A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

The invention discloses a method for measuring a complex degree of coherence of a random optical field by using a mutual intensity-intensity correlation, including the steps of: building a test optical path; rotating a quarter-wave plate to enable the fast axis of the quarter-wave plate to be consistent with a polarization direction of reference light, to obtain light intensity distribution information of a first combined light; rotating the quarter-wave plate to enable the slow axis of the quarter-wave plate to be consistent with the polarization direction of the reference light, to obtain light intensity distribution information of a second combined light; blocking the reference light to obtain light intensity distribution information of to-be-tested light; blocking the to-be-tested light to obtain light intensity distribution information of the reference light; and calculating the amplitude and phase of a complex degree of coherence of the to-be-tested light.

A quantitative phase image generating method for a microscope, includes: irradiating an object with illumination light; disposing a focal point of an objective lens at each of a plurality of positions that are mutually separated by gaps Δz along an optical axis of the objective lens, and detecting light from the object; generating sets of light intensity distribution data corresponding to each of the plurality of positions based upon the detected light; and generating a quantitative phase image based upon the light intensity distribution data; wherein the gap Δz is set based upon setting information of the microscope.

Systems and methods for forming a coherent optical phased array laser source from a spatially combined array of output beams is accomplished without any external measurement devices or wavefront sensors. A master oscillator laser is split into a plurality of optical beam transport and amplifier channels to produce a plurality of optical output beams that are spatially combined in an array format. The spatial phase state of the plurality of output beams is measured at the output of a spatial combiner without use of an external measurement device or sensor. The phase of the plurality of optical output beams is controlled to compensate both for aberrations induced by the optical beam transport and amplifier paths to produce a coherent and spatially phased laser beam at the output of the laser source or to produce a phased laser beam with prescribed phase state on each output beam.

An optical detection system for detecting data on the optical mutual coherence function of input field. The system comprising an encoder having similar unit cells, and an array of sensor cells located at a distance downstream of said unit cells with respect to a general direction of propagation of input light. The array defines a plurality of sub-array unit cells, each sub-array corresponding to a unit cell of the encoder, and each sub-array comprising a predetermined number M of sensor elements. The encoder applies predetermined modulation to input light collected by the system, such that each unit cell of said encoder directs a portion of the collected input light incident thereon onto sub-array unit cell corresponding therewith and one or more neighboring sub-array unit cells within a predetermined proximity region. The number M is determined in accordance with a predetermined number of sub-arrays unit cells within the proximity region.

The invention discloses a method for measuring a complex degree of coherence of a random optical field by using a mutual intensity-intensity correlation, including the steps of: building a test optical path; rotating a quarter-wave plate to enable the fast axis of the quarter-wave plate to be consistent with a polarization direction of reference light, to obtain light intensity distribution information of a first combined light; rotating the quarter-wave plate to enable the slow axis of the quarter-wave plate to be consistent with the polarization direction of the reference light, to obtain light intensity distribution information of a second combined light; blocking the reference light to obtain light intensity distribution information of to-be-tested light; blocking the to-be-tested light to obtain light intensity distribution information of the reference light; and calculating the amplitude and phase of a complex degree of coherence of the to-be-tested light.

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

A method for detecting coherent light that includes configuring a spatial interferometer, receiving the coherent light through the spatial interferometer, and disposing a photo detector adjacent to the spatial interferometer. The spatial interferometer is configured such that a coherent light passing through the spatial interferometer interferes with itself. The interference of the coherent light with itself creates a light fringe. The light fringe projects onto the photo detector. The photo detector has an array of pixels operable to detect an intensity of coherent light. The array of pixels provides a plurality of outputs corresponding to coherent light received by discrete pixels of the array of pixels. The method includes determining an interference pattern of the light fringe based on the plurality of outputs of the array of pixels, and determining one or more wavelengths of the coherent light from the interference pattern.

A method for detecting coherent light that includes configuring a spatial interferometer, receiving the coherent light through the spatial interferometer, and disposing a photo detector adjacent to the spatial interferometer. The spatial interferometer is configured such that a coherent light passing through the spatial interferometer interferes with itself. The interference of the coherent light with itself creates a light fringe. The light fringe projects onto the photo detector. The photo detector has an array of pixels operable to detect an intensity of coherent light. The array of pixels provides a plurality of outputs corresponding to coherent light received by discrete pixels of the array of pixels. The method includes determining an interference pattern of the light fringe based on the plurality of outputs of the array of pixels, and determining one or more wavelengths of the coherent light from the interference pattern.

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.