Embodiments of the present disclosure provide for apparatus used to detect clogs in a fluid delivery system during CMP processes and methods of detecting clogs in a fluid delivery system during CMP processes. In particular, embodiments herein provide a flow splitter manifold configured to enable monitoring of the pressure of the polishing fluid disposed therein. Monitoring the fluid pressure in the flow splitter manifold enables the detection of clogs in the delivery lines and/or dispense nozzles that inhibit and/or prevent the flow of polishing fluid therethrough or therefrom.

Multiphase flow meters and related methods are disclosed herein. An example apparatus includes an inlet manifold; an outlet manifold, first and second flow paths coupled between the inlet and outlet manifolds; and an analyzer to determine a flow rate of fluid flowing through the first and second flow paths based on a parameter of the fluid flowing through the first flow path.

Disclosed is a flow rate controller in which a clear width (6) of a control gap (4) between a main part (3) and a control element (2), which is deformable according to the pressure in order for the flow rate through the control gap (4) to be kept constant, can be adjusted as a result of the fact that at least one supporting element that adjusts the clear width (6) of the control gap (4) is designed to be movable relative to a main part (3).

According to the present invention, it is possible to provide a flow rate measurement device capable of accurately measuring a flow rate of a measurement target gas by improving anti-contamination property. A flow rate measurement device (20) of the present invention includes a board (304) disposed along a flow direction of a measurement target gas (2) in a sub passage (134), a support body (401) that is disposed to face one surface (304a) of the board, and a flow rate sensor (411) that is supported by the support body, faces the one surface of the board, and measures a flow rate of the measurement target gas passing between the support body and the board. The sub passage includes a first passage portion D1 between the support body and one surface of the board, a second passage portion D2 between the other surface of the board and a passage wall surface of the sub passage opposed thereto, and a third passage portion D3 between the support body and the passage wall surface of the sub passage that faces the support body. The support body has a first side surface (407) that faces in the flow direction of the measurement target gas in the sub passage.

A gas leak sensing device includes a constant flow rate control valve, a pressurization control valve, a supply-side gas circuit, a master-side gas circuit, a workpiece-side gas circuit, an equal pressure valve, an exhaust valve, a test pressure sensor, and a differential pressure sensor. The supply-side gas circuit is connected with the constant flow rate control valve and the pressurization control valve. The equal pressure valve performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit. The exhaust valve performs opening and closing between the workpiece-side gas circuit and outside. The test pressure sensor detects pressure in the supply-side gas circuit. The differential pressure sensor detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit.

Devices, systems, and methods are provided for improved heat transfer LIDAR. A LIDAR device may comprise a LIDAR housing configured to attach to a vehicle to detect one or more objects in the field of view of the LIDAR device, wherein the LIDAR housing encloses one or more gases, wherein the one or more gases have a characteristic of being more thermal conductive than air. The LIDAR device may comprise one or more windows allowing light signals to pass through, wherein the one or more windows are attached to one or more walls of the LIDAR housing. The LIDAR device may comprise a rotating platform situated inside the LIDAR housing and configured to rotate around a center axis relative to the LIDAR housing. The LIDAR device may comprise one or more light signal transmitters configured to transmit first light signals through the one or more windows. The LIDAR device may comprise one or more light signal receivers configured to detect second light signals reflected by the one or more objects towards the LIDAR device.

The present disclosure relates to a method for determining a volumetric and/or mass flow rate of a medium flowing in a tube, wherein a density and/or a viscosity of the fluid is/are determined using a MEMS sensor chip, wherein the medium flowing in the tube at least partially flows through a measuring channel of the MEMS sensor chip to determine the density and/or the viscosity of the fluid, and wherein the volumetric and/or mass flow rate of the medium is determined regardless of the medium based on a detected pressure drop over the measuring channel of the MEMS sensor chip and the density and/or viscosity determined by the MEMS sensor.

A method for the detection of restricted airflow to a smoke sensor in a central detector unit of an aspirating smoke detection system. An aspirator of the detector unit draws air into the central detector unit along a plurality of sampling pipes. A first portion of the air is directed along a sensing conduit via a filter to the smoke sensor, whilst a second portion of the air continues along a primary conduit and is not directed through the smoke sensor. A first flow meter is positioned on the sensing conduit, and a second flow rate meter is positioned on the primary conduit. A ratio of the flow rates measured by the first and second flow meters is calculated, and used to determine that the filter is restricting airflow to the smoke sensor when the ratio exceeds a predetermined threshold.

A sensor element is provided for detecting at least one property of a fluid medium. The sensor element comprises at least one housing having at least one inflow opening accessible to the fluid medium. At least one pressure sensor for detecting a pressure of the fluid medium is situated in the inflow opening. In the inflow opening in front of the pressure sensor, a plurality of ribs project from at least one wall of the inflow opening into the inflow opening.

A differential pressure sensor is provided with an indicator assembly to represent the measured differential pressure. The sensor includes a cylindrical tube with a magnetic piston slidably disposed within. The indicator assembly is positioned adjacent to the tube and includes a first magnet having a first polarity direction and a second magnet having a second polarity direction. The magnets are provided in the indicator assembly such that the first and second polarity directions are parallel to one another. The first and second magnets are symmetrically disposed and offset from one another about a center of rotation of the indicator assembly.