According to one embodiment, there is provided a measuring apparatus including a measurement section and a control section. The measurement section is configured to acquire a response from a sample. The control section is configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.

A tunable spectral filter includes a first tunable dispersive element, a first optical element, a spatial filtering element located at the focal plane, a second optical element, and a second dispersive element. The first tunable dispersive element introduces spectral dispersion to an illumination beam with an adjustable dispersion. The first optical element focuses the illumination beam at a focal plane in which a distribution of a spectrum of the spectrally-dispersed illumination beam at the focal plane is controllable by adjusting the dispersion of the first tunable dispersive element. The spatial filtering element filters the spectrum of the illumination beam based on the distribution of the spectrum of the illumination beam at the focal plane. The second optical element collects the spectrally-dispersed illumination beam transmitted from the spatial filtering element. The second tunable dispersive element removes the dispersion introduced by the first tunable dispersive element from the illumination beam.

Spectroscopy including a source generating light profile on the sample. The light profile is movable relative to the sample. An optical input for receiving light from sample interaction with light from the source, a detector including two-dimensional array of photodetector elements, a dispersive device between the optical input and detector to spectrally disperse light from the optical input in spectral direction across the detector, an optical splitter in optical path between the optical input and detector to split light based upon wavenumber so, for a spectrum generated by a point on the sample, the spectrum first and second portions are dispersed across photodetector elements of different array row/column. Controller shifting data between photodetector elements in spatial direction, perpendicular to spectral direction, synchronously with relative movement between light profile and sample so data is accumulated on the spectrum first and second portions across different sets of photodetector elements during relative movement.

A particle imaging system may include a volume to contain a fluid having a suspended particle, electrodes proximate to the volume to apply an electric field to rotate the suspended particle, an optical sensor comprising a first region and a second region and a diffraction element to split an image of the suspended particle into a bright field image focused on the first region and a spectral image focused on the second region.

According to one embodiment, there is provided a measuring apparatus including a measurement section and a control section. The measurement section is configured to acquire a response from a sample. The control section is configured to compare a loading obtained by performing principal component analysis in advance with a first evaluation-use loading obtained by performing principal component analysis onto the response acquired from the sample, and to generate a first reliability index for measurement using principal component analysis, in accordance with a comparison result.

The present disclosure resides in a spectrometer arrangement including a first dispersing element for spectral separation of radiation in a main dispersion direction, and a second dispersing element for spectral separation of radiation in a cross-dispersion direction, which is at an angle to the main dispersion direction, so that a two-dimensional spectrum is producible. The spectrometer arrangement also includes a collimating optics, which directs collimated radiation to the first and/or second dispersing element, a camera optics, which images a two-dimensional spectrum in an image plane, a two-dimensional detector for detecting the two-dimensional spectrum in the image plane, and an off-axis section of a rotationally symmetric, refractive element, which is arranged between the camera optics and the detector. The present disclosure resides likewise in an optical module comprising such a spectrometer arrangement.

Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.

Provided are a spectrometer optical system and a semiconductor inspection apparatus, for reducing cost by allowing a wide field of view, high spatial resolution, and high wavelength resolution to be compatible with one another. The spectrometer optical system includes a masking having a slit, a first spherical mirror positioned to reflect light received from the slit, a second spherical mirror positioned to reflect the light reflected from the first spherical mirror, a dispersion element positioned to receive the light reflected from the second spherical mirror, and an image sensor configured to detect the light dispersed by the dispersion element according to wavelengths of the light.

A spectral radiation gas detector has at least one lenslet with a circular blazed grating for diffraction of radiation to a focal plane. A detector is located at the focal plane receiving radiation passing through the at least one lenslet for detection at a predetermined diffraction order. A plurality of order filters are associated with the at least one lenslet to pass radiation at wavelengths corresponding to the predetermined diffraction order, each filter blocking a selected set of higher orders. A controller is adapted to compare intensity at pixels in the detector associated with each of the plurality of order filters and further adapted to determine a change in intensity exceeding a threshold.

The present disclosure resides in a spectrometer arrangement including a first dispersing element for spectral separation of radiation in a main dispersion direction, and a second dispersing element for spectral separation of radiation in a cross-dispersion direction, which is at an angle to the main dispersion direction, so that a two-dimensional spectrum is producible. The spectrometer arrangement also includes a collimating optics, which directs collimated radiation to the first and/or second dispersing element, a camera optics, which images a two-dimensional spectrum in an image plane, a two-dimensional detector for detecting the two-dimensional spectrum in the image plane, and an off-axis section of a rotationally symmetric, refractive element, which is arranged between the camera optics and the detector. The present disclosure resides likewise in an optical module comprising such a spectrometer arrangement.