Patent classifications
G01D2205/95
MEASURING APPARATUS AND METHOD, PROCESSING APPARATUS AND METHOD, PATTERN FORMING APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
Position-measuring device
A position-measuring device includes a carrier body and scanning units movable relative thereto. At least three surfaces of the carrier body each carry a first and second measuring graduation, each having a series of graduation lines. Each of the measuring graduations is associated with a scanning unit for scanning the respective measuring graduation at a scanning location such that, for each surface, two scanning units are disposed for scanning the respective measuring graduations. In each case, these two scanning units are disposed in such a way, and the graduation lines of the two measuring graduations are inclined with respect to each other in such a way, that two normal planes extending respectively in the direction of the respective graduation lines through the respective scanning locations of the two scanning units have a common axis of intersection, whereby the three resulting axes of intersection extend through a common point.
POSITION-MEASURING DEVICE
A position-measuring device includes a carrier body and scanning units movable relative thereto. At least three surfaces of the carrier body each carry a first and second measuring graduation, each having a series of graduation lines. Each of the measuring graduations is associated with a scanning unit for scanning the respective measuring graduation at a scanning location such that, for each surface, two scanning units are disposed for scanning the respective measuring graduations. In each case, these two scanning units are disposed in such a way, and the graduation lines of the two measuring graduations are inclined with respect to each other in such a way, that two normal planes extending respectively in the direction of the respective graduation lines through the respective scanning locations of the two scanning units have a common axis of intersection, whereby the three resulting axes of intersection extend through a common point.
Apparatus and methods utilizing emissive patterns to determine positional information
Absolute, non-juxtaposed position encoders (i.e., position-determining systems) for up to six degrees-of-freedom are described. Each of these apparatus includes a display, an observation device, display circuitry, and logic circuitry. The display includes a plurality of pixels. In addition, the observation device is capable of observing light emitted from a region of the display. The display circuitry is able to cause one or more emissive patterns to be displayed on the display. The logic circuitry is able to determine a position of the observation device relative to the display at least in part from the light observed by the observation device. The observation device is capable of being moved in relation to the display, or vice versa. Aspects of the invention are suitable for use in a diverse set of applications such as: autonomously-piloted vehicles, multi-axis robotic arms, three-dimensional (3D) printers, computer-numerical-control (CNC) machine tools, and cranes.
APPARATUS AND METHODS UTILIZING EMISSIVE PATTERNS TO DETERMINE POSITIONAL INFORMATION
Absolute, non-juxtaposed position encoders (i.e., position-determining systems) for up to six degrees-of-freedom are described. Each of these apparatus includes a display, an observation device, display circuitry, and logic circuitry. The display includes a plurality of pixels. In addition, the observation device is capable of observing light emitted from a region of the display. The display circuitry is able to cause one or more emissive patterns to be displayed on the display. The logic circuitry is able to determine a position of the observation device relative to the display at least in part from the light observed by the observation device. The observation device is capable of being moved in relation to the display, or vice versa. Aspects of the invention are suitable for use in a diverse set of applications such as: autonomously-piloted vehicles, multi-axis robotic arms, three-dimensional (3D) printers, computer-numerical-control (CNC) machine tools, and cranes.
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
Manual control device, control and operating unit including a manual control device, and work machine or construction machine
A manual control device for a control and operating unit of a lifting work platform, work machine or construction machine has at least one actuating unit which has an actuation element having at least one magnetic position element, and an evaluating unit having at least one magnetic field sensor unit. The evaluating unit is configured to detect a position and/or movement of the actuation element in a plane of movement based on a sensor signal from the magnetic field sensor unit. The actuation element is movable relative to the sensor unit along a further direction of movement perpendicularly to the plane of movement, wherein the evaluating unit is configured to detect a movement of the actuation element along the further direction of movement based on a sensor signal from the magnetic field sensor unit.
MEASURING APPARATUS AND METHOD, PROCESSING APPARATUS AND METHOD, PATTERN FORMING APPARATUS AND METHOD, EXPOSURE APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method
Position information of a movable body within an XY plane is measured with high accuracy by an encoder system whose measurement values have favorable short-term stability, without being affected by air fluctuations, and also position information of the movable body in a Z-axis direction orthogonal to the XY plane is measured with high accuracy by a surface position measuring system, without being affected by air fluctuations. In this case, since both of the encoder system and the surface position measuring system directly measure the upper surface of the movable body, simple and direct position control of the movable body can be performed.