The embodiments described herein are directed to systems and devices for electronically measuring the absolute position of one or more moving targets e.g., along the length of a metal beam using mutual capacitive sensing. The beam may be made of metal and may have a limited inset area to fit a position detection sensor device along its length. The moving targets may have no active elements and the position of multiple targets may be detected simultaneously along the beam. The systems and devices described herein do not utilize electronic position feedback and instead rely on an integrated ruler and minimize the total number of sensors required to support recalibration, thereby minimizing scan time (more sensors results in a linear increase in scan time).

Disclosed is a noise detection circuit comprising: a control module configured to control a drive module such that a to-be-detected capacitor is charged with a first voltage in a first period, and the control module controls a cancellation module such that a cancellation capacitor is charged with the first voltage in the first period, or such that both terminals of the cancellation capacitor are connected to the first voltage; the control module controls the cancellation module such that a first terminal of the to-be-detected capacitor is connected to a first terminal of the cancellation capacitor in a second period; the control module controls a charge transfer module such that charges of the to-be-detected capacitor and charges of the cancellation capacitor are converted in a third period to generate an output voltage; and a processing module configured to determine a noise value at least based on the output voltage.

A capacitance detection device includes at least one detection electrode, a shield electrode disposed in close vicinity of the detection electrode, an AC signal source that supplies an AC signal to the shield electrode, a detection circuit that detects capacitance between a physical object in close vicinity of the detection electrode and the detection electrode on the basis of a detection signal output from the detection electrode and the AC signal output from the AC signal source, and a phase adjustment circuit provided between the AC signal source and the shield electrode. The phase adjustment circuit advances the phase of the AC signal output from the AC signal source.

A capacitive sensing device includes an antenna electrode for emitting an alternating electric field in response to an alternating voltage caused in the antenna electrode and a control and evaluation circuit configured to maintain the alternating voltage equal to an alternating reference voltage by injecting a current into the antenna electrode and to measure the current. The control and evaluation circuit includes a microcontroller with a digital output for providing a digital signal and a low-pass filter operatively connected to the digital output for generating the alternating reference voltage by low-pass-filtering the digital signal.

A capacitance type rotation angle detection stage light includes a pivoting member and a supporting member for supporting the pivoting member. A reflecting grating is attached on the pivoting member, and the reflecting grating rotates along with the pivoting member. A signal grating is attached on the supporting member. The signal grating and the reflecting grating are arranged oppositely. The signal grating comprises capacitance emitting pieces, a capacitance receiving piece and shielding pieces. The reflecting grating comprises capacitance reflecting pieces that reflect signals sent from the capacitance emitting pieces to the capacitance receiving piece. Periodic excitation signals applied to the capacitance emitting pieces finally form a composite signal on the capacitance receiving piece through coupling of two pairs of capacitors that the capacitance emitting pieces and the capacitance reflecting pieces, and the capacitance reflecting pieces and the capacitance receiving piece.

A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.

Techniques for manipulating objects and for determining the position of the objects in parallel dipole line (PDL) trap systems are provided. In one aspect, a PDL trap is provided. The PDL trap includes: a pair of dipole line magnets connected to a potential, wherein the pair of dipole line magnets includes magnets having magnetizations perpendicular to long axes of the magnets; a diamagnetic rod levitating above the pair of dipole line magnets; and at least one electrode above the pair of dipole line magnets, adjacent to the diamagnetic rod. The system produces a hybrid one-dimensional electromagnetic potential which is tunable by voltage. Techniques for operating the PDL trap to manipulate the diamagnetic rod and to detect a position of the diamagnetic rod in the PDL trap are also provided.

Sensor devices and methods are provided where a test signal is applied to a capacitive sensor. Furthermore, a bias voltage is applied to the capacitive sensor via a high impedance component. A path for applying the test signal excludes the high impedance component. Using this testing signal, in some implementations a capacity imbalance of the capacitive sensor may be detected.

Disclosed is a noise detection circuit comprising: a control module configured to control a drive module such that a to-be-detected capacitor is charged with a first voltage in a first period, and the control module controls a cancellation module such that a cancellation capacitor is charged with the first voltage in the first period, or such that both terminals of the cancellation capacitor are connected to the first voltage; the control module controls the cancellation module such that a first terminal of the to-be-detected capacitor is connected to a first terminal of the cancellation capacitor in a second period; the control module controls a charge transfer module such that charges of the to-be-detected capacitor and charges of the cancellation capacitor are converted in a third period to generate an output voltage; and a processing module configured to determine a noise value at least based on the output voltage.

A physical quantity sensor includes a substrate, a fixation section and a wiring line provided to the substrate, a contact section adapted to electrically connect the fixation section and the wiring line to each other, and a movable electrode electrically connected to the wiring line via the fixation section. The contact section is disposed in the fixation section in a second area outside a first area obtained by imaginarily extending a fixed support area in a displacement direction of the movable electrode in a plan view. The fixed support area is sandwiched by edge portions of an area where the movable electrode and the fixation section are connected to each other.