The method for inspecting the flow rate controller for controlling a flow rate of a fluid includes creating and recording a three-dimensional database in which a first pressure, a set flow rate or a second pressure, and a control value of a piezoelectric element are associated with each other, based on reference data, measuring, as target data, control values of the piezoelectric element corresponding to the first pressure detected by a first pressure detector and the set flow rate specified in a recipe of a substrate processing process or the second pressure detected by a second pressure detector, at the time of the execution of the substrate processing process, and determining whether or not there is a problem in a diaphragm valve, by comparing the target data with the reference data included in the three-dimensional database.

An arrangement includes a pipeline and a Coriolis volumetric flow meter for measuring a mass flow rate of a medium flowing through the pipeline. A first pressure sensor is attached at an inlet-side of the pipeline and a second pressure sensor is attached at an outlet-side of the pipeline, or wherein a differential pressure sensor is configured to detect a difference between an inlet-side and an outlet-side. The pressure sensors and/or the differential pressure sensor are configured to measure a media pressure and to determine, for each differential pressure, a volumetric flow velocity of the medium through the pipeline. A first monitoring sensor is attached at an inlet-side portion of the pipeline and a second monitoring sensor is attached at an outlet-side portion of the pipeline, wherein the monitoring sensors are configured to monitor a measurement variable different from the media pressure to identify a static media state.

Disclosed is an optical fiber flow velocity measuring apparatus and method integrating high and low ranges. The apparatus includes an integrated optical fiber flow velocity sensor, the integrated optical fiber flow velocity sensor includes a sensor body; a fluid channel, a fluid through hole, a full-pressure channel, a static-pressure channel, a low-pressure chamber and a high-pressure chamber are provided inside the sensor body; a first optical fiber sensing element is provided between the low-pressure chamber and the high-pressure chamber; a second optical fiber sensing element is provided in the fluid through hole and is perpendicular to a flow direction of a fluid to be measured; the first optical fiber sensing element and the second optical fiber sensing element are sequentially connected in series through a single-mode optical fiber; both ends of the single-mode optical fiber are connected into a wavelength division multiplexer; a pump light source is connected with the wavelength division multiplexer through a common optical fiber; an optical fiber grating demodulator is connected with the wavelength division multiplexer through a common optical fiber; and a flow velocity arithmetic unit is electrically connected with a optical fiber grating demodulator. It's an object of the present disclosure to solve the problems that the electric circuit is too complicated and that it is not easy to integrate in one apparatus when flow velocity conversion devices based on different principles are integrated.

A flow measurement probe includes an elongate probe having an averaging pitot tube with a plurality of upstream and downstream openings arranged along a length of the elongate probe, and a thermal flow measurement sensor coupled to the elongate probe. A method of measuring fluid flow rate in a process includes calculating a flow rate of the fluid using differential pressure in upstream and downstream openings of an averaging pitot tube in an elongate probe when the differential pressure is at least a defined measurement threshold, and calculating the flow rate of the fluid with a thermal mass flow sensor coupled to the flow measurement probe when the differential pressure is less than the defined measurement threshold.

An improved solution for estimating the flow rate of a fluid in a line of a hydrocarbon production installation, during production. Systems and methods for producing hydrocarbons on a line of a hydrocarbon production installation can include at least two devices adapted each for providing an estimate of the flow rate of a fluid in the line based on respective data. The devices include at least one metric counter, and the data relative to the provision of an estimate of the flow rate by the metric counter include a measurement done by at least one sensor of the metric counter on the fluid. Further, data can be determined relative to the provision of an estimate of the flow rate by the devices, and a DVR process involving the determined data, the reconciliation being conditioned by at least a substantial equality between the estimates of the flow rate of the fluid.

Multiphase flow meters and related methods are disclosed herein. An example apparatus includes an inlet manifold; an outlet manifold, first and second flow paths coupled between the inlet and outlet manifolds; and an analyzer to determine a flow rate of fluid flowing through the first and second flow paths based on a parameter of the fluid flowing through the first flow path.

Devices, methods, and systems for operating gas meters are described herein. The systems may include a gas meter connectable to a gas line, where the gas meter may have a metrology unit in communication with a flow of gas through the gas line and an index unit in communication with and releasably coupled to the metrology unit. The metrology unit may be configured to generate flow rate data of the flow through the gas line based on outputs from a flow rate sensor, generate gas temperature data based on outputs from a temperature sensor, compensate the flow rate data based on the temperature data, generate an average flow rate, and output the average flow rate data to the index unit. The index unit may generate gas volume data based on flow rate data received from the metrology unit.

Disclosed is an optical fiber flow velocity measuring apparatus and method integrating high and low ranges. The apparatus includes an integrated optical fiber flow velocity sensor, the integrated optical fiber flow velocity sensor includes a sensor body; a fluid channel, a fluid through hole, a full-pressure channel, a static-pressure channel, a low-pressure chamber and a high-pressure chamber are provided inside the sensor body; a first optical fiber sensing element is provided between the low-pressure chamber and the high-pressure chamber; a second optical fiber sensing element is provided in the fluid through hole and is perpendicular to a flow direction of a fluid to be measured; the first optical fiber sensing element and the second optical fiber sensing element are sequentially connected in series through a single-mode optical fiber; both ends of the single-mode optical fiber are connected into a wavelength division multiplexer; a pump light source is connected with the wavelength division multiplexer through a common optical fiber; an optical fiber grating demodulator is connected with the wavelength division multiplexer through a common optical fiber; and a flow velocity arithmetic unit is electrically connected with a optical fiber grating demodulator. It's an object of the present disclosure to solve the problems that the electric circuit is too complicated and that it is not easy to integrate in one apparatus when flow velocity conversion devices based on different principles are integrated.

Devices, methods, and systems for operating gas meters are described herein. The systems may include a gas meter connectable to a gas line, where the gas meter may have a metrology unit in communication with a flow of gas through the gas line and an index unit in communication with and releasably coupled to the metrology unit. The metrology unit may be configured to generate flow rate data of the flow through the gas line based on outputs from a flow rate sensor, generate gas temperature data based on outputs from a temperature sensor, compensate the flow rate data based on the temperature data, generate an average flow rate, and output the average flow rate data to the index unit. The index unit may generate gas volume data based on flow rate data received from the metrology unit.

A differential monitoring system of carbon dioxide levels within an associated building with a monitoring zone including a quantity of captured carbon dioxide and a reference zone that is spaced away from the monitoring zone. The differential monitoring system includes a first carbon dioxide monitoring inlet disposed within the monitoring zone. A second carbon dioxide monitoring inlet is disposed within the monitoring zone in spaced relation to the first carbon dioxide monitoring inlet and/or is disposed within the reference zone in spaced relation to the first carbon dioxide monitoring zone. A controller is operable to determine when a carbon dioxide level at the second carbon dioxide monitoring inlet exceeds a carbon dioxide level at the first carbon dioxide monitoring inlet by a predetermined differential threshold. The inlets can be part of an aspirated sampling system and/or part of a distributed sensor system. Methods of monitoring carbon dioxide levels are also included.