A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.

Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.

A heat-treating furnace has: a rotary shaft; a rotary bottom surface pivotally supported by the rotary shaft and rotates; a plurality of workpiece storage chambers arranged on the rotary bottom surface in a multi-stage torus configuration around an axis of the rotary shaft as a center; a hollow bell-shaped hot-blast guide disposed in a center of the torus configuration on the rotary bottom surface around the axis of the rotary shaft as a center so as to decrease a volumetric capacity in the furnace and to adjust a quantity of a hot blast fed in from above itself into the workpiece storage chamber on each stage; a furnace body bottom surface spaced away from the rotary bottom surface; and a furnace body lateral surface disposed on the furnace body bottom surface.

A heat-treating furnace has: a rotary shaft; a rotary bottom surface pivotally supported by the rotary shaft and rotates; a plurality of workpiece storage chambers arranged on the rotary bottom surface in a multi-stage torus configuration around an axis of the rotary shaft as a center; a hollow bell-shaped hot-blast guide disposed in a center of the torus configuration on the rotary bottom surface around the axis of the rotary shaft as a center so as to decrease a volumetric capacity in the furnace and to adjust a quantity of a hot blast fed in from above itself into the workpiece storage chamber on each stage; a furnace body bottom surface spaced away from the rotary bottom surface; and a furnace body lateral surface disposed on the furnace body bottom surface.

The present invention provides an electric furnace including: a cylindrical furnace wall; a furnace cover that is provided at an upper end of the furnace wall; and a furnace bottom that is provided at a lower end of the furnace wall and includes a deep bottom portion and a shallow bottom portion as a region having a height of 150 mm to 500 mm from a deepest point of the deep bottom portion, in which a slag pouring port into which molten slag or a solidified slag lump is capable of being poured from a slag transport container directly or through a tilting trough is provided, the slag pouring port overlaps the shallow bottom portion in a plan view, and the area ratio of the shallow bottom portion to the furnace bottom in a plan view is 5% to 40%.

A hinged protective collar for a kiln with rigid first and second body portions, each with a shape and size corresponding to the shape and size of a portion of a peripheral edge surface of the kiln sidewall and a hinge structure that pivotally couples the first and second body portions so they can be pivoted from a collapsed configuration to an expanded, use configuration. For a kiln with a faceted shape, each of the first and second body portions has a given number of corresponding facets. The hinged protective collar can span a portion of the periphery of the kiln, or the hinged protective collar could span 360 degrees and could have first and second hinge structures coupling the first and second body portions. The first and second body portions can have upturned proximal and, additionally or alternatively, distal end portions to prevent damage to kiln brick.

A hinged protective collar for a kiln with rigid first and second body portions, each with a shape and size corresponding to the shape and size of a portion of a peripheral edge surface of the kiln sidewall and a hinge structure that pivotally couples the first and second body portions so they can be pivoted from a collapsed configuration to an expanded, use configuration. For a kiln with a faceted shape, each of the first and second body portions has a given number of corresponding facets. The hinged protective collar can span a portion of the periphery of the kiln, or the hinged protective collar could span 360 degrees and could have first and second hinge structures coupling the first and second body portions. The first and second body portions can have upturned proximal and, additionally or alternatively, distal end portions to prevent damage to kiln brick.

A slag door arrangement (10) for a metallurgical furnace (1) includes a furnace vessel (2) with a slag tunnel (8) having a rectangular opening cross section extending laterally through the furnace vessel (2). A pivoting movement of the slag door about a horizontal pivoting axis and a lifting movement of the slag door in a direction perpendicular to the horizontal pivoting axis are independent of each other. A method for cleaning a slag opening of such a metallurgical furnace (1) includes pivoting the slag door to perform a cleaning movement from a position of the slag door in the slag tunnel near the interior of the furnace towards the outside of the furnace out of the slag tunnel at controllably different distances (clearances) from the bottom of the slag opening or of the slag tunnel.

A semiconductor burn-in oven includes a housing including a burn-in chamber and an opening to the burn-in chamber surrounded by a front face, a heating device, testing circuitry, a door and a sealing mechanism. The door has an open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening. The sealing mechanism is configured to form a seal around the opening between an interior side of the door and the front face when the door is in the closed position. The sealing mechanism includes at least one sealing member having a recessed position, in which a gap extends between the front face and the interior side of the door, and a sealing position, in which the at least one sealing member closes the gap and forms the seal.

A semiconductor burn-in oven includes a housing including a burn-in chamber and an opening to the burn-in chamber surrounded by a front face, a heating device, testing circuitry, a door and a sealing mechanism. The door has an open position, in which the burn-in chamber is accessible through the opening, and a closed position, in which the door covers the opening. The sealing mechanism is configured to form a seal around the opening between an interior side of the door and the front face when the door is in the closed position. The sealing mechanism includes at least one sealing member having a recessed position, in which a gap extends between the front face and the interior side of the door, and a sealing position, in which the at least one sealing member closes the gap and forms the seal.