A method of calibrating a driving parameter of an optical component across an operating wavelength range of the component. The method comprises placing a layer of material in a light path, the layer of material being substantially planar and substantially transparent and having a thickness of the order of wavelengths in said range and operating said component to vary said driving parameter whilst detecting light transmitted through said layer of material to obtain driving parameter versus light intensity data. The obtained data is then compared with characterizing data previously derived for said layer of material in order to calibrate said driving parameter.

Provided is an identification method of plastic microparticles, including: performing an infrared analysis on plastic microparticles to identify whether the plastic microparticles include polyethylene terephthalate, polyethylene, polypropylene, or nylon 66, wherein the identification is to determine whether the plastic microparticles have a characteristic peak of each plastic, and the characteristic peak is selected from signals that do not overlap and interfere with each other in the infrared spectrum signals of each plastic.

A method of processing two dimensional optical spectra, such as echelle spectra, is disclosed. The optical spectra comprise sections having a relatively high intensity separated by borders having a relatively low intensity. The optical spectra have been digitized (61) by a detector. The method comprises denoising (62) an optical spectrum, searching (64) for at least one series of neighboring local extrema of the optical spectrum, fitting (65) a line through each series of neighboring local extrema, each line representing a section, identifying (67) any peaks and their respective locations, and storing (68) the lines and the locations of any peaks.

There is provided a learning method. The method includes performing preprocessing on light emission data in a chamber of a plasma processing apparatus, setting a constraint for generating a regression equation representing a relationship between an etching rate of the plasma processing apparatus and the light emission data, selecting a learning target wavelength from the light emission data subjected to the preprocessing, and receiving selection of other sensor data different from the light emission data. The method further includes generating a regression equation based on the set constraint while using, as learning data, the selected wavelength, the received other sensor data, and the etching rate, and outputting the generated regression equation.

According to one implementation, an inflammable spark estimation system includes: a photodetector for measuring intensity of discharge light arising from a spark arising from a structural object made of a plurality of materials; and a data processing system configured to determine whether the spark has inflammability, based on the intensity of the discharge light measured by the photodetector, with referring to determination information. The determination information has been determined based on features of waveforms of wavelength spectra of possible discharge light arising from possible inflammable sparks respectively arising from possible materials of which the structural object may be made. The data processing system is configured to further determine which of the plurality of the materials the spark has arisen from, based on the intensity of the discharge light measured by the photodetector, with referring to the determination information, when the spark has been determined to have the inflammability.

A system for real-time assessment of systemic hydration includes a light source configured to operably emit light of first and second wavelengths; means for delivering the emitted light to a target site to excite at least one first spot at the target site, and collecting Raman scattering light scattered from the target site at a plurality of second spots; a detector coupled with said means for obtaining a plurality of spatially offset Raman spectra from the collected Raman scattering light, each spatially offset Raman spectrum corresponding to a respective second spot of the target site and associated with a depth of tissues at which the Raman scattering light is scattered; and a controller configured to process the plurality of spatially offset Raman spectra so as to identify spectral features from the plurality of spatially offset Raman spectra, and assess systemic hydration from the identified spectral features.

A sample analysis system including: a droplet device that intermittently introduces a sample to a measurement region set in plasma; a light emission detection device that detects light emission in the measurement region at a detection timing, the detection timing being set at a predetermined cycle in advance; and an analysis device that analyzes the sample based on the detected light emission, the analysis device being provided with: a distribution computing unit that computes a time-spatial light intensity distribution based on the detected light emission, the time-spatial light intensity distribution being a distribution of a light intensity according to the detection timing, a position in the measurement region, and an wavelength component of the light emission; and a characteristic specifying unit that computes a feature amount that correlates with a sample characteristic indicating a property of the sample and specifies the sample characteristic based on the feature amount.

A measurement apparatus (10) includes a generator (121) that irradiates electromagnetic waves on a measurement target (M) including a substance that undergoes a structural transition from a first substance with an unstable structure to a second substance with a stable structure due to entry of a foreign substance, a receiver (122) that receives the electromagnetic waves including information on a spectroscopic spectrum of the measurement target (M), and a controller (116) that acquires the measured spectroscopic spectrum based on the electromagnetic waves received by the receiver (122), calculates ratio information between the first substance and the second substance based on the acquired measured spectroscopic spectrum, and generates diagnostic information regarding entry of the foreign substance based on the ratio information.

The disclosure provides improved processing of optical data by identifying anomalous signals in the electrical data representing the optical data. The improved processing can also include modifying the identified anomalous signal data to provide a truer representation of the optical data. The disclosed processing can be used by various systems and apparatuses for processing spectral data corresponding to the optical data. The improved processing canbe used to improve the monitoring of semiconductor processes and, therefore, improve the overall semiconductor processes. In one example, a method of processing spectral data includes: (1) receiving temporally separated spectral data samples, and (2) identifying one or more anomalous signals in an intermediate one of the temporally separated spectral data samples based on at least one preceding and at least one subsequent ones of the spectral data samples.

Systems, devices, and methods of analyzing an interfered peak of a sample spectrum is disclosed. The sample spectrum may be generated using a detector of an optical spectrometer. The interfered peak may be produced by a plurality of spectral peaks of different wavelengths. The method may include generating interfered curve parameters representative of the peak shape of each spectral emission in the interfered peak based at least in part on a model of expected curve parameters for the optical spectrometer and a location of the interfered peak on the detector of the optical spectrometer; fitting a plurality of curves to the interfered peak, each curve corresponding to one of the plurality of spectral emissions of different wavelengths forming the interfered peak, wherein each curve is fitted using the interfered curve parameters provided by the model of expected peak parameters; and outputting the plurality of curves for further analysis.