G01B11/168

Optical apparatus, optical system, and method for measuring an amount of strain of an object

An optical apparatus includes a coherent light source; a transmission assembly configured to receive light emitted by the coherent light source, split the light into object light and reference light so that the object light and the reference light travel along different paths receive object light reflected by an object to be measured, and combine the object light reflected by the object to be measured and the reference light; and a photosensitive camera disposed at an output of the transmission assembly, and configured to receive combined light and process the combined light to record light intensity information capable of characterizing a spatial position of a surface of the object to be measured.

Displacement detection device

A displacement detection device is capable of stably and accurately detecting an amount of displacement. A polarization maintaining fiber has a length not to be equal to a length obtained by dividing, a product of an integral multiple of twice a length of a resonator times a refractive index of the resonator and a beat length obtained from a difference between propagation constants of two polarization modes, by a wavelength of the light source, is selected from a range including a length equal to the above length. The polarization maintaining fiber includes multiple polarization maintaining fibers fitted to each other by removable connectors.

Scatterometry based methods and systems for measurement of strain in semiconductor structures

Methods and systems for measuring optical properties of transistor channel structures and linking the optical properties to the state of strain are presented herein. Optical scatterometry measurements of strain are performed on metrology targets that closely mimic partially manufactured, real device structures. In one aspect, optical scatterometry is employed to measure uniaxial strain in a semiconductor channel based on differences in measured spectra along and across the semiconductor channel. In a further aspect, the effect of strain on measured spectra is decorrelated from other contributors, such as the geometry and material properties of structures captured in the measurement. In another aspect, measurements are performed on a metrology target pair including a strained metrology target and a corresponding unstrained metrology target to resolve the geometry of the metrology target under measurement and to provide a reference for the estimation of the absolute value of strain.

Apparatus and method for determining refractive index, central tension, or stress profile

Apparatus can comprise a cavity at least partially defined by a first major surface of a reference block and configured to receive a sample. The apparatus can comprise a first polarization-switching light source configured to emit a first polarization-switched light beam toward the cavity and a first detector configured to detect a corresponding signal. The apparatus can comprise a second polarization-switching light source configured to emit a second polarization-switched light beam toward the cavity and a second detector configured to detect a corresponding signal. The first reference block can be positioned between the second detector and the second reference block. Methods of determining an estimated stress profile can comprise determining a central tension from a measured retardation profile of the sample. Methods can comprise determining an initial stress profile from a refractive index profile of the sample. Methods can comprise scaling and adjusting stress profiles.

Method of predicting gravity-free shape of glass sheet and method of managing quality of glass sheet based on gravity-free shape
11614323 · 2023-03-28 · ·

A method of predicting the gravity-free shape of a glass sheet and a method of managing the quality of a glass sheet based on the gravity-free shape of the glass sheet. The initial shape of a glass sheet is determined. When the glass sheet is flattened, values of stress at a plurality of locations in the glass sheet are obtained. A shape that the glass sheet will have when the flattened glass sheet is deformed such that the values of stress are zero is predicted as a stress-induced shape and a gravity-free shape of the glass sheet is predicted by combining the initial shape and the stress-induced shape. Quality management is performed on glass sheets based on gravity-free shapes thereof predicted using the method of predicting the gravity-free shape of a glass sheet.

Methods and apparatus to determine a twist parameter and/or a bend angle associated with a multi-core fiber

A multi-core fiber includes multiple optical cores, and for each different core of a set of different cores of the multiple optical cores, a total change in optical length is detected. The total change in optical length represents an accumulation of all changes in optical length for multiple segments of that different core up to a point on the multi-core fiber. A difference is determined between the total changes in optical length for cores of the set of different cores. A twist parameter and/or a bend angle associated with the multi-core fiber at the point on the multi-core fiber is/are determined based on the difference.

Measurement Device for Measuring Light, Measurement System and Measurement Method for Detecting Light Parameters
20230194244 · 2023-06-22 ·

The invention relates to a measurement device (10) for measuring light (200) from a light source (2), comprising an optical unit (30) with a delay element (31) for splitting a polarized light beam (210) of the light (200) into a first partial beam (211) and a second partial beam (212), which have a defined phase shift relative to one another. Furthermore, the invention relates to a measurement system (1), as well as a measurement method (100).

SENSOR ASSEMBLY FOR MEASURING AT LEAST A FIRST TORSION OF A ROTOR BLADE OF A WIND TURBINE GENERATOR SYSTEM

A sensor assembly for measuring a torsion of a rotor blade of a wind turbine generator system includes a first light source configured to generate light and a first transmitter-side polarizer disposed downstream thereof in a direction of light propagation and configured to generate linearly polarized light as a first transmission light. A second light source is configured to generate unpolarized light as a second transmission light. First and second detector elements are arranged and adapted to receive the first and second transmission light. A first receiver-side polarizer is disposed upstream of the first detector element in the direction of light propagation and a second receiver-side polarizer is disposed upstream of the second detector element in the direction of light propagation. An orientation of a polarization plane of the first receiver-side polarizer and an orientation of a polarization plane of the second receiver-side polarizer are different from one another.

Distributed brillouin sensing using correlation
09784567 · 2017-10-10 · ·

Methods and systems for sensing conditions of a fiber include splitting a light signal into two branches. A first branch is converted to have a mode different from that of the second branch. Both branches are mode multiplexed into a single fiber. An output of the fiber is mode demultiplexed into the two branches. The first branch is mode converted to its original mode. Brillouin scattering patterns of the two branches are compared to determine a temperature and strain profile of the fiber.

OPTICAL PALPATION DEVICE AND METHOD FOR EVALUATING A MECHANICAL PROPERTY OF A SAMPLE MATERIAL

The present disclosure provides an optical palpation device for evaluating a mechanical property of a sample material. The device comprises a body having a sensing portion and a sensing layer positioned at the sensing portion of the body and having a sensing surface positioned for direct or indirect contact with a surface area of the sample material. The sensing layer is deformable and has a predetermined deformation-dependent optical property. The device further comprises a light detector positioned to detect light transmitted through at least a portion of the sensing layer. The optical palpation device is arranged such that, when the sensing surface of the sensing layer is in direct or indirect contact with the surface area of the sample material and a pressure is applied through both the sensing layer and at least a portion of the surface area of the sample material, because of the predetermined deformation or pressure-dependent optical property of the sensing layer the mechanical property of the sample material is measurable by detecting the light that transmitted through at least a portion of the sensing layer.