An air-bearing chuck includes a nozzle portion and a gas channel portion. The nozzle portion is provided with a plurality of support force nozzles for generating an air cushion on a top surface of the nozzle portion. The gas channel portion includes a first gas channel configured to transmit a first gas to the plurality of support force nozzles to provide support force. Embodiments of the present application can implement that the first gas channel transmits the first gas to the plurality of support force nozzles to provide support force, and an air cushion is generated on the top surface of the nozzle portion by regulating gas flow of the first gas in the first gas channel, thereby keeping a supported object supported by the air cushion stably floating up on one side, away from the top surface of the nozzle portion, of the air cushion.

A device may include a flexible material defining an exterior of a cavity, an interior electrode located within the cavity, a first peripheral electrode peripherally located with respect to the interior electrode on a first side of the interior electrode, a second peripheral electrode peripherally located with respect to the interior electrode on a second side of the interior electrode where the interior electrode is between the first peripheral electrode and the second peripheral electrode, a controller electrically connected to the interior electrode, the first peripheral electrode, and the second peripheral electrode, and programmed instructions written into memory of the controller where the programmed instructions cause the controller, when executed to measure a first capacitance between the first peripheral electrode and the interior electrode and measure a second capacitance between the second peripheral electrode and the interior electrode.

A measuring device and method, provided in a region surrounded by a focus ring and configured to measure an amount of consumption of the focus ring, includes a disc-shaped base substrate, sensor electrodes provided on the base substrate, a high frequency oscillator configured to apply a high frequency signal to the sensor electrodes, and an operation unit configured to calculate measurement values indicating electrostatic capacitances of the sensor electrodes from detection values corresponding to potentials of the sensor electrodes. The operation unit calculates a representative value (for example an average value) of the measurement values corresponding to the amount of consumption of the focus ring and derives the amount of consumption of the focus ring with reference to a table in which the amount of consumption of the focus ring is associated with the representative value of the measurement values.

Disclosed herein is a method and apparatus for controlling surface characteristics by measuring capacitance of a process kit ring. The method includes interfacing a ring with a jig assembly for measuring capacitance in at least a first location of the ring. The ring has that includes a top surface, a bottom surface, and an inner surface opposite an outer surface. At least the bottom surface has an external coating placed thereon. The method further includes contacting a measuring device to the first location on the outer surface proximate the bottom surface. The measuring device contacts an opening in the external coating to the body. The measuring device contacts a first conductive member that is electrically coupled to the ring. A capacitance is measured on the measuring device. The capacitance across the top surface is measured.

A capacitance sensor may be positioned to detect size changes in objects. The sensor may be constructed with to use mutual capacitance or self-capacitance to detect the size changes.

The present disclosure provides a thickness measuring device including a base, a first moving component, a second moving component, a frame and a linking component. The base includes a base main body and a sensor. The first moving component moves along a first direction and includes a contacting end. The second moving component moves along a second direction and includes a sensing element corresponding to the sensor. The frame is connected to the base and includes a frame main body, a first guiding groove and a second guiding groove. The first and second guiding grooves are formed on the frame main body for accommodating the first and second moving components. The linking component includes a rotating element, a first connection portion and a second connection portion. The first and second connection portions are disposed on a surface of the rotating element and connected to the first and second moving components.

Embodiments disclosed herein include a sensor wafer. In an embodiment, the sensor wafer comprises a substrate, wherein the substrate comprises a first surface, a second surface opposite the first surface, and an edge surface between the first surface and the second surface. In an embodiment, the sensor wafer further comprises a plurality of sensor regions formed along the edge surface, wherein each sensor region comprises a self-referencing capacitive sensor.

A method for measuring thickness of dielectric layer in circuit board includes the following steps: First, circuit board including dielectric layer and circuit layers is provided. The dielectric layer is between the circuit layers, and the circuit board further includes test area including test pattern and through hole. The test pattern includes first conductor and second conductors. The distance between the side of the through hole and the second conductor is less than the distance between the side of the through hole and the first conductor. Next, measuring device including conductive pin and sensing element is provided. Next, the conductive pin is powered, and one end of the conductive pin is electrically connected to the second conductor. Next, the sensing element is moved along the through hole to obtain sensing curve, and the thickness of the dielectric layer is calculated via variations of the sensing curve.

A method for measuring thickness of dielectric layer in circuit board includes the following steps: First, circuit board including dielectric layer and circuit layers is provided. The dielectric layer is between the circuit layers, and the circuit board further includes test area including test pattern and through hole. The test pattern includes first conductor and second conductors. The distance between the side of the through hole and the second conductor is less than the distance between the side of the through hole and the first conductor. Next, measuring device including conductive pin and sensing element is provided. Next, the conductive pin is powered, and one end of the conductive pin is electrically connected to the second conductor. Next, the sensing element is moved along the through hole to obtain sensing curve, and the thickness of the dielectric layer is calculated via variations of the sensing curve.

The present disclosure provides a thickness measuring device including a base, a first moving component, a second moving component, a frame and a linking component. The base includes a base main body and a sensor. The first moving component moves along a first direction and includes a contacting end. The second moving component moves along a second direction and includes a sensing element corresponding to the sensor. The frame is connected to the base and includes a frame main body, a first guiding groove and a second guiding groove. The first and second guiding grooves are formed on the frame main body for accommodating the first and second moving components. The linking component includes a rotating element, a first connection portion and a second connection portion. The first and second connection portions are disposed on a surface of the rotating element and connected to the first and second moving components.