A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

A method for phase contrasting-correlation spectroscopy: converting an incident linearly polarized light into two polarized components (polarized divergent and convergent components, wherein the polarized divergent component is orthogonal to the polarized convergent component), focusing each of the polarized divergent component and the polarized convergent component into a focal plane, thereby producing two focus planes constituting a reference focus (RF) plane and a sample focus (SF) plane; placing a sample at the SF plane and ambient conditions of the sample at the RF plane, resulting in a phase shift between the two polarized components; reconstituting the two phase-shifted polarized components into a phase-shifted linearly polarized light; detecting the phase-shifted linearly polarized light; calculating phase and intensity of the sample from the phase-shifted linearly polarized light; establishing an autocorrelation of phase and intensity of the phase-shifted linearly polarized light; and generating correlograms of intensity and phase of the phase-shifted linearly polarized light.

A light source section configured to couple a plurality of laser beams having different wavelengths and emit measuring light; an illuminating section configured to illuminate a measurement target at a predetermined angle; a light receiving section configured to receive reflected measuring light from the measurement target; and a controlling section configured to compute a reflectance at each of the wavelengths, based on a light receiving result. The light source section includes: a first and a second light source configured to emit each laser beams having different wavelengths; and a dichroic mirror disposed in optical axes of the laser beams intersected, configured to combine the laser beams. The light receiving section includes: a first, a second and a third light receiving unit configured to receive the reflected measuring light from different distance. The controlling section is configured to select which of results from each light receiving unit to use.

The spectrometer includes: a light source unit emitting a laser beam; a mirror unit including a first plane mirror having a first mirror surface and a second plane mirror having a second mirror surface, wherein a measurement target is introduced between the first mirror surface and the second mirror surface; and a light detector detecting the laser beam returned by multiple reflection between the first mirror surface and the second mirror surface. The first mirror surface and the second mirror surface are arranged non-parallel to each other when viewed from the Z-axis direction so as to form an optical path of the laser beam reciprocating in the Y-axis direction while performing multiple reflection between the first mirror surface and the second mirror surface. The optical path of the laser beam between the first mirror surface and the second mirror surface is inclined with respect to the Z-axis direction.

A light source section configured to couple a plurality of laser beams having different wavelengths and emit measuring light; an illuminating section configured to illuminate a measurement target at a predetermined angle; a light receiving section configured to receive reflected measuring light from the measurement target; and a controlling section configured to compute a reflectance at each of the wavelengths, based on a light receiving result. The light source section includes: a first and a second light source configured to emit each laser beams having different wavelengths; and a dichroic mirror disposed in optical axes of the laser beams intersected, configured to combine the laser beams. The light receiving section includes: a first, a second and a third light receiving unit configured to receive the reflected measuring light from different distance. The controlling section is configured to select which of results from each light receiving unit to use.

Disclosed is a device for optically determining a concentration of alcohol and carbohydrates in a liquid sample. The device includes at least a first and a second light source arranged for exposing the liquid sample in a wavelength range between 750 nm and 1000 nm, a spectrometer arranged to determine a first and a second light intensity by measuring the light from the first and the second light source, a processing unit which is connected to the spectrometer and which is arranged to determine an absorption value of the liquid sample from a comparison of the first and the second light intensity with a reference value. In certain aspects, the device may further include a processing unit that calculates concentrations of alcohol and/or carbohydrates and at least two polarization filters.

Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

Methods and systems for performing simultaneous spectroscopic measurements of semiconductor structures at ultraviolet, visible, and infrared wavelengths are presented herein. In another aspect, wavelength errors are reduced by orienting the direction of wavelength dispersion on the detector surface perpendicular to the projection of the plane of incidence onto the detector surface. In another aspect, a broad range of infrared wavelengths are detected by a detector that includes multiple photosensitive areas having different sensitivity characteristics. Collected light is linearly dispersed across the surface of the detector according to wavelength. Each different photosensitive area is arranged on the detector to sense a different range of incident wavelengths. In this manner, a broad range of infrared wavelengths are detected with high signal to noise ratio by a single detector. These features enable high throughput measurements of high aspect ratio structures with high throughput, precision, and accuracy.

The spectrometer includes: a light source unit emitting a laser beam; a mirror unit including a first plane mirror having a first mirror surface and a second plane mirror having a second mirror surface, wherein a measurement target is introduced between the first mirror surface and the second mirror surface; and a light detector detecting the laser beam returned by multiple reflection between the first mirror surface and the second mirror surface. The first mirror surface and the second mirror surface are arranged non-parallel to each other when viewed from the Z-axis direction so as to form an optical path of the laser beam reciprocating in the Y-axis direction while performing multiple reflection between the first mirror surface and the second mirror surface. The optical path of the laser beam between the first mirror surface and the second mirror surface is inclined with respect to the Z-axis direction.