Disclosed is a workpiece processing apparatus that performs a predetermined processing on a workpiece. The workpiece processing apparatus includes: a workpiece table configured to place the workpiece thereon; a processor configured to process the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the processor; a position measuring device configured to measure a position of the movement mechanism; a detector configured to detect a position of the workpiece placed on the workpiece table; and a corrector configured to calculate a positional correction amount of the workpiece table based on a measurement result of the position measuring device and a detection result of the detector.

The present invention provides a surface following nozzle, an observation device for a moving object surface, and an observation method for the moving object surface that can remove water in the vicinity of the nozzle while following changes in the shape and changes in the distance of a moving object. A surface following nozzle includes a nozzle that injects gas from a tip end thereof, a separating part that closes a base end of the nozzle, and an extending and contracting part that is provided at a rear side of the nozzle via the separating part, and extends and contracts along an axial direction of the nozzle. The extending and contracting part includes an elastic body that applies a forward force with respect to the nozzle.

Systems and methods provide for detection and controlled interaction with one or more objects. The system can include an imaging subsystem (20), a tool subsystem (26) containing one or more tools, a stage subsystem (16) and a control system (40). The control system (40) can integrate controls for each of the other subsystems, which controls can be implement desired functions over a variety of process parameters to perform the controlled interaction.

Systems and methods provide for detection and controlled interaction with one or more objects. The system can include an imaging subsystem (20), a tool subsystem (26) containing one or more tools, a stage subsystem (16) and a control system (40). The control system (40) can integrate controls for each of the other subsystems, which controls can be implement desired functions over a variety of process parameters to perform the controlled interaction.

The invention relates to a sensor device for examining the coating of a disc as part of a coating process. The sensor device comprises a first optical sensor system for determining the layer thickness of the coating applied to the disc, and comprises a rotation apparatus. The invention is characterized in that the first optical sensor system is designed to simultaneously identify at least one first position-based measured value and one second position-based measured value, the first and the second position-based measured value describing the distance between the sensor systems and the surface of the disc. As a result of this, the sensor system is configured such that the first position-based measured value of a coated region of the disc and the second position-based measured value of an uncoated region of the disc are identified. Furthermore, the first optical sensor system comprises at least one linear guide, which extends from the central region to the edge. In addition, a control and analysis apparatus is provided for calculating the layer thickness of the disc at the position of the first position-based measured value with the aid of the first and the second position-based measured value. Furthermore, the invention relates to a coating for a disc, comprising inspecting the coating for determining the layer thickness of the coating applied to the disc.

The invention relates to a sensor device for examining the coating of a disc as part of a coating process. The sensor device comprises a first optical sensor system for determining the layer thickness of the coating applied to the disc, and comprises a rotation apparatus. The invention is characterized in that the first optical sensor system is designed to simultaneously identify at least one first position-based measured value and one second position-based measured value, the first and the second position-based measured value describing the distance between the sensor systems and the surface of the disc. As a result of this, the sensor system is configured such that the first position-based measured value of a coated region of the disc and the second position-based measured value of an uncoated region of the disc are identified. Furthermore, the first optical sensor system comprises at least one linear guide, which extends from the central region to the edge. In addition, a control and analysis apparatus is provided for calculating the layer thickness of the disc at the position of the first position-based measured value with the aid of the first and the second position-based measured value. Furthermore, the invention relates to a coating for a disc, comprising inspecting the coating for determining the layer thickness of the coating applied to the disc.

A method is described for determining a relative position of an axis of rotation of a rotary table of a coordinate measuring machine. The rotary table has or forms a reference element that is arranged eccentrically in relation to the axis of rotation. The method includes a measuring step including performing a rotary movement of the rotary table, and producing measuring points that encode a position of the reference element by a sensor of the coordinate measuring machine during the rotary movement. The method includes a determining step including determining the relative position of the axis of rotation of the rotary table based on the measuring points.

A method is described for determining a relative position of an axis of rotation of a rotary table of a coordinate measuring machine. The rotary table has or forms a reference element that is arranged eccentrically in relation to the axis of rotation. The method includes a measuring step including performing a rotary movement of the rotary table, and producing measuring points that encode a position of the reference element by a sensor of the coordinate measuring machine during the rotary movement. The method includes a determining step including determining the relative position of the axis of rotation of the rotary table based on the measuring points.

A measurement system for frames of heavy duty trucks and trailers does not require a dimensional reference database. A plurality of electronic targets are attached to selected target points on the frame. A position of the laser scanner from the selected target points is determined. Measurement data for additional targets is determined. The frame dimensions are then analyzed for defects that are greater than a pre-set tolerance. Measurements outside of a tolerance range can be flagged with contrasting color. The results of the frame analysis are shown on the user's screen, on the electronic target, and can be printed out or emailed for future inspection. The frame can be repaired while the targets and laser scanner are still deployed so that the measurement system can continue to display the status of the measurement points in real time and the success of the repairs can be confirmed.

A measurement system for frames of heavy duty trucks and trailers does not require a dimensional reference database. A plurality of electronic targets are attached to selected target points on the frame. A position of the laser scanner from the selected target points is determined. Measurement data for additional targets is determined. The frame dimensions are then analyzed for defects that are greater than a pre-set tolerance. Measurements outside of a tolerance range can be flagged with contrasting color. The results of the frame analysis are shown on the user's screen, on the electronic target, and can be printed out or emailed for future inspection. The frame can be repaired while the targets and laser scanner are still deployed so that the measurement system can continue to display the status of the measurement points in real time and the success of the repairs can be confirmed.