An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.

In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

An embodiment of a microscope system is described that comprises a sample stage configured to position a sample; and a spectrometer comprising an interferometer configure to provide a light beam to the sample stage and one or more detectors configured to detect light spectra in response to the light beam, wherein the spectrometer sends a notification to the sample stage after a scan comprising an acceptable measure of quality has been acquired from the detected light spectra at a first location, and the sample stage is further configured to count the notifications and initiate movement of the sample stage to a second location when a count value reaches a pre-determined number.

An infrared light source device includes: a heater portion which emits infrared light by being heated; and a cover member arranged to cover an entire circumference of the heater portion without contacting the heater portion, and having a hole formed therein for emitting the infrared light from the heater portion to outside. A material for the cover member is a pure aluminum (an aluminum alloy with a purity of 99% or more), which has a high heat reflectivity and is less likely to be denatured by heat dissipation from the heater portion.

Embodiments of this invention relate generally to a miniature multi-spectral system to detection pathogen, biomarkers, or any compound from a sample. In one example, a miniature multi-spectral system comprises a first miniature spectrometer to generate a first spectral output based on a sample, a second miniature spectrometer to generate a second spectral output based on the sample, and a processor coupled to the first and the second miniature spectrometers. The processor is configured to execute instructions to perform data fusion of the first and second spectral outputs to generate fused data, and to apply artificial intelligence (AI) of an AI module to the fused data to identify a pathogen, biomarker, or any compound from the sample.

An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.

Disclosed herein is an all-digital phase and timing correction procedure for coherent averaging in dual-comb and multiheterodyne spectroscopy—applicable to any dual-comb spectroscopy setup. It can account for large frequency/phase instabilities of the used sources, yielding a significant reduction of the noise pedestal and an increase in signal-to-noise ratio (SNR) of the radio frequency (RF) beat notes. This technique is computationally efficient and can be conveniently implemented either as a post-processing algorithm or in a real-time data acquisition and processing platform without the necessity of adding any additional optical elements to the dual-comb spectroscopy system. By implementing this technique, the performance of any comb- or comb-like-source-based DCS system with a sufficient degree of mutual coherence between the optical modes can be improved in terms of SNR and number of spectroscopically-usable RF beat notes. The described technique is compatible with a DC-centered RF spectrum, where the negative frequencies are folded to the positive domain to double the number of beat notes within the detector bandwidth. The technique enables coherent averaging over extended time-scales even for free-running combs, thus increasing the sensitivity of absorption and dispersion DCS measurements.

Aspects relate to a spectral analyzer that can be used for biological sample detection. The spectral analyzer includes an optical window configured to receive a sample and a spectral sensor including a chassis having various component assembled thereon. Examples of components may include a light source, a light modulator, illumination and collection optical elements, a detector, and a processor. The spectral analyzer is configured to obtain spectral data representative of a spectrum of the sample using, for example, an artificial intelligence (AI) engine. The spectral analyzer further includes a thermal separator positioned between the light modulator and the light source.