A frequency modulation continuous wave (FMCW)-based system configured to convert measurements of a linearly modulated wave from a time-domain into a frequency-domain to produce a non-linear frequency signal, where the non-linear frequency signal comprises a known linear component representing the desired linear modulation and an unknown non-linear component representing the non-linearity of the modulation. The FMCW-based system is further configured to determine coefficients of a basis function approximating a difference between the non-linear frequency signal and the linear frequency component in the frequency domain. The FMCW-based system is further configured to detect one or multiple spectrum peaks in the distorted beat signal with the distortion compensated according to the basis function with the determined coefficients to determine one or multiple distances to the one or multiple objects in the scene.

The source light having a range of optical wavelengths is split into sample light and reference light. The sample light is delivered into a sample, such that the sample light is scattered by the sample, resulting in signal light that exits the sample. The signal light and the reference light are combined into an interference light pattern having optical modes having oscillation frequency components respectively corresponding to optical pathlengths extending through the sample. Different sets of the optical modes of the interference light pattern are respectively detected, and high-bandwidth analog signals representative of the optical modes of the interference light pattern are output. The high-bandwidth analog signals are parallel processed, and mid-bandwidth digital signals are output. The mid-bandwidth digital signals are processed over an i number of iterations, and a plurality of low-bandwidth digital signals are output on the ith iteration. The sample is analyzed based on the low-bandwidth digital signals.

A method for measuring a surface of an object including at least one structure using low coherence optical interferometry, the method including the steps of acquiring an interferometric signal at a plurality of measurement points in a field of view and, for at least one measurement point, attributing the interferometric signal acquired to a class of interferometric signals from a plurality of classes, each of the classes being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signal to derive therefrom an item of information on the structure at the measurement point, as a function of its class.

Embodiments of systems and methods for measuring a surface topography of a semiconductor chip are disclosed. In an example, a method for measuring a surface topography of a semiconductor chip is disclosed. A plurality of interference signals and a plurality of spectrum signals are received by at least one processor. Each of the interference signals and spectrum signals corresponds to a respective one of a plurality of positions on a surface of the semiconductor chip. The spectrum signals are classified by the at least one processor into a plurality of categories using a model. Each of the categories corresponds to a region having a same material on the surface of the semiconductor chip. A surface height offset between a surface baseline and at least one of the categories is determined by the at least one processor based, at least in part, on a calibration signal associated with the region corresponding to the at least one of the categories. The surface topography of the semiconductor chip is characterized by the at least one processor based, at least in part, on the surface height offset and the interference signals.

A method for measuring geometric errors of a numerical control turntable based on a four-station laser tracer system includes: establishing a self-calibration coordinate system and calibrating positions of tracking interferometers; respectively placing each of target lenses at three non-coplanar points that are above the numerical control turntable and keep certain distances from the numerical control turntable, controlling the numerical control turntable to rotate at a certain angular interval θ.sub.j, and based on positions of the tracking interferometers being known after calibration, solving coordinates of each of measurement points in the self-calibration coordinate system using a non-linear least square method; establishing a turntable coordinate system; perform a conversion between the turntable coordinate system and the self-calibration coordinate system; separating six geometric errors of the numerical control turntable using spatial position errors of the three points at a same position and using the linear least squares method.

An analysis apparatus includes an acquisition part that acquires a plurality of interference images of the object to be measured from the interference measurement apparatus, a calculation part that calculates a sine wave component and a cosine wave component of an interference signal for each pixel in the plurality of interference images, respectively, an error detection part that detects an error between a first Lissajous figure constructed on the basis of the sine wave component and the cosine wave component for each pixel and an ideal second Lissajous figure, a correction part that corrects the sine wave component and the cosine wave component for each pixel on the basis of the error, and a geometry calculation part that calculates surface geometry of the object to be measured on the basis of the corrected sine wave component and cosine wave component.

A laser interferometer that includes a light source configured to emit laser light, an optical divider configured to divide the laser light into a first optical path and a second optical path, an optical modulator being provided on the first optical path or the second optical path, including an oscillator that oscillates when a current is applied, and being configured to modulate the laser light by using the oscillator, a photoreceptor configured to receive the laser light and output a photoreception signal, the laser light being reflected by an object to be measured that is provided on the first optical path or the second optical path, and a demodulation circuit configured to demodulate, from the photoreception signal, a Doppler signal derived from the object to be measured, based on a reference signal and a modulation signal derived from the optical modulator, wherein Iq/f≤1×10.sup.−7 is satisfied, where an amplitude value of the current applied to the oscillator that is oscillating is Iq [A] and an oscillation frequency of the oscillator is f [Hz].

A laser interferometer that includes a laser light source configured to emit emission light, a light splitter configured to split the emission light into first split light, and second split light incident on an object to be measured, a light modulator disposed on an optical path on which the first split light advances, and configured to modulate the first split light into a reference light having a different frequency from a frequency of the first split light, an optical path length change unit provided between the light splitter and the light modulator, and configured to change a first optical path length, the first optical path length being an optical path length between the light splitter and the light modulator, a photoreceptor configured to receive an interference light of the reference light and an object light generated by reflecting the emission light at the object to be measured, and to output a light reception signal, and a controller configured to control operation of the optical path length change unit in accordance with a second optical path length, the second optical path length being an optical path length between the light splitter and the object to be measured.

A focus scan type imaging device for imaging a target object in a sample that induces aberration proposed. The device includes: a light source unit for emitting a beam; an optical interferometer for splitting the beam emitted from the light source into a sample wave and a reference wave, and providing an interference wave formed by interference between a reflection wave that is the sample wave reflected from the sample and the reference wave; a camera module for imaging the interference wave; a scanning mirror disposed on an optical path of the sample wave of the optical interferometer and configured to reflect the sample wave to cause the sample wave to scan the sample; a wavefront shaping modulator disposed on the optical path of the sample wave of the optical interferometer; and an imaging controller configured to operate in a phase map calculation mode and in an imaging mode.

An analysis apparatus includes an acquisition part that acquires a plurality of interference images based on lights having a plurality of different wavelengths from an interference measurement apparatus, a removing part that outputs an interference component by removing a non-interference component included in an interference signal for each pixel in the plurality of the interference images, a conversion part that generates an analysis signal by performing a Hilbert transformation on the interference component, and a calculation part that calculates a distance between a reference surface and a surface of an object to be measured by specifying a phase gradient of a wavelength of light radiated onto the reference surface and the surface of the object to be measured on the basis of the interference component and the analysis signal.