Disclosed is a pumping system with reduced contamination. A vacuum pump system includes a mechanical vacuum pump mechanism within a hermetic pump that hermetically isolates the pump mechanism from ambient air. A pump inlet is hermetically sealed to the hermetic pump housing. A pump outlet is hermetically sealed at one end to the hermetic pump housing and at the other end to an inlet of a Peclet seal tube. The vacuum pump system produces a vacuum in a vacuum processing chamber. A sweep gas source injects a sweep gas into at least one of (i) the hermetic pump housing and (ii) the inlet of the Peclet seal tube. The sweep gas and a process gas flow through the Peclet seal tube to substantially isolate against the backflow of the ambient air through the Peclet seal tube.

Provided are a heating furnace and a graphite production method both of which allow a carbonization step and a graphitization step to be consecutively performed. The heating furnace is a heating furnace for producing graphite from a polymeric material, and includes a heating furnace body for subjecting the polymeric material to heat treatment. The heating furnace body includes a closed vessel for containing the polymeric material. A gas outlet pipe is connected to the closed vessel, the gas outlet pipe being for letting, out of the heating furnace body, a pyrolytic gas generated from the polymeric material.

Based on the nitriding potential in the processing furnace calculated by the in-furnace nitriding potential calculator and the target nitriding potential, the introduction amount of the ammonia gas is changed while the introduction amount of the ammonia decomposition gas is kept constant, such that the nitriding potential in the processing furnace is brought close to the target nitriding potential.

A heating furnace includes: a heating furnace main body that includes an accommodation chamber capable of accommodating a heating target object; a heat source capable of heating an inside of the accommodation chamber to an annealing point; a gas supply source that is arranged outside the heating furnace main body; and a pipeline that includes a pipeline main body that is arranged inside the accommodation chamber, and that is heated by the heat source, the pipeline main body being configured to retain a gas supplied from the gas supply source and heat the gas to the annealing point, and a discharge outlet that is formed on an end portion of the pipeline main body, and that is opened inside the accommodation chamber, the discharge outlet being configured to discharge the gas that is heated to the annealing point, to the inside of the accommodation chamber.

Based on the nitriding potential in the processing furnace calculated by the in-furnace nitriding potential calculator and the target nitriding potential, the introduction amount of the ammonia gas is changed while the introduction amount of the ammonia decomposition gas is kept constant, such that the nitriding potential in the processing furnace is brought close to the target nitriding potential.

A method firing green ware. The method for firing includes setting a kiln oxygen concentration set point for an atmosphere of a ware space of a kiln during an oxygen-consuming event in the ware space of the kiln. An oxygen flux control mode is initiated that includes measuring an oxygen concentration of the atmosphere of the ware space in the kiln, comparing the oxygen concentration to the kiln oxygen concentration set point to determine a difference between the oxygen concentration and the kiln oxygen concentration set point, and adjusting a flow of secondary gas into the ware space to set an oxygen flux in the atmosphere in the ware space of the kiln based on the difference between the oxygen concentration and the kiln oxygen concentration set point. A kiln for firing the ceramic green ware and a manufacturing system including the kiln for manufacturing ceramic ware are also disclosed.

Apparatus and methods for debinding articles. The apparatus and methods may transform binder from furnace exhaust before the exhaust is discharged to the atmosphere. The apparatus may include a furnace retort and a reactor. The furnace retort may be configured to: exclude ambient air; and receive a carrier gas. The reactor may be configured to: receive from the retort (a) the carrier gas and (b) material removed in the retort from the article; and combust, at a temperature no greater than 750 C., the material. The material may be decomposed binder. The material may be hydrocarbon from binder that is pyrolyzed in the retort. The carrier gas may include gas that is nonflammable gas.

A pressing arrangement includes a pressure vessel comprising a furnace chamber. The furnace chamber comprises a load compartment arranged within the furnace chamber. The furnace chamber comprises at least one pressure medium guiding passage in fluid communication with the load compartment to form an inner convection loop, wherein pressure medium in the inner convection loop is guided through the load compartment and through the at least one pressure medium guiding passage and back to the load compartment, or vice versa. The pressure vessel comprises at least one adjustable throttle configured to selectively impede or obstruct pressure medium flow in at least a portion of the at least one pressure medium guiding passage, thereby selectively selectively impeding or obstructing a flow of pressure medium in the inner convection loop.

A pressing arrangement is disclosed, including a pressure vessel comprising a furnace chamber. The furnace chamber comprises a load compartment arranged within the furnace chamber and is arranged so as to allow for a flow of pressure medium through the load compartment. The furnace chamber comprises at least one pressure medium guiding passage in fluid communication with the load compartment so as to form an inner convection loop, wherein pressure medium in the inner convection loop is guided through the load compartment and through the at least one pressure medium guiding passage of the furnace chamber and back to the load compartment, or vice versa. The pressure vessel comprises at least one adjustable throttle configured to selectively impede or obstruct pressure medium flow in at least a portion of the at least one pressure medium guiding passage of the furnace chamber, thereby selectively impeding or obstructing a flow of pressure medium in the inner convection loop.

Apparatus and methods for debinding articles. The apparatus and methods may transform binder from furnace exhaust before the exhaust is discharged to the atmosphere. The apparatus may include a furnace retort and a reactor. The furnace retort may be configured to: exclude ambient air; and receive a carrier gas. The reactor may be configured to: receive from the retort (a) the carrier gas and (b) material removed in the retort from the article; and combust, at a temperature no greater than 750? C., the material. The material may be decomposed binder. The material may be hydrocarbon from binder that is pyrolyzed in the retort. The carrier gas may include gas that is nonflammable gas.