A system and method for providing a fluid flow strain gauge that may be mounted inside a pipe and connected to a base unit that uses capacitive or resistive technology to determine a direction and a rate of flow of a fluid through the pipe by measuring the force applied to the strain gauge by the flow of fluid.

A fluid flow rate measurement device includes: a manifold element including a first fluid conduit extending from a surface thereof and terminating in a first port opening at a first lateral surface thereof and a second port opening at a second lateral surface thereof, and a second fluid conduit extending from a surface thereof and terminating in a third port opening at the first lateral surface and a fourth port opening at the second lateral surface; a fluid restriction element fixed to the first lateral surface and arranged to provide a sealed fluid pathway between the first port and the third port; and—a pressure sensor assembly fixed to the second lateral surface and including a first pressure sensor in fluidic communication with the second port, and a second pressure sensor in fluidic communication with the fourth port.

A fluid flow rate measurement device includes: a manifold element including a first fluid conduit extending from a surface thereof and terminating in a first port opening at a first lateral surface thereof and a second port opening at a second lateral surface thereof, and a second fluid conduit extending from a surface thereof and terminating in a third port opening at the first lateral surface and a fourth port opening at the second lateral surface; a fluid restriction element fixed to the first lateral surface and arranged to provide a sealed fluid pathway between the first port and the third port; and—a pressure sensor assembly fixed to the second lateral surface and including a first pressure sensor in fluidic communication with the second port, and a second pressure sensor in fluidic communication with the fourth port.

Embodiments described herein relate to a flow meter assembly. The inline flow meter assembly includes a housing, an elongated flow member, and a piston. The housing includes a fluid passage. The elongated flow member has a shaft portion and an opposite fluid flow portion. The fluid flow portion has an outer peripheral surface. The shaft portion is coupled to the housing. The piston has a plate. The plate has a plate orifice. The piston and the plate move axially between a no flow position where the outer peripheral surface of the fluid flow portion is engaged with the plate orifice to prevent a fluid flow and a full flow position where the outer peripheral surface of the fluid flow portion is disengaged with the plate orifice such that the fluid flow enters the plate orifice and passes through the fluid passage in the axial direction of movement of the piston.

Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

A flow sensor includes a fluid chamber configured to receive a fluid. A diaphragm assembly is configured to be displaced whenever the fluid within the fluid chamber is displaced. A transducer assembly is configured to monitor the displacement of the diaphragm assembly and generate a signal based, at least in part, upon the quantity of fluid displaced within the fluid chamber.

A leak detection system for plumbing fixtures may include a dual channel system (700) having two channels of water flow to measure fluid flow that is both intentional and accidental. A disclosed embodiment may include a body (710) that is sometimes fastened to a top plate (715) sometimes fastened with socket head cap screws (717). The dual fluid channels may comprise a lower default or first flow path (790). Water flowing though the lower or default path may pass through a paddle wheel assembly (760) and paddle wheel (762) wherein flow rate may be measured by a myriad of systems including magnets or other sensors deposed on the distal ends of the paddle wheel spokes. A leak detection system may also include a single channel system (800) with a flap system. Disclosed systems may include other types of leak measuring devices.

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

An electronic device manufacturing system includes: a gas supply; a mass flow controller (MFC) coupled to the gas supply; an inlet coupled to the MFC; an outlet; a control volume serially coupled to the inlet to receive a gas flow; and a flow restrictor serially coupled to the control volume and the outlet. A controller is adapted to allow the gas supply to flow gas through the control volume and the flow restrictor to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. A process chamber is coupled to a flow path, which is coupled to the mass flow controller, the process chamber to receive one or more process chemistries via the mass flow controller.

A sensor and method for use in measuring a physical characteristic of a fluid in a microfluidic system is provided. A microfluidic chip has a thin deformable membrane that separates a microfluidic channel from a microwave resonator sensor. The membrane is deformable in response to loading from interaction of the membrane with the fluid. Loading may be fluid pressure in the channel, or shear stress or surface stress resulting from interaction of the membrane with the fluid. The deformation of the membrane changes the permittivity in the region proximate the sensor. A change in permittivity causes a change in the electrical parameters of the sensor, thereby allowing for a characteristic of the fluid, such as flow rate, or a biological or chemical characteristic, to be measured. Also, a microwave sensor with improved sensitivity for characterizing a fluid in a microfluidic channel is provided. The sensor has a rigid and very thin layer, for example in the range of 10 um to 100 um, in the microfluidic chip allowing for the positioning of the sensor very close to the microfluidic channel, which enables very high resolution sensing.