Measurement cavities described herein include a cylindrical chamber having a first open end and a second open end; a first cap covering the first open end of the cylindrical chamber and a second cap covering the second open end of the cylindrical chamber, wherein the first and second caps hermetically seal the cylindrical chamber and wherein the first cap is rigidly coupled to the second cap; and a wafer holder positioned within and coupled to the cylindrical chamber. The measurement cavity has a mass m, a stiffness k, and a damping constant c configured such that the transmissibility $.Math.\frac{x}{F}.Math.$
of an input force at 60 Hz in the measurement cavity is reduced by a factor of at least 10 and the measurement cavity has a natural frequency of greater than 300 Hz.

A device. The device includes a substrate a substrate, a first optical waveguide disposed on the substrate and a second optical waveguide disposed on the substrate. The device further includes a coupling element disposed on the substrate, the coupling element configured to couple an optical signal in the first optical waveguide to the second optical waveguide, and couple an optical signal in the second optical waveguide to the first optical waveguide. A first reflective element is disposed at an end of the first optical waveguide configured to reflect optical signals in the first optical waveguide. A second reflective element disposed at an end of the second optical waveguide configured to reflect signals in the second optical waveguide.

A device and a method for characterizing the surface shape of a test object. The device for characterizing the surface shape of a test object has a test arrangement (130, 230) for determining the surface shape of a test object (111, 112, 113, 211, 212, 213) using a test wave. The test wave has a wavefront generated by diffraction at a diffractive optical element. The device additionally has a first vacuum chamber (110, 210) and a second vacuum chamber (120, 220), wherein the second vacuum chamber (120, 220) has a magazine for mounting at least two diffractive optical elements (121, 122, 123, 221, 222, 223).

A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.

There is provided retro-reflective interferometer device for detection and/or measurement of displacements and/or rotations and/or mechanical vibrations, the device includes a transceiver unit including at least one radiation source capable of emitting a radiation beam and at least one radiation receiver; a movable unit movably mounted with respect to said transceiver unit, the movable unit includes one or more movable elements that are susceptible to displacement and/or vibration by an external force; and at least one retro-reflective element capable of reflecting back the radiation beam to form a sequence of radiation patterns; and an analyzing element operationally associated with the radiation receiver for analyzing a displacement change, an intensity change and/or a frequency change in the sequence of radiation patterns. Further provided are systems including the device and methods utilizing the same.

A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.

Measurement cavities described herein include a cylindrical chamber having a first open end and a second open end; a first cap covering the first open end of the cylindrical chamber and a second cap covering the second open end of the cylindrical chamber, wherein the first and second caps hermetically seal the cylindrical chamber and wherein the first cap is rigidly coupled to the second cap; and a wafer holder positioned within and coupled to the cylindrical chamber. The measurement cavity has a mass m, a stiffness k, and a damping constant c configured such that the transmissibility

[00001]$.Math.\frac{x}{F}.Math.$

of an input force at 60 Hz in the measurement cavity is reduced by a factor of at least 10 and the measurement cavity has a natural frequency of greater than 300 Hz.

There are provided devices, systems and methods utilizing interferometric retro-reflection displacement/vibration meter. In particular, there are provided laser interferometer devices, systems and methods for measuring three-axis small angle displacements and vibrations of a body.

An OCT system is constructed on a micro optical bench or semiconductor optical bench. The present OCT system may use free space optics and avoid the use of fiber optics.

A device. The device includes a substrate a substrate, a first optical waveguide disposed on the substrate and a second optical waveguide disposed on the substrate. The device further includes a coupling element disposed on the substrate, the coupling element configured to couple an optical signal in the first optical waveguide to the second optical waveguide, and couple an optical signal in the second optical waveguide to the first optical waveguide. A first reflective element is disposed at an end of the first optical waveguide configured to reflect optical signals in the first optical waveguide. A second reflective element disposed at an end of the second optical waveguide configured to reflect signals in the second optical waveguide.