A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

The invention relates to an optical arrangement, particularly for the detection beam path of a multi-spot scanning microscope, comprising a detection plane, in which a detector is positionable, comprising a dispersive device for spectrally splitting detection light. According to the invention, the optical arrangement is characterized in that a distorting optical unit is present for guiding the detection light into the detection plane, said distorting optical unit being arranged downstream of the dispersive device and upstream of a detection plane, and in that a rotating device is present for the relative rotation of a luminous field of the spectrally separated detection light and the distorting optical unit. The invention additionally relates to a multi-spot scanning microscope and a method for operating a microscope.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

A spectrophotometer includes: an infrared light source; an interferometer; a first detector; and a monitor unit. The monitor unit includes: a second detector; and a light amount control unit. The light amount control unit is operable to control the infrared light source such that the amount comes closer to a target light amount, based on the signal. The infrared light source emits light having a first wavelength range and light having a second wavelength range different from the first wavelength range. The second detector includes: a first light detection element; and a second light detection element. The first light detection element outputs to the light amount control unit a first voltage corresponding to the light having the first wavelength range. The second light detection element outputs to the light amount control unit a second voltage corresponding to the light having the second wavelength range.

A spectrophotometer includes: an infrared light source; an interferometer; a first detector; and a monitor unit. The monitor unit includes: a second detector; and a light amount control unit. The light amount control unit is operable to control the infrared light source such that the amount comes closer to a target light amount, based on the signal. The infrared light source emits light having a first wavelength range and light having a second wavelength range different from the first wavelength range. The second detector includes: a first light detection element; and a second light detection element. The first light detection element outputs to the light amount control unit a first voltage corresponding to the light having the first wavelength range. The second light detection element outputs to the light amount control unit a second voltage corresponding to the light having the second wavelength range.

Systems and methods for measuring a fundamental mode vibrational spectrum of materials and substances in the Mid-IR spectral range of 2.5 μm to 14 μm wavelength. are disclosed herein. In one embodiment, a Mid-infrared absorption spectrometer (MIRAS) system includes an infrared Micro-Electro-Mechanical System (MEMS) single element emitter light source. The light source is electrically pulsed and emits electromagnetic radiation in the wavelength range from 2.5 μm to 14 μm and has an integral energy concentrating optic to provide energy for a spectral absorption process. The system includes a scanning high-efficiency infrared spectral grating with self-calibrating feature, configured so that incident energy having absorption information for the spectral absorption process of a sample is within a predefined threshold of a grating blaze angle. The system also includes a single-element thermal detector to receive output energy having the absorption information from the infrared spectral grating.

The present disclosure provides a grating rotation method and apparatus for improving spectrograph wavelength accuracy. The grating rotation method comprises: acquiring a start wavelength and an end wavelength of a scanning range; determining a start angle and an end angle of a grating rotation according to preset grating rotation angle series values, the start wavelength and the end wavelength, wherein a wavelength corresponding to the start angle is smaller than the start wavelength, and a wavelength corresponding to the end angle is larger than the end wavelength; and rotating the grating according to the start angle and the end angle to obtain required spectral information. According to the grating rotation scheme provided by the present disclosure, the problem that the obtained spectral accuracy is inconsistent due to different grating rotation angles can be avoided.

The present disclosure provides a grating rotation method and apparatus for improving spectrograph wavelength accuracy. The grating rotation method comprises: acquiring a start wavelength and an end wavelength of a scanning range; determining a start angle and an end angle of a grating rotation according to preset grating rotation angle series values, the start wavelength and the end wavelength, wherein a wavelength corresponding to the start angle is smaller than the start wavelength, and a wavelength corresponding to the end angle is larger than the end wavelength; and rotating the grating according to the start angle and the end angle to obtain required spectral information. According to the grating rotation scheme provided by the present disclosure, the problem that the obtained spectral accuracy is inconsistent due to different grating rotation angles can be avoided.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.