A gas meter (10) includes a normal measurement mode in which the flow rate is measured in a predetermined sampling period and a detailed measurement mode in which the flow rate is measured in a sampling period shorter than the predetermined sampling period in the normal measurement mode. A center device (40) gives an instruction to the gas meter (10) to measure the flow rate in the detailed measurement mode. The center device (40) further collects flow rate data measured in the detailed measurement mode from the gas meter (10), and generates, based on the collected flow rate data, failure diagnosis information for diagnosing a failure in a gas appliance. With this configuration, the failure part in the gas appliance can be remotely identified, which accelerates the repair work.

A gas meter (10) includes a normal measurement mode in which the flow rate is measured in a predetermined sampling period and a detailed measurement mode in which the flow rate is measured in a sampling period shorter than the predetermined sampling period in the normal measurement mode. A center device (40) gives an instruction to the gas meter (10) to measure the flow rate in the detailed measurement mode. The center device (40) further collects flow rate data measured in the detailed measurement mode from the gas meter (10), and generates, based on the collected flow rate data, failure diagnosis information for diagnosing a failure in a gas appliance. With this configuration, the failure part in the gas appliance can be remotely identified, which accelerates the repair work.

An automated method for detecting and/or monitoring a state of a degasser of an analyzer is provided, the degasser including a container configured to be evacuated. The method includes obtaining a time series of values indicative of pressures inside the container. The time series spans a period during which the container is evacuated or pressurized. The method further includes determining a liquid level state of the degasser which is determined by an amount of liquid present in the container based on the time series.

The present application discloses a flow speed detection circuit and a related chip and flow meter. The flow speed detection circuit includes: a transmitter, configured to provide a front signal and a main signal to a first transducer, wherein the first transducer transforms the front signal and the main signal into a transduced signal to a second transducer, the second transducer transforms the transduced signal into a receiving front signal and a receiving main signal to a receiver; and the receiver includes: a front signal detection circuit, configured to enable the main signal processing circuit after the receiving front signal; and the main signal processing circuit, configured to determine the flow speed based on the receiving main signal after being enabled.

In a substrate processing system according to an exemplary embodiment, gas supply units are configured to supply gases to chambers through first gas flow channels thereof, respectively. Chamber pressure sensors are configured to measure pressures in the chambers. A second gas flow channel is connected to the first gas flow channel of each of the gas supply units. A reference pressure sensor is configured to measure a pressure in the second gas flow channel. In a method according to an exemplary embodiment, each of the chamber pressure sensors is calibrated by using a measurement value thereof and a measurement value of the reference pressure sensor which are obtained in a state where pressures in a corresponding chamber, the first gas flow channel of a corresponding gas supply unit, and the second gas flow channel are maintained.

A flow meter is disclosed. The flow meter can include a housing that has a cavity. The flow meter can also include a deformable tube that is disposed in the cavity. The deformable tube can comprise a portion of a flow path of a fluid substance. The flow meter can further include a cam that is rotatably coupled to the housing. A portion of the cam is configured to press against a portion of the collapsible tube so as to deform the portion of the collapsible tube. The cam can be configured to rotate in response to a flow of the fluid substance in the flow path.

The present disclosure provides a method for regulating an inert gas flow in a crystal pulling furnace, a method for preparing monocrystalline silicon, and monocrystalline silicon. The method for regulating an inert gas flow includes introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace, and regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace.

The present disclosure provides a method for regulating an inert gas flow in a crystal pulling furnace, a method for preparing monocrystalline silicon, and monocrystalline silicon. The method for regulating an inert gas flow includes introducing the inert gas into a main furnace chamber of the crystal pulling furnace from an auxiliary furnace chamber of the crystal pulling furnace, and regulating a flow direction of the inert gas flow introduced into the auxiliary furnace chamber of the crystal pulling furnace.

A flow measurement device includes a flow rate measurement unit, an arithmetic unit that calculates a difference value between a the first flow rate value and a second flow rate value, and a difference value conversion unit that calculates a flow rate ratio, based on the difference value. An appliance characteristic extraction unit extracts at least one appliance characteristic quantity indicating a characteristic of a flow rate change and a value calculated from a first flow rate value and a second flow rate value, as an appliance characteristic quantity. Furthermore, an appliance inherent characteristic information holding unit holds appliance inherent characteristic quantities indicating a characteristic flow rate state of a specific gas appliance, and an appliance discrimination unit discriminates a gas appliance, based on a comparison between the appliance characteristic quantity and the appliance inherent characteristic quantity.

A flow measurement device includes a flow rate measurement unit, an arithmetic unit that calculates a difference value between a the first flow rate value and a second flow rate value, and a difference value conversion unit that calculates a flow rate ratio, based on the difference value. An appliance characteristic extraction unit extracts at least one appliance characteristic quantity indicating a characteristic of a flow rate change and a value calculated from a first flow rate value and a second flow rate value, as an appliance characteristic quantity. Furthermore, an appliance inherent characteristic information holding unit holds appliance inherent characteristic quantities indicating a characteristic flow rate state of a specific gas appliance, and an appliance discrimination unit discriminates a gas appliance, based on a comparison between the appliance characteristic quantity and the appliance inherent characteristic quantity.