A method for correcting a flow variable (509) based on an inner pressure inside a Coriolis flow meter (202) comprises the steps of receiving a first outside pressure (503) measured with a first pressure sensor (204) located in a first process conduit (208a) positioned on a first end (212a) of the Coriolis flow meter (202), determining a second outside pressure (505) in a second process conduit (208b) positioned on a second end (212b) opposing the first end (212a) of the Coriolis flow meter (202), determining an estimated inner flow meter pressure (507) based on the first outside pressure (503) and the second outside pressure (505), receiving the flow variable (509), and generating a corrected flow variable (512) based on the estimated inner flow meter pressure (507), a pressure compensation factor (510), and the flow variable (509).

A method for operating a Coriolis mass flowmeter includes: calculating error-free oscillation signal phase differences using a first measuring channel pair with a first measuring channel phase difference; calculating averaged error-containing oscillation signal phase differences using a second measuring channel pair with a second measuring channel phase difference; determining error-containing oscillation signal phase differences using a third measuring channel pair with negligible measuring channel phase difference; determining the second measuring channel phase difference by difference formation from the averaged error-containing oscillation signal phase differences of the second measuring channel pair and the error-free oscillation signal phase differences of the first measuring channel pair; obtaining error-free oscillation signal phase differences by subtracting the determined second measuring channel phase difference from the error-containing oscillation signal phase differences of the third measuring channel pair; and using the error-free oscillation signal phase differences for determining the mass flow rate.

The measuring system includes a transducer apparatus with two tubes. Each tube is adapted to be flowed through by a fluid from an inlet end toward an outlet end and to be caused to vibrate. An electromechanical exciter mechanism excites and maintains mechanical oscillations of each of the tubes, and a sensor arrangement registers mechanical oscillations of at least one of the tubes. The transducer apparatus includes two temperature sensors each being mechanically and thermally conductively coupled with a wall of the tube, wherein each of the temperature sensors registers a measuring point temperature, and converts such into a temperature measurement signal temperature. A measuring and operating electronics (ME) generates a transducer temperature measured value representing a transducer apparatus temperature so that a magnitude of the transducer temperature measured value is greater than a magnitude of the measuring point temperature and less than a magnitude of the measuring point temperature.

A measuring system comprises a measuring transducer of vibration-type having a tube arrangement, an exciter arrangement, a sensor arrangement, and a measuring system electronics. The measuring system electronics is adapted in a first operating mode to supply current to the oscillation exciters whereby the tube arrangement executes wanted oscillations with an oscillation frequency predetermined by the driver signals, and to receive and to evaluate oscillation measurement signals representing oscillatory movements of the wanted oscillations. The measuring system electronics is further adapted in a second operating mode to supply current to the oscillation exciters that only the tube executes wanted oscillations and the tube executes no wanted oscillations while nevertheless executing mechanical oscillations coupled with the wanted oscillations of the tube and to receive and to evaluate both oscillation measurement signals representing oscillatory movements of the wanted oscillations and also oscillation measurement signals representing oscillatory movements of the coupled oscillations.

A fluid delivery system includes N first valves. Inlets of the N first valves are fluidly connected to N gas sources, respectively, where N is an integer greater than zero. N mass flow controllers include a microelectromechanical (MEMS) Coriolis flow sensor having an inlet in fluid communication with an outlet of a corresponding one of the N first valves. A second valve has an inlet in fluid communication with an outlet of the MEMS Coriolis flow sensor and an outlet supplying fluid to treat a substrate arranged in a processing chamber. A controller in communication with the MEMS Coriolis flow sensor is configured to determine at least one of a mass flow rate and a density of fluid flowing through the MEMS Coriolis flow sensor.

A system and method of maintaining back pressure located downstream of the Coriolis meter maintains the pressure downstream of the Coriolis meter in relation to the surface back pressure (SBP). At least one flow control device is located downstream of the Coriolis meter. The flow control device of the present invention (the BPV) automatically maintains the downstream pressure to less than or equal to fifty percent (50%) of the surface back pressure. A pressure regulator sets the back pressure to allow for a standalone device. Additional valves allow adjustment of the back pressure and allow for pressure relief and full flow bypass.

An apparatus for measuring a parameter of a fluid flow passing within a pipe is provided. The apparatus includes a sensing device and a processing unit. The sensing device has a sensor array that includes at least one first macro fiber composite (MFC) strain sensor disposed at a first axial position, and at least one second MFC strain sensor disposed at a second axial position. The first axial position and the second axial position are spaced apart from one another. The at least one first MFC strain sensor and the at least one second MFC strain sensor are both configured to produce signals representative of pressure variations of the fluid flow passing within the pipe. The processing unit is configured to receive the signals from the sensor array and measure one or more fluid flow parameters based on the signals.

The present disclosure relates to a Coriolis measuring transmitter of a Coriolis measuring device for measuring a mass flow or a density of a medium flowing through a pipe, which includes: at least one pair of measuring tubes arranged to oscillate relative to each other, wherein each measuring tube includes a centrally arranged bend, at least one driver and at least two vibration sensors; two guiding devices, each including a fluid chamber with a first opening for connection with the pipe and second openings for each measuring tube for connection with the measuring tubes, wherein the guiding devices are each formed from multiple parts, for example, formed from two parts, wherein a first part forms a pipe connecting part, and wherein at least one second part forms a measuring tube connecting part.

A measuring system for measuring at least one measured variable of a flowing fluid, comprises a fluid supply line, a transducer apparatus, which has a tube and at least one other tube and is adapted to deliver at least one measurement signal corresponding to the at least one measured variable, a fluid return line, and a fluid withdrawal line. To open a first flow path, which leads from the lumen of the fluid supply line to the lumen of the tube, further to the lumen of the tube and further to the lumen of the fluid return line, equally as well not to the lumen of the fluid withdrawal line, and thereafter to allow fluid to flow along the flow path for the maintaining the temperature and/or for cleaning of parts of the measuring system and/or for conditioning fluid. It is, additionally, provided (instead of the first flow path) thereafter to open a second flow path, which leads from the lumen of the fluid supply line to the lumen of the first tube and, in parallel, to the lumen of the second tube and further from the lumen of the first tube, and from the lumen of the second tube, in each case, to the lumen of the fluid withdrawal line, as well as to allow fluid to flow along the second flow path. Moreover, it is provided, while allowing fluid to flow along the second flow path, in given cases, also while allowing fluid to flow along the first flow path, to generate at least one measurement signal, as well as to use the measurement signal for ascertaining measured values of the at least one measured variable.

A Coriolis mass flowmeter having at least one measuring tube with at least one oscillation generator and at least two oscillation sensors and having at least two node elements. The at least one oscillation generator excites the measuring tube to oscillation during operation. The at least two node elements define the oscillation range. At least one node element has at least one stiffening element. An effective separation of undesired interference oscillations of the measuring tube is achieved by the at least one stiffening element increasing the stiffness of the measuring tube with respect to oscillations orthogonal to the excitation mode and to the Coriolis mode so that, during operation, the oscillation frequency of the oscillation orthogonal to the excitation mode and to the Coriolis mode is greater than the oscillation frequency of the excitation mode, preferably greater than that of the Coriolis mode.