Spectrometer device (100) with entrance aperture (2), diffraction grating (3), two detectors (5a, 5b) to spectrally measuring the incoming light (L), the detectors being located on the same side of the dispersion plane. Two vertically focusing mirrors (4, 4a, 4b) focus the light onto detectors, the minors being arranged as front row mirrors (4b) and back row minors (4a) along two polygon graphs (6a, 6b) offset to each other and to the focal curve. The angles of deflection (cp, .sub.91) for the front row mirrors are <90°, allowing to minimize the offset (dl) of the front row minors (4b) to the focal curve. The distances (d) between the front row minors and corresponding detectors (5b) is minimized while still avoiding collisions between the detectors (5b) and their mounts with back row detectors (5a) and their mounts. The front row mirror elements are overlapping the adjacent back row mirror element.

Spectrometer device (100) with entrance aperture (2), diffraction grating (3), two detectors (5a, 5b) to spectrally measuring the incoming light (L), the detectors being located on the same side of the dispersion plane. Two vertically focusing mirrors (4, 4a, 4b) focus the light onto detectors, the minors being arranged as front row mirrors (4b) and back row minors (4a) along two polygon graphs (6a, 6b) offset to each other and to the focal curve. The angles of deflection (cp, .sub.91) for the front row mirrors are <90°, allowing to minimize the offset (dl) of the front row minors (4b) to the focal curve. The distances (d) between the front row minors and corresponding detectors (5b) is minimized while still avoiding collisions between the detectors (5b) and their mounts with back row detectors (5a) and their mounts. The front row mirror elements are overlapping the adjacent back row mirror element.

The invention relates to an optical emission spectrometer (1) being easily adjustable, and to a method (100) to set-up and operate such a spectrometer (1) comprising a plasma stand (2) to establish a light emitting plasma from sample material, and an optical system (3) to measure the spectrum of the light (L) emitted by the plasma being characteristic to the sample material, where the optical system (3) comprises at least one light entrance aperture (31), at least one diffraction grating (32) to split up the light (L) coming from the plasma (A) and one or more detectors (33) to measure the spectrum of the light (L), wherein the plasma stand (2) and the optical system (3) are directly and fixedly mounted on respective a plasma stand flange (2B) and an optical system flange (3B) which are directly and fixedly connected to each other and wherein the optical emission spectrometer (1) further comprises an analyzing unit (34) adapted to analyze the measured spectrum and to compensate for a drift of the spectrum relative to the detector (33) potentially caused by heat transferred from the plasma stand (2) to the optical system (3) considering the thermal expansion of the optical system (3).

Configurations for a diffraction grating design and methods thereof are disclosed. The diffraction grating system can include an input waveguide located at a first location on or near a Rowland circle and multiple output waveguides located at a second and third location on or near the Rowland circle. The input waveguide may be located between the output waveguides and this configuration of input and output waveguides can reduce the footprint size of the device. In some examples, the optical component can function as a de-multiplexer. Additionally, the optical component may separate the input wavelength band into two output wavelength bands which are separated from one another by approximately 0.1 μm.

Configurations for a diffraction grating design and methods thereof are disclosed. The diffraction grating system can include an input waveguide located at a first location on or near a Rowland circle and multiple output waveguides located at a second and third location on or near the Rowland circle. The input waveguide may be located between the output waveguides and this configuration of input and output waveguides can reduce the footprint size of the device. In some examples, the optical component can function as a de-multiplexer. Additionally, the optical component may separate the input wavelength band into two output wavelength bands which are separated from one another by approximately 0.1 μm.

A spectrometer (100) and an optical input portion (32) thereof are disclosed. The optical input portion (32) comprises an assembly structure (322), and the assembly structure (322) is formed at a hole wall (321) of a through hole (3211) of the optical input portion (32). A light (L1) is incident into a dispersing element (2) of the spectrometer (100) along an optical path (13) after passing through the through hole (3211), and is dispersed by the dispersing element (2). The assembly structure (322) is used to be detachably assembled with an optical element (200). When the optical element (200) is assembled with the assembly structure (322), an optical axis of the optical element (200) is linked to the optical path (13). As a result, the light (L1) passing through the optical element (200) is incident to the dispersing element (2) along the optical axis and the optical path (13).

An optical module of a micro spectrometer with tapered slit and slit structure thereof. The optical module includes an input section and a micro diffraction grating. The input section includes a slit structure, which receives a first optical signal and outputs a second optical signal travelling along a first optical path. The slit structure includes a substrate and a slit, which penetrates through the substrate and has a gradually reduced dimension from a first surface of the substrate to a second surface of the substrate. The micro diffraction grating, disposed on the first optical path, receives the second optical signal and separates the second optical signal into a plurality of spectrum components travelling along a second optical path. The optical module of the micro spectrometer with the tapered slit and slit structure thereof according to the embodiment of the invention can be manufactured in a mass-production manner using the semiconductor manufacturing processes, so that the cost can be decreased, and the slit can have a smooth surface, which avoids the negative effect on the incident light.

An optical module of a micro spectrometer with tapered slit and slit structure thereof. The optical module includes an input section and a micro diffraction grating. The input section includes a slit structure, which receives a first optical signal and outputs a second optical signal travelling along a first optical path. The slit structure includes a substrate and a slit, which penetrates through the substrate and has a gradually reduced dimension from a first surface of the substrate to a second surface of the substrate. The micro diffraction grating, disposed on the first optical path, receives the second optical signal and separates the second optical signal into a plurality of spectrum components travelling along a second optical path. The optical module of the micro spectrometer with the tapered slit and slit structure thereof according to the embodiment of the invention can be manufactured in a mass-production manner using the semiconductor manufacturing processes, so that the cost can be decreased, and the slit can have a smooth surface, which avoids the negative effect on the incident light.

A spectrophotometer 300 includes a white light source 212, condenser lenses 242a, 242b that collect light emitted from the white light source 212, a slit 245 that diffracts the light collected by the condenser lenses 242a, 242b, a concave diffraction grating 246 that splits the light having passed through the slit 245, and a multi-wavelength detector 248 having a plurality of photodetection elements 304 that detect the light split by the concave diffraction grating 246, and each of the plurality of photodetection elements 304 included in the multi-wavelength detector 248 is arranged at an image position of the concave diffraction grating 246.

A spectrometer for examining the spectrum of an optical emission source may include: an optical base body, a light entry aperture connected to the optical base body to couple light into the spectrometer, at least one dispersion element to receive the light as a beam of rays and generate a spectrum, and at least one detector for measuring the generated spectrum. A light path may run from the light entry aperture to the detector. A mirror group with at least two mirrors may be provided in a section of the light path between the light entry aperture and the at least one detector, in which the beam does not run parallel, which may compensate for temperature effects. In the mirror group, at least one mirror or the entire mirror group may be moveable relative to the optical base body and may be coupled to a temperature-controlled drive.