A rapid thermal processing method and a rapid thermal processing device are provided. The rapid thermal processing method includes the following operations. A wafer is provided. A first heating operation is performed on the wafer to heat the wafer to a first temperature. The wafer is controlled to start rotating. The first temperature is maintained for a first predetermined time. A second heating operation is performed on the wafer to heat the wafer from the first temperature to a second temperature, and the second temperature is maintained for a second predetermined time. A third heating operation is performed on the wafer to heat the wafer from the second temperature to a third temperature, and the third temperature is maintained for a third predetermined time.

A method for temperature control includes: acquiring the present temperature of a reaction window in a process chamber of a semiconductor machine; comparing the present temperature with the preset temperature to acquire a comparison result; and adjusting the exhaust amount of an exhaust passage of the process chamber based on the comparison result to control the temperature of the reaction window.

The present invention relates to a furnace device for heating a plate, in particular a metal plate, by convection. The furnace device has a housing, in which a temperature control region for temperature-controlling a component part and an adjustment region are formed, wherein the adjustment region has a temperature control device for adjusting a temperature of a temperature control fluid. Further, the furnace device has a positioning device for positioning the plate in the temperature control region in a predetermined orientation, and a ventilator, which is arranged in the housing and which is adapted to circulate the temperature control fluid in the housing between the temperature control region and the adjustment region such that the temperature control fluid is flowable in a flow direction along a surface of the plate.

A furnace system including an outer shell which comprises a top flange, an elongated body portion, and a bottom flange, wherein the outer shell is a pressure vessel, with no penetrations in the elongated body portion; a heater assembly which comprises (i) a single-piece annular shaped insulation layer, and (ii) a plurality of heaters embedded in the insulation layer, wherein the heater assembly is disposed within the elongated body portion of the outer shell; and an innermost layer disposed within the annular-shaped insulation layer, wherein the innermost layer is a baffle tube configured to force a natural convective flow, wherein each of the plurality of heaters is individually controllable and the plurality of heaters are configured to heat different zones within the furnace to different temperatures and/or at different rates. The system may be used to heat treat magnet materials, such as those formed of Bi-2212, therein.

A process for producing cement clinker, may involve preheating raw meal in a preheater, calcining the preheated raw meal in a calciner, and burning the preheated and calcined raw meal in a furnace to give cement clinker. The furnace may be supplied with a combustion gas having an oxygen content, and the temperature within the furnace is ascertained. The process may involve cooling the cement clinker in a cooler. The oxygen supply to the furnace is under closed-loop control as a function of the temperature ascertained within the furnace. The temperature ascertained is compared with a target value and, in the event of any variance of the temperature ascertained from the target value, the oxygen supply to the furnace and/or to the calciner is increased or decreased. The target value is adjusted depending on a particle size distribution and/or a lime standard.

A control system for heat treatment of a stainless steel part in a furnace having an internal heat treatment chamber with a treatment atmosphere therein arranged in a plurality of zones, the system including at least one analysis apparatus for each one of the plurality of zones, each analysis apparatus in communication with a respective one of the zones for providing a gas to said zone, analyzing an atmosphere of said zone, and sensing a temperature of said zone for determining commencement of nitriding in the treatment atmosphere. A related furnace is also provided.

A metal furnace header gate system haying a recirculation port in the furnace, a hot gas generator, a gas blower, and a furnace door. The door has an embedded gas manifold and outlet ports that each connect the manifold to a directional nozzle. The blower draws exhaust from the recirculation port into the hot gas generator, which generates additional exhaust and mixes the exhaust gases together. The blower forces this exhaust mixture into the manifold, through the nozzles, and into the furnace. A computer controls the blower and the hot gas generator to regulate the system.

Methods and systems for managing a heating process are disclosed. An example method can comprise removing a first portion of a material from a vessel and measuring a first parameter of a second portion of the material in the vessel. The second portion of the material can remain in the vessel after the removal of the first portion. The method can comprise, determining a volume of the second portion of the material based on the first parameter, updating a second parameter based on the volume, and performing a process based on the updated second parameter.

An integrated sensor system for use in a furnace system including a furnace having at least one burner and two or more zones each differently affected by at least one furnace parameter regulating energy input into the furnace, including a first temperature sensor positioned to measure a first temperature in the furnace system, a second temperature sensor positioned to measure a second temperature in the furnace system; and a controller programmed to receive the first and second measured temperatures, and to adjust operation of a furnace system parameter based on a relationship between the first and second temperatures, thereby differentially regulating energy input into at least two of the zones of the furnace; wherein the relationship between the first and second temperatures is a function of one or more of a difference between the two temperatures, a ratio of the two temperatures, and a weighted average of the two temperatures.

A method includes firing a first burner into a furnace process chamber in a first initial condition, firing a second burner into the process chamber in a second initial condition, and measuring temperature at each of an array of locations in the process chamber. The first burner is adjusted to a first adjusted condition while the second burner is being fired at the second initial condition, and a resulting first temperature change is measured at each of the locations. The second burner is adjusted to a second adjusted condition while the first burner is being fired at the first initial condition, and a resulting second temperature change is measured at each of the locations. The measured first and second temperature changes are recorded as reference data for adjusting burner conditions to adjust temperatures at each of the locations. The method can thus be used to improve temperature uniformity throughout the array of locations.