Continuous microfluidic dilatometry devices and methods are provided for activity monitoring with ultra-high sensitivity. Corner flow in capillary channels is used to detect the resistance change in microfluidic circuits filled with ionic liquids. The conversion of mechanical input (e.g. strain) to an intermediary domain, namely liquid displacement, allows a large enhancement in sensor performance. Embodiments are suitable for tracking skin deformations that occur as a result of human movements.

A system and method for dividing a single mass flow into secondary flows of desired ratios to total flow. Each secondary flow line includes a pressure drop element, an absolute pressure sensor and a differential pressure sensor. The nonlinear relationship between flow and pressures can be transformed into a function of the absolute and differential pressures that has a linear relationship with the flow.

An apparatus for inspecting a ventilation characteristic according to various embodiments may comprise: a seating unit to which an object to be inspected is attached, and which has a lower surface and an upper surface facing in a direction opposite to the lower surface and includes at least one through-hole passing through the lower surface and the upper surface; a measuring unit which includes a groove for accommodating at least a portion of the seating unit including the lower surface of the seating unit, and a fluid supply passage for supplying a fluid in a direction facing the object to be inspected which is attached to the seating unit; and a compressing unit which is disposed to apply a pressing pressure to the seating unit at a position opposite to the upper surface of the seating unit and includes a fluid discharge passage so that a fluid supplied from the measurement unit is discharged through the object to be inspected. Other embodiments are also possible.

In a substrate processing system according to an exemplary embodiment, gas supply units are configured to supply gases to chambers through first gas flow channels thereof, respectively. Chamber pressure sensors are configured to measure pressures in the chambers. A second gas flow channel is connected to the first gas flow channel of each of the gas supply units. A reference pressure sensor is configured to measure a pressure in the second gas flow channel. In a method according to an exemplary embodiment, each of the chamber pressure sensors is calibrated by using a measurement value thereof and a measurement value of the reference pressure sensor which are obtained in a state where pressures in a corresponding chamber, the first gas flow channel of a corresponding gas supply unit, and the second gas flow channel are maintained.

A gas meter is configured for diagnostics using differential pressure (DP) measurements. The configurations include executable instructions to actively manage the DP sensor. These instructions active the DP sensor only during stable flow and, where applicable, for a defined test time period. This feature manages power consumption to maintain battery life with acceptable standards or regulations.

A flow measurement apparatus can include a main flow passage, a bypass flow passage having an inlet and an outlet connected with the main flow passage, a mass flowmeter connected in the bypass flow passage between the inlet and the outlet, and a flow restrictor connected in the bypass flow passage between the inlet and the outlet. A method can include connecting the flow measurement apparatus, so that a fluid flow in the well also flows through the flow measurement apparatus, and determining at least one rheological parameter of a non-Newtonian fluid, based on an output of the flow measurement apparatus.

A flow meter is shown. The flow meter includes a housing extending along an axis and defining an interior volume, the interior volume extending between an inlet port and an outlet port. The flow meter further includes an insert positioned within the interior volume and spaced apart from the housing, the insert extending along the axis. A first region between at least part of the insert and the housing along the axis defines a first flow pathway, and a second region within the insert and along the axis defines a second flow pathway.

A flow rate regulator s provided that decouples regions (7) of a regulating body (2) of a flow rate regulator (1) such that one of the decoupled regions (7) forms a low-pressure region (9) while another of the decoupled regions (7) defines a high-pressure region (8).

A flow measurement apparatus can include a main flow passage, a bypass flow passage having an inlet and an outlet connected with the main flow passage, a mass flowmeter connected in the bypass flow passage between the inlet and the outlet, and a flow restrictor connected in the bypass flow passage between the inlet and the outlet. A method can include connecting the flow measurement apparatus, so that a fluid flow in the well also flows through the flow measurement apparatus, and determining at least one rheological parameter of a non-Newtonian fluid, based on an output of the flow measurement apparatus.

An equal mixture of gas flows from multiple inputs is provided to gas analysis instrumentation, despite the unequal gas flow properties of the inputs often seen in practice. E.g., due to unequal input sample line lengths. We provide gas flow symmetry into a gas manifold that provides the output(s) to the gas analysis instrument(s). Such symmetry has two parts—equal gas flow properties from a set of reference points (one reference point for each input) to the manifold, and equal pressures at the reference points. Such equal pressures can be provided for unequal input gas flow properties by having a bypass valve for each input controlled so as to equalize the pressures.