A heat exchange system includes a shell having an interior with an inlet and an outlet wherein a first fluid circuit is defined from the inlet, through a heat exchange volume within the interior of the shell, to the outlet. A tubesheet is mounted within the shell dividing between the heat exchange volume and a plenum of a second fluid circuit within the interior of the shell. A set of tubes extends through the heat exchange volume, a respective interior passage of each tube being in fluid communication with the plenum through a respective opening though the tubesheet. The second fluid circuit includes the plenum and interior passages of the tubes. A spray nozzle is mounted in the plenum of the second fluid circuit with a spray outlet directed toward the tubesheet for cleaning the tubesheet with a submerged impingement jet issued from the spray nozzle.

A heat exchange system includes a shell having an interior with an inlet and an outlet wherein a first fluid circuit is defined from the inlet, through a heat exchange volume within the interior of the shell, to the outlet. A tubesheet is mounted within the shell dividing between the heat exchange volume and a plenum of a second fluid circuit within the interior of the shell. A set of tubes extends through the heat exchange volume, a respective interior passage of each tube being in fluid communication with the plenum through a respective opening though the tubesheet. The second fluid circuit includes the plenum and interior passages of the tubes. A spray nozzle is mounted in the plenum of the second fluid circuit with a spray outlet directed toward the tubesheet for cleaning the tubesheet with a submerged impingement jet issued from the spray nozzle.

Cooling arrangement and method for cooling of a heat source. The cooling arrangement comprises a closed loop, a semi-open loop and at least one fan. The closed loop comprises a primary side of a liquid-to-liquid heat exchanger receiving a first cooling fluid heated by the heat source, a first air-to-liquid heat exchanger downstream said primary side, and a first pump returning the first cooling fluid to the heat source. The semi-open loop comprises a tank storing a second cooling fluid, a second pump drawing the second cooling fluid from the tank, a secondary side of the liquid-to-liquid heat exchanger receiving the second cooling fluid from the second pump, an evaporating pad downstream said secondary side, and an inlet fluidly connected to a source of the second cooling fluid. The at least one fan causes an air flow through the evaporating pad and through the first air-to-liquid heat exchanger.

A method and apparatus for recovering water from a heated gas mixture. The heated gas mixture is passed across one or more heat pipe heat exchangers connected in series. Each heat pipe heat exchanger includes an upper chamber separated from a lower chamber, and sealed heat pipes extending between the chambers. The heated gas mixture is passed across the lower chamber, where the heated gas mixture is cooled with the plurality of heat pipes, passing heat into the heat pipe fluid and thereby condensing water vapor to liquid water on an outside of the of heat pipes. Ambient air or other gas of a cooling temperature is passed across the upper chamber to reduce the heated temperature controlled fluid inside the plurality of heat pipes.

A method and apparatus for recovering water from a heated gas mixture. The heated gas mixture is passed across one or more heat pipe heat exchangers connected in series. Each heat pipe heat exchanger includes an upper chamber separated from a lower chamber, and sealed heat pipes extending between the chambers. The heated gas mixture is passed across the lower chamber, where the heated gas mixture is cooled with the plurality of heat pipes, passing heat into the heat pipe fluid and thereby condensing water vapor to liquid water on an outside of the of heat pipes. Ambient air or other gas of a cooling temperature is passed across the upper chamber to reduce the heated temperature controlled fluid inside the plurality of heat pipes.

A bag assembly for use with a heat exchanger includes a flexible bag having of one or more sheets of polymeric material, the bag having a first end that bounds a first compartment and an opposing second end that bounds a second compartment, a support structure being disposed between the first compartment and the second compartment so that the first compartment is separated and isolated from the second compartment. A first inlet port, a first outlet port, and a first drain port are coupled with the flexible bag so as to communicate with the first compartment. A second inlet port, a second outlet port, and a second drain port are coupled with the flexible bag so as to communicate with the second compartment.

A bag assembly for use with a heat exchanger includes a flexible bag having of one or more sheets of polymeric material, the bag having a first end that bounds a first compartment and an opposing second end that bounds a second compartment, a support structure being disposed between the first compartment and the second compartment so that the first compartment is separated and isolated from the second compartment. A first inlet port, a first outlet port, and a first drain port are coupled with the flexible bag so as to communicate with the first compartment. A second inlet port, a second outlet port, and a second drain port are coupled with the flexible bag so as to communicate with the second compartment.

A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.

A condenser and semiconductor processing machine, relating to the art of semiconductor equipment. The condenser 100 includes a sealed cavity; wherein, a gas passage is provided in the sealed cavity; cooling liquid is filled around the gas passage; a gas inlet, a gas outlet, and a liquid outlet are provided on the sealed cavity, the gas inlet is communicated with the inlet of the gas passage, the gas outlet is communicated with the outlet of the gas passage, and the liquid outlet is communicated with the gas passage; the gas passage is a Tesla valve structure passage.

A method by a controller of a cooling system includes calculating a difference between a first temperature of ambient air and a second temperature of pre-cooled air. The pre-cooled air is ambient air that has been cooled by water from a water distribution system before it enters one or more condenser coils. The method further includes determining that the difference between the first and second temperatures is less than or equal to a predetermined temperature difference, and in response, determining that the first temperature is greater than or equal to a minimum temperature. The method further includes, if the first temperature is greater than or equal to the minimum temperature, instructing the water distribution system to distribute the water to pre-cool the ambient air for a predetermined length of time and to disable the distribution of the water after the predetermined amount of time has elapsed.