The present invention provides a reflective condensing interferometer for focusing on a preset focus. The reflective condensing interferometer includes a concave mirror set, a convex mirror, a light splitting element, and a reflecting element. The concave mirror set has first and second concave surface portions which are oppositely located on two sides of a central axis passing through the preset focus and are concave on a surface facing the central axis and the preset focus. Light is preset to be incident in parallel to the central axis in use. The convex mirror is disposed between the concave mirror set and the preset focus on the central axis, and is convex away from the preset focus. The light splitting element vertically intersects with the central axis between the convex mirror and the preset focus. The reflecting element is disposed between the light splitting element and the convex mirror.

A system (1) for generating a signal from a surface (22) having a speed V in a direction U, comprising: a light source (2) emitting a Gaussian light beam along a first optical path (11); a sensor (3) able to evaluate the effects of the electromagnetic interference of the first beam; a means (2′, 4) for generating a second Gaussian light beam along a second optical path (12); a second sensor (3′) able to evaluate the effects of electromagnetic interference of the second beam; a focusing lens (5, 6) located on the first and/or the second optical path (11, 12), focusing the light beam at a distance f and defining an upstream optical path (11′, 12′); and a means (4′, 7) for routing the second beam able to redirect the second path (12′) in the direction of the first path (11′).

A method for obtaining the profile of the outer surface (22) of a medium (21) having a median plane (23) comprising the following steps: obtaining two time signals A and B (1002), for, at each instant, a same geometrical target on a readout line of the outer surface (22); determining at least one Doppler frequency (2001) associated with each time signal A and B; sampling each time signal A and B (2002) at a frequency greater than 2 times the Doppler frequency to obtain a payload signal; determining an envelope (2004) of the payload signal of each signal A and B; performing a relative combination between the envelopes of each signal A and B (3001) to obtain a monotonic and bijective function F; and determining the profile of the outer surface (3002) using a calibration of the function F.

The present disclosure relates to a three-dimensional shape measurement apparatus for obtaining height information of a measurement target object using a prism. The three-dimensional shape measurement apparatus includes an illumination unit irradiating light on the measurement target object, a prism unit receiving reflective light reflected from the measurement target object and directing the reflective light to an image formation lens, an imaging unit receiving the reflective light from the prism unit and capturing an image of the reflective light, and a height measurement unit measuring a height of the measurement target object based on the image captured by the imaging unit.

A system for measuring the topography of a surface including a carriage assembly and a base assembly. The carriage assembly comprising a plurality of displacement-measuring probes coupled to a carriage support structure. The base assembly positioned adjacent to the carriage assembly and comprising at least one reference object with an opening sized to receive a test object. At least one of the carriage assembly or the base assembly is configured to translate with respect to the other in at least two directions to enable at least one of the displacement-measuring probes to measure a displacement to a reference surface of the reference object and at least another one of the displacement-measuring probes to measure a displacement to a target surface of the target object whose topography is measured.

A splitting and recombining optical component with an increased field of view while maintaining or only minimally increasing the space requirements therefor is provided. Further, the combination of the changes in physical geometry and refractive index of the beam splitting and recombining optical device can increase the field of view of a system while maintaining, or even reducing, the mass of the system in which the present beam splitting and recombining optic may be utilized

A system (1) for generating a signal from a surface (22) having a speed V in a direction U, comprising: a light source (2) emitting a Gaussian beam of light along a first optical path (11); a sensor (3) able to evaluate the effects of the electromagnetic interference of the first beam; an optical splitter (4) located upstream of the sensor (3), generating, from the first beam of light, a second beam of light along a second optical path (12); a focusing lens (5, 6) located on the first and/or the second optical path (11, 12), focusing the beam of light at a distance f and defining an upstream optical path (11′, 12′), and a means (7) for routing the second beam, comprising a mirror redirecting the second path such that the lengths of the first (11′) and second (12′) paths are different.

A system and method for metrology and profilometry using a light field generator are disclosed. For this purpose, a system such as an optical analysis system scans a sample using light, and detects light reflected off a sample in various ways. The system operates different operational modes including a backscatter intensity, a triangulation, and an interferometric mode. For this purpose, the optical analysis system includes one or more optical angle modulation systems, such as surface acoustic wave (SAW) modulators, that emit light, a sample holder, and a scanning system that scans the one or more SAW modulators relative to the sample holder. The system performs tomographic reconstructions of information generated by the scans to create 3D maps/volume datasets of the sample.

The present invention provides a reflective condensing interferometer for focusing on a preset focus. The reflective condensing interferometer includes a concave mirror set, a convex mirror, a light splitting element, and a reflecting element. The concave mirror set has first and second concave surface portions which are oppositely located on two sides of a central axis passing through the preset focus and are concave on a surface facing the central axis and the preset focus. Light is preset to be incident in parallel to the central axis in use. The convex mirror is disposed between the concave mirror set and the preset focus on the central axis, and is convex away from the preset focus. The light splitting element vertically intersects with the central axis between the convex mirror and the preset focus. The reflecting element is disposed between the light splitting element and the convex mirror.

A measurement system is presented for use in metrology measurements on patterned samples. The system comprises: at least one light source device configured to generate broadband light, at least one detection device configured to provide spectral information of detected light, and an optical system. The optical system comprises at least an oblique channel system for directing incident light generated by the light source(s) along an oblique illumination channel onto a measurement plane, on which a sample is to be located, and directing broadband light specularly reflected from the sample along a collection channel to the detection device(s). The optical system further comprises an interferometric unit comprising a beam splitting/combining device and a reference reflector device. The beam splitting/combining device is accommodated in the illumination and collection channels and divides light propagating in the illumination channel into sample and reference light beams propagating in sample and reference paths, and combines reflected reference and sample paths into the collection channel to thereby create a spectral interference pattern on a detection plane.