in conjunction with an inner heater system, heat the work zone to the debinding temperature, and inhibit condensation of a binder within and upon the inner insulation layer during a debinding process. The inner heater system is configured to internally heat the inner insulation and heat the work zone to the sintering temperature.

A compound sintering furnace with managed contamination for debinding and sintering parts. An inner insulation layer is disposed within an outer insulation layer and has an internal hot face surrounding a work zone. A sealed housing surrounds the inner insulation layer and is composed of a refractory material capable of withstanding a service temperature greater than a debinding temperature and less than a sintering temperature. An outer heater system is configured to heat at least a portion of the sealed housing and externally heat the inner insulation layer to, in conjunction with an inner heater system, heat the work zone to the debinding temperature, and inhibit condensation of a binder within and upon the inner insulation layer during a debinding process. The inner heater system is configured to internally heat the inner insulation and heat the work zone to the sintering temperature.

A dental cooling device is provided, comprising a muffle (12) and a medium (30) as cooling source. The medium (30), in particular a liquid medium (30), is stored at least in the outer region of the muffle (12) and has an evaporation temperature higher than the room temperature. The quantity of medium (30) is calculated in advance such that the enthalpy of evaporation of the medium is substantially destroyed or consumed when cooling the muffle (12) to the evaporation temperature.

The invention uses a furnace retort made of silicon carbide to create a sintering furnace having no cold areas during debinding while having low heat losses during sintering. This is achieved by varying the wall thickness of the retort and taking advantage of the large increase in thermal conductivity of silicon carbide at lower temperatures. The special properties of silicon carbide also allow rapid cooling by exposing the outside of the retort directly to a high flow of cooling air.

Described herein are glass forming apparatuses with cooled muffle assemblies and methods for using the same to form glass ribbons. According to one embodiment, a muffle assembly for a fusion forming apparatus may include a muffle frame comprising a back wall, a front wall opposite the back wall, and a pair of sidewalls joining the front wall to the back wall in a closed-loop. At least one first cooling tube may extend through the back wall and the front wall across the closed-loop. At least one second cooling tube may extend through the back wall and the front wall across the closed loop such that the at least one second cooling tube is spaced apart from and parallel with the at least one first cooling tube.

A compound sintering furnace with managed contamination for debinding and sintering parts. An inner insulation layer is disposed within an outer insulation layer and has an internal hot face surrounding a work zone. A sealed housing surrounds the inner insulation layer and is composed of a refractory material capable of withstanding a service temperature greater than a debinding temperature and less than a sintering temperature. An outer heater system is configured to heat at least a portion of the sealed housing and externally heat the inner insulation layer to, in conjunction with an inner heater system, heat the work zone to the debinding temperature, and inhibit condensation of a binder within and upon the inner insulation layer during a debinding process. The inner heater system is configured to internally heat the inner insulation and heat the work zone to the sintering temperature.

Described herein are glass forming apparatuses with cooled muffle assemblies and methods for using the same to form glass ribbons. According to one embodiment, a muffle assembly for a fusion forming apparatus may include a muffle frame comprising a back wall, a front wall opposite the back wall, and a pair of sidewalls joining the front wall to the back wall in a closed-loop. At least one first cooling tube may extend through the back wall and the front wall across the closed-loop. At least one second cooling tube may extend through the back wall and the front wall across the closed loop such that the at least one second cooling tube is spaced apart from and parallel with the at least one first cooling tube.

A dental cooling device is provided, comprising a muffle (12) and a medium (30) as cooling source. The medium (30), in particular a liquid medium (30), is stored at least in the outer region of the muffle (12) and has an evaporation temperature higher than the room temperature. The quantity of medium (30) is calculated in advance such that the enthalpy of evaporation of the medium is substantially destroyed or consumed when cooling the muffle (12) to the evaporation temperature.