Gas meters are provided including a housing and a pressure regulator integrated with the housing. The pressure regulator is configured to adjust pressure of gas flowing through the gas meter responsive to a signal from a remote location or automatically based on a predetermined pressure threshold programmed into the gas meter.

A quantity of gas is introduced into a gas reservoir via a filling station provided with a filling line. The quantity is measured. A signal is generated indicating a corrected quantity of transferred gas. The signal is obtained by adding a predetermined, positive or negative, corrective amount to the measured quantity of gas transferred.

A method for calibrating a gas flow metrology system for a substrate processing system includes a) measuring temperature using a first temperature sensor and a reference temperature sensor over a predetermined temperature range and determining a first transfer function; b) measuring pressure using a first pressure sensor and a reference pressure sensor over a predetermined pressure range using a first calibration gas and determining a second transfer function; c) performing a first plurality of flow rate measurements in a predetermined flow rate range with a first metrology system and a reference metrology system, wherein the first metrology system and the reference metrology system use a first orifice size and the first calibration gas; and d) scaling temperature and pressure using the first transfer function and the second transfer function, respectively, and determining a corresponding transfer function for the first calibration gas based on the first plurality of flow rate measurements.

A system and method for measuring a flow of saturated steam can include a temperature sensor that measures process temperature, and one or more pressure sensors that measure pressure including differential pressure and static pressure. A flow of saturated steam can be calculated from two sets of measurements, one measurement using the differential pressure and the static pressure and a second measurement using the differential pressure and the process temperature. Redundant flow measurements can be provided with respect to the flow of saturated steam in case of failure of the temperature sensor or the pressure sensors. In addition, a deviation between the flow of the saturated steam as calculated from the process temperature and the differential pressure compared to a flow of saturated steam as calculated from the differential pressure and the static pressure can provide an indication of degradation of the temperature sensor or the pressure sensors.

A method for optimizing purge gas of a flare system includes measuring a flow of flare fluids within a flare system to obtain a measured flow value. The flow of the flare fluids is compared to a target flow to obtain a difference between the flow of the flare fluids and the target flow. A control valve is operated to amend a flow of purge gas and the steps of measuring a flow of flare fluids and comparing the flow of the flare fluids to the target flow are repeated until the flow of the purge gas is within a target range. A value of the flow of purge gas is measured and transmitted wirelessly to a control system.

A gas flow meter comprises a meter body, a tube, and a sensing unit. The sensing unit includes a base connected with one end of the tube; a speed transducer penetrating the base; a temperature transducer penetrating the base; a temperature compensator penetrating the base; and a microcontroller accommodated inside the meter body. The microcontroller is electrically connected with the speed transducer, the temperature transducer and the temperature compensator. The temperature transducer only functions to detect the temperature of the surrounding gas. The temperature compensator only functions to compensate the speed transducer for the temperature drop thereof. Each of them functions independently. Once the temperature of the speed transducer lowers, the temperature compensator directly compensates for the temperature drop, whereby the statistic error value is effectively decreased.

A gas flow meter comprises a meter body, a tube, and a sensing unit. The sensing unit includes a base connected with one end of the tube; a speed transducer penetrating the base; a temperature transducer penetrating the base; a temperature compensator penetrating the base; and a microcontroller accommodated inside the meter body. The microcontroller is electrically connected with the speed transducer, the temperature transducer and the temperature compensator. The temperature transducer only functions to detect the temperature of the surrounding gas. The temperature compensator only functions to compensate the speed transducer for the temperature drop thereof. Each of them functions independently. Once the temperature of the speed transducer lowers, the temperature compensator directly compensates for the temperature drop, whereby the statistic error value is effectively decreased.

A new DP meter diagnostic system for wet gas flow builds on existing diagnostic techniques. Based on new diagnostic parameters and calculations derived from them, blocked pressure ports or impulse lines can be identified or wet gas established as the cause of an abnormal reading. Further diagnostic techniques can take advantage of the new diagnostic parameters to predict a liquid loading parameter, gas flow rate and fluid flow rate for wet gas flow.

A new DP meter diagnostic system for wet gas flow builds on existing diagnostic techniques. Based on new diagnostic parameters and calculations derived from them, blocked pressure ports or impulse lines can be identified or wet gas established as the cause of an abnormal reading. Further diagnostic techniques can take advantage of the new diagnostic parameters to predict a liquid loading parameter, gas flow rate and fluid flow rate for wet gas flow.

An electronic utility gas meter using MEMS thermal time-of-flight flow sensor to meter gas custody transfer mass flowrate and an additional MEMS gas sensor to measure the combustion gas composition for the correlations to the acquisition of gas high heat value simultaneously is disclosed in the present invention. The meter is designed for the applications in the city utility gas consumption in compliance with the current tariff while metering the true thermal value of the delivered gases for future upgrades. Data safety, remote data communication, and other features with state-of-the-art electronics are also included in the design.