Disclosed are a device and a method for measuring laser displacement. The device comprises an interferometric measurement module, a laser light source module, a signal modulation module, a control processing module and an optical vernier demodulation module. The control processing module controls the signal modulation module to apply a light source modulation signal to the laser light source module, so that the laser light source module provides two laser beams with fixed frequency difference to the interferometric measurement module. The control processing module controls the interferometric measurement module to perform interferometric measurement. During measurement, lasers respectively interfere in two Fabry-Perot cavities in the interferometric measurement module, and are detected by two photodetectors to form main and secondary measurement interference signals. The optical vernier demodulation module demodulates the main and secondary measurement interference signals obtained by the interferometric measurement module.

Systems and methods for alignment and testing of a photonic device include a light source, an interferometer, a detector, and a processing circuit. The processing circuit may generate control signal(s) for the light source to project a beam through the interferometer to a device under testing (DUT). The interferometer may receive an interference beam from an optical fiber of the DUT. The processing circuit may align optical fiber(s) for the DUT, determine one or more characteristics for the DUT, and so forth based on the interference beam and a reference beam generated by the interferometer.

Systems and methods are provided for inspection. One embodiment is a method for measuring a hole. The method includes driving a fiber optic probe into the hole, determining a profile by scanning the hole via the fiber optic probe, and determining whether an interface gap exists at the hole based on the profile.

Embodiments disclosed herein include a faceplate having a sensor assembly, a processing chamber having the same, and a method for monitoring a substrate in a processing chamber. In one embodiment, a faceplate is configured to introduce processing gases into a plasma processing chamber. The faceplate has one or more holes. A sensor assembly is disposed in the one or more holes. The sensor assembly has a sensor and a controller.

Systems and apparatuses for a polarization laser sensor are disclosed. The polarization laser sensor can include a pump source, a common section, a reference section and a detection section. The common section is provided with a gain medium, and the detection section is provided with a sensing element configured to cause an optical path difference. The reference section and the detection section are connected to the common section though a first polarization splitting unit and a second polarization splitting unit. The common section is provided with an output unit or each of the reference section and the detection is provided with the output unit, the output unit is connected to a photoelectric detector through a light uniting unit, and a polarization rotation unit is disposed between the light uniting unit and the output unit.

Systems and methods for transprojection of geometry data acquired by a coordinate measuring machine (CMM). The CMM acquires geometry data corresponding to 3D coordinate measurements collected by a measuring probe that are transformed into scaled 2D data that is transprojected upon various digital object image views captured by a camera. The transprojection process can utilize stored image and coordinate information or perform live transprojection viewing capabilities in both still image and video modes.

Systems and methods for transprojection of geometry data acquired by a coordinate measuring machine (CMM). The CMM acquires geometry data corresponding to 3D coordinate measurements collected by a measuring probe that are transformed into scaled 2D data that is transprojected upon various digital object image views captured by a camera. The transprojection process can utilize stored image and coordinate information or perform live transprojection viewing capabilities in both still image and video modes.

A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.

A fiber optic sensor arrangement is disclosed that includes a plurality of optical fiber based sensor elements, the sensor elements configured to modify an associated optical carrier signal in accordance with changes in a sensed quantity at a location of the sensor element and a phase modulation arrangement for phase modulating each optical carrier signal in accordance with respective uncorrelated pseudorandom binary sequence signals. The sensor arrangement also includes an interferometer module for receiving each of the phase modulated optical carrier signals, the interferometer module operable to convert a change in the phase modulated optical carrier signals to a change in optical intensity of the corresponding optical carrier signal to generate a combined modulated optical intensity signal, an optical intensity detector for measuring the combined modulated optical intensity signal and generating a time varying electrical detector signal and an analog to digital convertor to convert the time varying electrical detector signal to a time varying digitized detector signal. Also included in the sensor arrangement is a decorrelator arrangement for decorrelating the time varying digitized detector signal against the respective uncorrelated pseudorandom binary sequence corresponding to each of the optical carrier signals to recover each of the modulated optical carrier signals and a demodulator for demodulating each of the modulated optical carrier signals to recover the respective optical carrier signal to determine the changes in the sensed quantity at the location of the sensor element.

Systems and methods for alignment and testing of a photonic device include a light source, an interferometer, a detector, and a processing circuit. The processing circuit may generate control signal(s) for the light source to project a beam through the interferometer to a device under testing (DUT). The interferometer may receive an interference beam from an optical fiber of the DUT. The processing circuit may align optical fiber(s) for the DUT, determine one or more characteristics for the DUT, and so forth based on the interference beam and a reference beam generated by the interferometer.