A heat dissipation device is configured for a working fluid to flow therethrough. The heat dissipation device includes a base and at least one heat dissipation fin. The base has at least one internal channel configured for the working fluid to flow therethrough. The at least one heat dissipation fin having an extension channel and an inlet and an outlet is in fluid communication with the extension channel. The at least one heat dissipation fin is inserted into one side of the base, and the extension channel is communicated with the at least one internal channel through the inlet and the outlet.

A core section of a heat exchanger includes a plurality of first fluid passages through which a first fluid is flowed, and a plurality of second fluid passages through which a second fluid is flowed to exchange thermal energy with the first fluid. The plurality of first fluid passages and the plurality of second fluid passages extend non-linearly along a length of the first fluid passages and the second fluid passages between a first core end and a second core end opposite the first core end. The first fluid passages and the second fluid passages have geometry formed to maximize primary heat transfer area.

A heat dissipation device is configured for a working fluid to flow therethrough. The heat dissipation device includes a base and at least one heat dissipation fin. The base has at least one internal channel configured for the working fluid to flow therethrough. The at least one heat dissipation fin having an extension channel and an inlet and an outlet is in fluid communication with the extension channel. The at least one heat dissipation fin is inserted into one side of the base, and the extension channel is communicated with the at least one internal channel through the inlet and the outlet.

A heat transfer plate comprises a first end portion, a second end portion and a center portion arranged in succession along a longitudinal center axis of the plate. The center portion comprises a heat transfer area provided with a heat transfer pattern comprising support ridges and support valleys longitudinally extending parallel to the longitudinal center axis of the plate. The support ridges and support valleys are alternately arranged along a number of separated imaginary longitudinal straight lines extending parallel to the longitudinal center axis of the plate and along a number of separated imaginary transverse straight lines extending perpendicular to the longitudinal center axis of the plate. The heat transfer pattern further comprises turbulence ridges and turbulence valleys. At least a plurality of the turbulence ridges and turbulence valleys along at least a center portion of their longitudinal extension extend inclined relative to the transverse imaginary straight lines.

A heat dissipation device is configured for a working fluid to flow therethrough. The heat dissipation device includes a base, at least one heat dissipation fin, and at least one fluid replenisher. The base has at least one internal channel configured for the working fluid to flow therethrough. The at least one heat dissipation fin having an extension channel and an inlet and an outlet is in fluid communication with the extension channel. The at least one heat dissipation fin is inserted into one side of the base, and the extension channel is communicated with the at least one internal channel through the inlet and the outlet. The at least one fluid replenisher is connected to at least one internal channel.

A heat transfer plate includes a heat transfer area provided with a heat transfer pattern comprising elongate alternately arranged heat transfer ridges and valleys, a respective top portion of the ridges extending in a top plane and a respective bottom portion of the valleys extending in a bottom plane. The heat transfer ridges comprise ridge contact areas within which the ridges are arranged to abut an adjacent first heat transfer plate. Within at least half of the heat transfer area, the top portions of the ridges have a first width w1, and the bottom portions of the valleys have a second width w2, w1≠w2. The top portion of a number of first heat transfer ridges of the heat transfer ridges, within a respective first ridge contact area of the ridge contact areas, has a third width w3, wherein, if w1>w2 then w3<w1, and, if w1<w2 then w3>w1.

The disclosure discloses a heat dissipation member, including a base plate, a plurality of first sheet structures, and a plurality of second sheet structures. Each first sheet structure is vertically arranged on a side of the base plate, and an end of the each first sheet structure is arranged adjacent to a side edge of the base plate. A spacing between two adjacent first sheet structures gradually increases from a first side edge of the base plate to a second side edge of the base plate. The first side edge is not adjacent to the second side edge. Each second sheet structure is arranged between two adjacent first sheet structures.

A heat exchanger having a first core with a first end and a second end and having a first plurality of hot flow channels fluidly isolated from a first plurality of cool flow channels. The first plurality of hot flow channels and the first plurality of cool flow channels can be arranged in a first checkerboard pattern. The heat exchanger also having a first header connected to the first end of the first core, a first hot flow inlet section connected to the first plurality of hot flow channels, and a first curved portion with a first inner hot flow route that is longer than a first outer hot flow route. The first header also having a first cool flow outlet section connected to the first plurality of cool flow channels with the first cool flow outlet section being fluidly isolated from the hot flow inlet section.

A passive vortex formed or induced from a temperature difference across a cavity or void aggregates and supports a horizontal flow over the top of the cavity. A cavity of a suitable depth and width exhibits a small difference in temperature, or heat source, along the sides or bottom of cavity. A resulting convective flow tends to form a rising current along a warmer side, and a complementary downward current on an opposed side of the cavity. The formed vortex tends to draw the cooler downward flow across the warmer, heated surface, enhancing the vortex flow. The vortex aligns with a horizontal flow across the top of the cavity as the upward current complements the downward current on an opposed side of the cavity. A plurality of adjacent cavities tend to align with an aggregate horizontal flow contributed from each cavity.

Embodiments described herein generally relate to a temperature control system in a substrate support assembly. In one embodiment, a substrate support assembly is disclosed. The substrate support assembly includes a support plate assembly The support plate assembly includes a first fluid supply manifold, a second fluid supply manifold, a first fluid return manifold, a second fluid return manifold, a plurality of first fluid passages, a plurality of second fluid passages, and a fluid supply conduit. The plurality of first fluid passages extend from the first fluid supply manifold to the first fluid return manifold. The plurality of second fluid passages extend from the second fluid supply manifold to the second fluid return manifold. The plurality of fluid passages extend across an upper surface of the support plate assembly in an alternating manner. The fluid supply conduit is configured to supply a fluid to the fluid supply manifolds.