A flow measurement device for determining the flow rate of a fluid flowing in a line is provided, wherein the flow measurement device has a measurement element arranged at a measurement point in the line for a selective detection of a measurement value of the flowing fluid, a control and evaluation unit to determine the flow rate from the measurement value, and a flow guidance element arranged upstream of the measurement point with respect to the direction of flow. In this respect, the flow guidance element supplies a representative portion of the flow to the measurement point.

A mass flow controller, including a block body having a flow path and a valve provided at least in part within the flow path. The mass flow controller may further include a valve position sensor, a first temperature sensor, a first pressure sensor located on an upstream side of the flow path from the valve, and a second pressure sensor located on a downstream side of the flow path from the valve. The mass flow controller may further include a processor configured to receive valve position data, first temperature data, first pressure data, and second pressure data. The processor may be further configured to estimate a flow rate of fluid in the flow path at least in part by applying a trained machine learning model to the valve position data, the first temperature data, the first pressure data, and the second pressure data.

A mass flow control apparatus and methods for calibrating and tuning the mass flow apparatus are provided. The mass flow apparatus can be calibrated by receiving a calibration input signal that provides one or more properties of a gas that is flowing through a main fluid flow path and performing one or more measurements, using one or more sensors, on the gas. The calibration includes determining a calibration parameter based on the results of the one or more measurements and the calibration input signal and adjusting a proportional valve, based on the calibration parameter, to adjust a flow rate, of the gas through the apparatus, to match a setpoint flow rate.

Methods, systems, and apparatuses are provided for detecting and determining conditions of and conditions within a fluid conduit.

A monitoring and control system for a flow duct and a method for determining a component status of an operational component disposed within a flow passage of the flow duct utilizing the system are provided. In one exemplary aspect, the system includes at least two sensors that are disposed within the flow passage and configured to sense a characteristic of a fluid flowing therethrough. The sensors may be averaging sensors. Each sensor extends circumferentially about an axial centerline defined by the flow duct. The sensors are arranged in an overlapped arrangement. Particularly, the sensors extend circumferentially about the axial centerline such that the sensors physically overlap one another circumferentially. Additionally, the sensors may be disposed within the same or substantially the same plane axially. Signals generated by the sensors may be utilized to monitor and control the fluid and various operational components disposed within the flow passage.

Disclosed is an apparatus for determining a flow of a medium through a pipe, as well as a method for operating the apparatus. The apparatus comprises a heating element at least partially in thermal contact with the medium and which is heatable by means of a heating signal, and a first temperature sensor for registering a temperature of at least one component of the apparatus or the temperature of the medium. The heating element and the first temperature sensor are arranged outside of the pipe. The apparatus includes at least one coupling element, which is at least partially in thermal contact with the heating element, the first temperature sensor and/or a portion of the pipe or tube and serves to assure a thermal coupling between the heating element and the first temperature sensor and between the heating element and the medium.

A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

To make it possible to incorporate a fluid resistance element into a flow path through which a fluid flows without difficulty while enjoying advantages from forming a resistance flow path using ceramic, provided is a fluid resistance element including: a ceramic flow path forming member having one or a plurality of resistance flow paths; and a metal covering member covering an outer peripheral face of the flow path forming member.

Provided is a physical quantity detection device that can improve physical quantity measurement accuracy over a conventional device. A physical quantity detection device 20 includes a detector including a flow rate detection unit 205, a circuit board 207, a housing 201, and a cover 202. The detector detects a physical quantity and is mounted on the circuit board 207. The housing 201 houses the circuit board 207. The cover 202 is fixed to the housing 201 and defines an auxiliary passage 234 in which the flow rate detection unit 205 is disposed. The housing 201 and the cover 202 include a positioning portion P that includes a pin P1 extending in a thickness direction Dt of the circuit board 207 and a fitting portion P2 into which an end portion P11 of the pin P1 is fitted for positioning between the housing 201 and the cover 202. The pin P1 includes an engagement portion P12 that faces an engagement surface 207f of the circuit board 207 along the thickness direction Dt and restricts movement of the circuit board 207 in a surface direction Df along the front and rear surfaces thereof.

A plant biosensor includes a solar radiation sensor that measures a solar radiation amount with which the plant is irradiated, a sap flow sensor that measures a flow rate of sap flowing in a body of the plant, and an absorbed nutrient sensor that measures a nutritional state of the plant.