A gas-detecting apparatus includes a pump module connected to a first input and a second input to intake air, a sensor module including at least one unit sensor configured to output a sensing signal in response to gas present in the air, and a control module configured to detect the gas using the sensing signal. The control module controls the pump module to intake second air by opening the second input when gas is detected in first air introduced through the first input, and determines that gas is detected when a concentration of gas detected in the second air is lower than a concentration of gas detected in the first air.

A gas-detecting apparatus includes a pump module connected to a first input and a second input to intake air, a sensor module including at least one unit sensor configured to output a sensing signal in response to gas present in the air, and a control module configured to detect the gas using the sensing signal. The control module controls the pump module to intake second air by opening the second input when gas is detected in first air introduced through the first input, and determines that gas is detected when a concentration of gas detected in the second air is lower than a concentration of gas detected in the first air.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

In various embodiments, a device for determining a property of a fluid may be provided. The device may include a fluid receiving structure configured to receive the fluid having a first condition. The device may further include a flow control structure coupled to the fluid receiving structure. The flow control structure may be configured to change the first condition of the fluid to a second condition. The device may further include a determination mechanism configured to determine the property of the fluid based on the second condition. The device may also include a voltage generation mechanism a voltage generation mechanism configured to generate a voltage based on the second condition.

In various embodiments, a device for determining a property of a fluid may be provided. The device may include a fluid receiving structure configured to receive the fluid having a first condition. The device may further include a flow control structure coupled to the fluid receiving structure. The flow control structure may be configured to change the first condition of the fluid to a second condition. The device may further include a determination mechanism configured to determine the property of the fluid based on the second condition. The device may also include a voltage generation mechanism a voltage generation mechanism configured to generate a voltage based on the second condition.

The disclosed embodiments include a wireless restrictor that may be used as a laminar flow element in a flow meter or a mass flow controller. Embodiments of the wireless restrictor include a single machined part that contains both the features of a tapered restrictor and crushable positioning protrusions.

Proposed is a flow sensor (10), in particular for single use, having at least three measurement chambers (11, 15, 19), which are arranged one behind the other and are interconnected in each case by a flow resistance. At least two of the flow resistances have a different coefficient of pressure loss. A pressure measuring means (12, 16, 20) is provided for each measurement chamber, which pressure measuring means (12, 16, 20) is suitable for measuring the pressure in the measurement chamber. An electromagnetically actuatable valve arrangement (50) can be connected downstream of the flow sensor.

Proposed is a flow sensor (10), in particular for single use, having at least three measurement chambers (11, 15, 19), which are arranged one behind the other and are interconnected in each case by a flow resistance. At least two of the flow resistances have a different coefficient of pressure loss. A pressure measuring means (12, 16, 20) is provided for each measurement chamber, which pressure measuring means (12, 16, 20) is suitable for measuring the pressure in the measurement chamber. An electromagnetically actuatable valve arrangement (50) can be connected downstream of the flow sensor.

A self-correcting pressure-based mass flow control apparatus includes outlet pressure sensing to enable correction for non-ideal operating conditions. Further the mass flow control apparatus having a fluid pathway, a shutoff valve in the fluid pathway, a reference volume in the fluid pathway, a first pressure measuring sensor in fluid communication with the reference volume, a first temperature measuring sensor providing a temperature signal indicative of the fluid temperature within the reference volume, a proportional valve in the fluid pathway, and a second pressure measuring sensor in fluid communication with the fluid pathway.