A reactor furnace for coating fiber tow includes an elongate reactor having a fiber tow inlet and a fiber tow outlet; a thermo-chemical reactor section positioned along the elongate reactor; a first microwave source for directing microwave energy along the reactor from a first end of the reactor toward a second end of the reactor; a second microwave source for directing microwave energy along the reactor from the second end of the reactor toward the first end of the reactor; a gas inlet upstream of the thermo-chemical reactor; and a gas outlet downstream of the thermo-chemical reactor.

Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.

The present invention addresses the problem of providing a heating furnace that sufficiently exhibits the microwave effect produced by microwave heating and allows economical heating taking advantage of the characteristics of each heating method. The provided microwave composite heating furnace (1) is equipped with: a housing (10); a heating container (11) for accommodating and heating an object to be heated; a heating means (12) for heating the heating container (11) from the outside; a microwave irradiation device (13); a to-be-heated object supplying device (14) that supplies the object to be heated to the inside of the heating container (11); a gas introducing means (15) for introducing gas into the heating container (11); and a gas recovery means (16) for recovering the gas generated when heating the object to be heated. The heating container (11) comprises a material that has high electrical conductivity so as to reflect microwaves and confine the microwaves inside and that has high heat resistance so as not to react with the heated object, thereby confining microwaves irradiated into the heating container (11) not through the outer wall of the heating container, and allowing an improvement in electromagnetic field density.

A high frequency heating apparatus which heats a substrate by applying high frequency waves thereto. The high frequency heating apparatus includes a high frequency generator which generates high frequency to heat the substrate. The distance from the substrate to the high frequency generator is n/2*, where n is a natural number ranging from 1 to 6, and is the wavelength of the high frequency that is generated by the high frequency generator.

A reactor furnace for coating fiber tow includes an elongate reactor having a fiber tow inlet and a fiber tow outlet; a thermo-chemical reactor section positioned along the elongate reactor; a first microwave source for directing microwave energy along the reactor from a first end of the reactor toward a second end of the reactor; a second microwave source for directing microwave energy along the reactor from the second end of the reactor toward the first end of the reactor; a gas inlet upstream of the thermo-chemical reactor; and a gas outlet downstream of the thermo-chemical reactor.

A blank heating device having a heating furnace is provided and includes a plurality of heating members that heat a blank and a support fixture disposed within the heating furnace to support the blank. Further a transporting component is disposed beneath the support fixture and integrally displaces the support fixture and the blank to increase heating density of the blank. Consequently, a divisional heating occurs based on a size of the blank, which is a material for hot stamping, to improve heating density of the blank. Accordingly, marketability of a material is improved and a preheating time and heat loss is minimized. As a result, work convenience is improved and a consumption amount of energy is reduced.

An energy-saving heat treatment device for a metal substrate in a corrosive gas includes a process frame located in a radiation field. A substrate is configured to be inserted in the process frame, and the process frame covers an outer edge of an upper surface of the substrate to form a process space having a small volume. The process frame is made on the basis of the modification to the structure of the original process frame. By covering the outer edge of the substrate, the edge is protected from contact with selenium, and chalcogen elements in contact with the edge are reduced, and even residual chalcogen elements or hydrocarbons in a chamber do not corrode the edge of the substrate. Since the process space is minimized, the chalcogenide elements in the process chamber are greatly reduced, and a barrier layer on a bottom side of the substrate is significantly thinned.

A reactor furnace for coating fiber tow includes an elongate reactor having a fiber tow inlet and a fiber tow outlet; a thermo-chemical reactor section positioned along the elongate reactor; a first microwave source for directing microwave energy along the reactor from a first end of the reactor toward a second end of the reactor; a second microwave source for directing microwave energy along the reactor from the second end of the reactor toward the first end of the reactor; a gas inlet upstream of the thermo-chemical reactor; and a gas outlet downstream of the thermo-chemical reactor.

A blank heating device having a heating furnace is provided and includes a plurality of heating members that heat a blank and a support fixture disposed within the heating furnace to support the blank. Further a transporting component is disposed beneath the support fixture and integrally displaces the support fixture and the blank to increase heating density of the blank. Consequently, a divisional heating occurs based on a size of the blank, which is a material for hot stamping, to improve heating density of the blank. Accordingly, marketability of a material is improved and a preheating time and heat loss is minimized. As a result, work convenience is improved and a consumption amount of energy is reduced.

Embodiments of the present disclosure generally relate to apparatus and methods for semiconductor processing, more particularly, to a thermal process chamber. In one or more embodiments, a process chamber comprises a first window, a second window, a substrate support disposed between the first window and the second window, and a motorized rotatable radiant spot heating source disposed over the first window and configured to provide radiant energy through the first window.