The present disclosure provides a multi-frequency hybrid heterodyne laser tracker system based on a single light source. According to the laser tracking system proposed in the present disclosure, multi-frequency laser is obtained by conducting multi-acousto-optic frequency shift on a dual-longitudinal-mode laser unit, and an absolute ranging precision gauge is constructed by using a dual-longitudinal-mode interval of a light source. With the frequency shift difference of a multi-acousto-optic frequency shifter, an absolute ranging roughness gauge is constructed, and the relative displacement measurement of dual-frequency light interference is achieved. Meanwhile, by utilizing the reflection of multiple reflectors and light splitting and combining of polarization prisms, synchronous measurement of multi-wavelength absolute distance, relative displacement and PSD position is achieved, resolving the problem that an existing laser tracker uses multiple light sources, which leads to difference in measurement datum, and consequently to the difficultly in traceback.

An imaging apparatus configured to image an object to be examined is provided. The apparatus includes a splitting unit configured to split light obtained by combining the returned light and the reference light into a plurality of lights having different polarization components; and a detecting unit configured to detect the plurality of lights. The apparatus further includes a correcting unit configured to correct a phase difference between different polarization components generated by an optical member provided on an optical path of the measurement light or an optical path of the reference light.

A optical measurement apparatus includes: an optical system which generates a pupil image of a measurement target, using light; a polarization generator which generates a polarized light from the light; a self-interference generator which generates a plurality of beams divided from the pupil image, using the polarized light, and causes the plurality of beams to interfere with each other to generate a self-interference image; and an image analysis unit configured to extract phase data from the self-interference image, and to move the measurement target to a focus position on the basis of the phase data.

Optical coherence tomography (OCT) systems using a polarization switch and/or a polarization beam splitter are generally described. In an example, an OCT system includes a light source configured to emit a beam and an interferometer configured to receive the beam. The interferometer includes a reference path and an interferometer sample path. The OCT system further includes a polarization switch configured to selectively change a polarization state of the beam and a lens system that includes a first sample path and a second sample path. The polarization switch is further configured to direct the beam onto the first sample path upon selection of a first polarization state and to direct the beam onto the second sample path upon selection of a second polarization state that is different from the first polarization state.

A differential polarization interferometer is provided. An interferometer performs direct measurement of phase shift of a light wave passed under an arbitrary angle through a sample composed of a transparent substrate holding a thin deposited test film, for metamaterial testing. An example apparatus has a laser source and a first polarizer, and two optically connected arms. A first arm creates orthogonally polarized components of a single output beam for a broadband non-polarizing beam splitter. A second arm has a controllable phase retarder to introduce a phase shift into one polarization component of the reflected single output beam, and a second polarizer to equalize and mix the polarization components of the reflected single output beam. This transforms the reflected single output beam into a beam resulting from interference of polarization components of the reflected single output beam. A photodetector transforms an intensity of the beam into an electric signal for output.

An imaging system uses polarized light to illuminate the target and then uses a polarization filter to remove the light that is reflected from the target without modification. The target can include one or more anisotropic objects that scatter the light and alter the polarization state of the reflected light and causing it to be selectively transmitted to the imaging device which can record the transmitted light through the filter. The illuminating light can be circularly polarized and the filter can remove the circularly polarized light. The target can include asymmetric nanoparticles, such as nanorods that alter the amplitude or phase of the scattered light enabling pass through the filter to be detected by the imaging device.

The embodiments herein relate to a method for deriving topography of an object surface. A linearly polarized light wave is directed towards the object surface and a reference surface. Images of reflected linearly polarized light wave for a plurality of wavelengths are obtained. The images are obtained for at least four polarizations for each of the plurality of wavelengths. The reflected linearly polarized light wave is a reflection of the linearly polarized light wave directed towards the object surface and the reference surface. The topography of the object surface based on the obtained images is obtained.

The present invention provides a sample inspection and quantitative imaging system and method for performing off-axis interferometric imaging while enabling to record off-axis holograms in an extended field of view (FOV) than possible using a given camera and imaging setup, and thus to enlarge (e.g. double, triple, or even more than this) the interferometric FOV, without changing the imaging parameters, such as the magnification and the resolution.

Methods for characterizing the surface shapes of optical elements include the following steps: carrying out, in an interferometric test arrangement, at least a first interferogram measurement on the optical element by superimposing a test wave, which has been generated by diffraction of electromagnetic radiation on a diffractive element and has been reflected at the optical element, carrying out at least one additional interferogram measurement on in each case one calibrating mirror for determining calibration corrections, and determining the deviation from the target shape of the optical element based on the first interferogram measurement carried out on the optical element and the determined calibration corrections. At least two interferogram measurements are carried out for the at least one calibrating mirror, which differ from one another with regard to the polarization state of the electromagnetic radiation.

Provided is an ellipsometer including a polarizing optical device configured to separate light, reflected from a sample that is irradiated with illumination light comprising a linearly polarized light, into a first linearly polarized light in a first polarization direction and a second linearly polarized light in a second polarization direction that is orthogonal to the first polarization direction, and a light-receiving optical system configured to calculate an Ψ and Δ, an amplitude ratio and a phase difference of the two polarized light respectively, from an interference fringe formed by interference between the first linearly polarized light and the second linearly polarized light after passing through an analyzing device with transmission axis different from the first polarization direction and the second polarization direction.