A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multi-mode optical fibers respectively receiving signals at different positions on the same plane. The present measurement system has the advantages of high measurement precision, a large measurement range, not being sensitive to temperature drift, and small overall size, and can be used as a photoetching machine ultra-precision workpiece table position measurement system.

A system and method are described for performing tear film structure measurement. A broadband light source illuminates the tear film. A spectrometer measures respective spectra of reflected light from at least one point of the tear film. A color camera performs large field of view imaging of the tear film, so as to obtain color information for all points of the tear film imaged by the color camera. A processing unit calibrates the camera at the point measured by the spectrometer so that the color obtained by the camera at the point matches the color of the spectrometer at the same point. The processing unit determines, from the color of respective points of the calibrated camera, thicknesses of one or more layers of the tear film at the respective points. Other applications are also described.

An all-optical ultrasonic detection device based on light-induced ultrasound and laser interference. In the device, a first laser is connected to an optical switch, the optical switch is connected to a dielectric film and a second laser generates a reference laser beam and a plurality of detection laser beams. The reference laser beam generates a first frequency-shifted reference laser beam and a plurality of second frequency-shifted reference laser beams. The first frequency-shifted reference laser beam generates a carrier signal. The detection laser beams are reflected by the dielectric film and then interfere with the second frequency-shifted reference laser beams. The interference light passes through a fourth fiber coupler and reaches a second photodiode to generate a frequency-modulated signal. The frequency-modulated signal and the carrier signal are input to a frequency mixer to generate a mixed signal. An acquisition unit is configured to obtain a vibration signal for the to-be-detected object.

An optical distance measurer includes: a beam splitter splitting a laser beam and outputting as measurement light and reference light; a measurement light beam splitter splitting the measurement light and outputting as first measurement light and second measurement light; a reference light beam splitter splitting the reference light and outputting as first reference light and second reference light; a first optical system having a first Rayleigh length, the first optical system emitting the first measurement light to a target object; and a second optical system having a second Rayleigh length different from the first Rayleigh length, the second optical system emitting the second measurement light to the target object; a first receiver receiving the first reference light and first reflection light that is the first measurement light reflected by the target object and outputting a first receiving signal indicating the first reference light and the first reflection light; and a second receiver receiving the second reference light and second reflection light that is the second measurement light reflected by the target object and outputting a second receiving signal indicating the second reference light and the second reflection light.

Multichannel optical coherence systems are disclosed in which optical coherence tomography (OCT) subsystems are operably and respectively connected to optical fibers of a multichannel optical probe, such that each optical fiber forms at least a distal portion of a sample beam path of a respective OCT subsystem. The optical fibers are in optical communication with distal optical elements such that external beam paths associated therewith are directed towards a common spatial region external to the housing. Image processing computer hardware is employed to process OCT signals obtained from the plurality of OCT subsystems to generate an OCT image dataset comprising a plurality of OCT A-scans and process the OCT image dataset to generate volumetric image data based on known positions and orientations of the external beam paths associated with the OCT subsystems.

Translations of an object in a plurality of different spatial directions are measured using a plurality of interferometers to detect interference with light that has been reflected from a diffusively reflective surface, preferably using diffuse reflection from the same planar surface to measure in each of the different spatial directions. At least the interferometers that measure translation in directions that are not perpendicular to the surface each comprises a single mode fiber and a collimator configured to transmit the outgoing light to the object successively through the single mode fiber and the collimator, and to collect reflection into the single mode fiber with the collimator both along a same beam direction. It has been found that, when reflection of a beam with a beam direction at an oblique angle to a diffusively reflective surface is used, the interference resulting from translation of the object is due substantially only to translation in the beam direction.

An OCT system for measuring a retina as part of an eye health monitoring and diagnosis system. The OCT system includes an OCT interferometer, where the interferometer comprises a light source or measurement beam and a scanner for moving the beam on the retina of a patient's eye, and a processor configured to execute instructions to cause the scanner to move the measurement beam on the retina in a scan pattern. The scan pattern is a continuous pattern that includes a plurality of lobes. The measurement beam may be caused to move on the retina by the motion of a mirror that intercepts and redirects the measurement beam. The mirror position may be altered by the application of a drive signal to one or more actuators that respond to the drive signal by rotating the mirror about an axis or axes.

An apparatus comprising: a double path interferometer comprising a sample path for an object and a reference path; a source of linearly polarized light for the double path interferometer, a phase plate positioned in the sample path; means for superposing the sample path and reference path to create a beam of light for detection; means for spatially modulating the beam of light to produce a modulated beam of light; means for dispersing the modulated beam of light to produce a spatially modulated and dispersed beam of light; a first detector, a second detector, and means for splitting the spatially modulated and dispersed beam of light, wherein light of a first linear polarization is directed to the first detector and light of a second linear polarization, orthogonal to the first linear polarization, is directed to the second detector.

A high-resolution phase detection method and system based on a plane grating laser interferometer. The method uses a dual-frequency interferometer to measure the displacement, and the measurement signal processing comprises an integral part and a decimal portion, a phase equation set of a displacement measurement signal is constructed according to a measurement optical path principle of a heterodyne plane grating laser interferometer; a non-linear equation set for which the unknowns are instantaneous phase, interval phase and signal amplitude is established; and the equation sets above are solved by using the least squares method, so as to realize phase discrimination, thereby realizing precise displacement measurement. The method can solve the problems in the traditional time measurement-based phase detection technology, such as low measurement accuracy, and failing to satisfy small measuring range measurement. The measurement method can be applied to systems such as precision manufacturing equipment and lithography machine.

A digital measuring device implemented on a photonic integrated circuit, the digital measuring device including a laser source configured to provide light, a first ring resonator configured to produce a first frequency comb of light from the laser source, wherein at least a portion of the first frequency comb of light is directed at a moving object, a local oscillator configured to provide a reference beam, at least one waveguide structure configured to combine the reference beam with light reflected from the moving object to produce a measurement beam, a first multiplexer configured to split the measurement beam into a plurality of channels spaced in frequency, and a plurality of detectors configured to detect an intensity value of each channel of the plurality of channels to measure a distance between the digital measuring device and the moving object.