An articulating probe for a measurement device includes a base platform, a rotor platform that is movable relative to the base platform, and a sensor element coupled to the rotor platform. The rotor platform is coupled to the base platform via a spherical parallel kinematic system.

An articulating probe for a measurement device includes a base platform, a rotor platform that is movable relative to the base platform, and a sensor element coupled to the rotor platform. The rotor platform is coupled to the base platform via a spherical parallel kinematic system.

An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. At least one misalignment compensation element is configured to reduce a signal offset that results from a misalignment of at least one coil of the coil board configuration (e.g., the coil board configuration may comprise a printed circuit board with a plurality of layers in which the coils are located and the misalignment of the at least one coil may result from a registration error, such as within manufacturing tolerances, in a layer to layer registration as part of a fabrication process).

A coupling element for receiving a probe tip in a probe measuring apparatus has a journal at one end with a first connecting/coupling region. A screw insert has a first connecting/coupling region at one end with a recess, in particular for connecting to the coupling element 16. The journal of the coupling element forms, on an outer surface, or the recess of the screw insert forms, on an inner surface, multiple thread segments or respectively which do not adjoin one another in a radial circumferential direction. A probe measuring apparatus includes the coupling element, the screw insert, a coupling arm/measuring shaft, and a probe insert connected to the coupling arm by way of the coupling element and the screw insert.

A coupling element for receiving a probe tip in a probe measuring apparatus has a journal at one end with a first connecting/coupling region. A screw insert has a first connecting/coupling region at one end with a recess, in particular for connecting to the coupling element 16. The journal of the coupling element forms, on an outer surface, or the recess of the screw insert forms, on an inner surface, multiple thread segments or respectively which do not adjoin one another in a radial circumferential direction. A probe measuring apparatus includes the coupling element, the screw insert, a coupling arm/measuring shaft, and a probe insert connected to the coupling arm by way of the coupling element and the screw insert.

A deformable sensor is provided. The deformable sensor includes a first deformable member defining a first cavity configured to be filled with a medium, a second deformable member defining a second cavity, a rigid component disposed between the first deformable member and the second deformable member such that the first deformable member is positioned on a first portion of the rigid component and the second deformable member is positioned on a second portion of the rigid component, the rigid component including an aperture disposed thereon, and a valve member configured to fluidly couple the first cavity of the first deformable member to the second cavity of the second deformable member via the aperture. The first deformable member has a first rigidity value when the valve member is configured in a first orientation, and a second rigidity value when the valve member is configured in the second orientation.

A method includes: installing a square calibration master on a table, and measuring each of measurement surfaces A, B, and C of the square calibration master by a position measurement sensor attached to a main spindle; calculating a first squareness between the measurement surfaces A and B; calculating a second squareness between the measurement surfaces A and C; calculating a difference between the first squareness and the second squareness; comparing the difference with a preliminarily set difference threshold value; calculating an average value of the first squareness and the second squareness when the difference is equal to or less than the difference threshold value, and calculating a corrected squareness based on an angular deviation and the first squareness or the second squareness when the difference exceeds the difference threshold value; and setting the compensation parameter based on the average value or the corrected squareness.

A method includes: installing a square calibration master on a table, and measuring each of measurement surfaces A, B, and C of the square calibration master by a position measurement sensor attached to a main spindle; calculating a first squareness between the measurement surfaces A and B; calculating a second squareness between the measurement surfaces A and C; calculating a difference between the first squareness and the second squareness; comparing the difference with a preliminarily set difference threshold value; calculating an average value of the first squareness and the second squareness when the difference is equal to or less than the difference threshold value, and calculating a corrected squareness based on an angular deviation and the first squareness or the second squareness when the difference exceeds the difference threshold value; and setting the compensation parameter based on the average value or the corrected squareness.

A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.