Patent classifications
G01J5/0801
MULTISPECTRAL PHOTODETECTOR ARRAY
A photodetector array comprising at least one first sensor and at least one second sensor on the horizontal surface of the array substrate. The at least one first sensor is sensitive to radiation in a first wavelength range which comprises long-wavelength infrared wavelengths, and the at least one second sensor is sensitive to radiation in a second wavelength range which comprises wavelengths shorter than long-wavelength infrared. The array substrate comprises a vertical cavity on its horizontal surface, and the first sensor comprises a layer of pyroelectric material (65) which extends horizontally across the vertical cavity in the first area. A first part of a layer of two-dimensional layered material at least partly covers the layer of pyroelectric material (65), and a second part of the layer of two-dimensional layered material at least partly covers the foundation of the second sensor.
Planck Spectrometer
An optical spectrometer uses broadband radiation detectors to measure thermal radiation generated by the varied heating of an object without complex mechanical mechanisms, narrowband filters, or the like. The received thermal radiation is used to deduce spectral qualities of either the thermal radiation emitter or a second object reflecting or transmitting this thermal radiation.
THERMAL PROCESSING APPARATUS
A thermal processing apparatus according to the present invention includes: a support including quartz and being for supporting a substrate from a first side within a chamber; a flash lamp disposed on a second side and being for heating the substrate by irradiating the substrate with a flash of light; a continuous illumination lamp disposed on the second side of the substrate and being for continuously heating the substrate; a light blocking member disposed to surround the substrate in plan view; and a radiation thermometer disposed on the first side of the substrate and being for measuring a temperature of the substrate, wherein the radiation thermometer measures the temperature of the substrate by receiving light at a wavelength capable of being transmitted through the support. Accuracy of measurement of the temperature of the substrate can thereby be increased.
SURFACE SENSITIZATION FOR HIGH-RESOLUTION THERMAL IMAGING
A structured product, comprising: at least two layers comprising a first layer and a second layer; wherein: the first layer comprises at least one material having a temperature-dependent (e.g., a positive temperature-dependent or a negative temperature-dependent) wavelength-integrated emissivity (ε); the second layer comprises at least one reflective material that is reflective to light in an 8-14 μm wavelength range; and the structured product has a positive temperature-dependent wavelength-integrated emissivity. The structured product is useful in a method for thermal image sensitizing, the method comprising imaging, in an infrared spectrum, the structured product.
SURFACE SENSITIZATION FOR HIGH-RESOLUTION THERMAL IMAGING
A structured product, comprising: at least two layers comprising a first layer and a second layer; wherein: the first layer comprises at least one material having a temperature-dependent (e.g., a positive temperature-dependent or a negative temperature-dependent) wavelength-integrated emissivity (ε); the second layer comprises at least one reflective material that is reflective to light in an 8-14 μm wavelength range; and the structured product has a positive temperature-dependent wavelength-integrated emissivity. The structured product is useful in a method for thermal image sensitizing, the method comprising imaging, in an infrared spectrum, the structured product.
TEST LAMP FOR MULTI-SPECTRUM MID-IR FLAME DETECTORS
Methods and systems for testing a flame detector include receiving, at a trigger sensor of the flame detector, a coded trigger signal from a test lamp and performing a self-test operation of the flame detector in response to detection of the coded trigger signal. The flame detectors may include a trigger sensor configured to detect a trigger signal received from an external source. The trigger sensor has a field-of-view and sensitivity that is the same a flame detection sensor of the flame detector. The flame detector will perform a self-test operation when the trigger signal is received at the trigger sensor. Test lamps include a light source configured to emit light and a controller configured to control the light source to generate and output a trigger signal, wherein the trigger signal is configured to cause the flame detector to perform the self-test operation.
SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME
A substrate temperature measuring device includes a sensor which senses a first amount of light of a first light having a first wavelength, a second amount of light of a second light having a second wavelength, and a third amount of light of a third light having a third wavelength provided from a substrate, a first calculator to calculate a first temperature for the first wavelength, a second temperature for the second wavelength, and a third temperature of the wavelength through the first amount of light, the second amount of light and the third amount of light which are sensed, and a second calculator to calculate emissivity of the substrate and reflected energy of the substrate through the first temperature, the second temperature, and the third temperature, wherein a temperature of the substrate is calculated through the calculated emissivity of the substrate and the reflected energy of the substrate.
SUBSTRATE TEMPERATURE MEASURING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND SUBSTRATE TEMPERATURE MEASURING METHOD USING THE SAME
A substrate temperature measuring device includes a sensor which senses a first amount of light of a first light having a first wavelength, a second amount of light of a second light having a second wavelength, and a third amount of light of a third light having a third wavelength provided from a substrate, a first calculator to calculate a first temperature for the first wavelength, a second temperature for the second wavelength, and a third temperature of the wavelength through the first amount of light, the second amount of light and the third amount of light which are sensed, and a second calculator to calculate emissivity of the substrate and reflected energy of the substrate through the first temperature, the second temperature, and the third temperature, wherein a temperature of the substrate is calculated through the calculated emissivity of the substrate and the reflected energy of the substrate.
SENSOR WITH AN OMNIDIRECTIONAL FIELD OF VIEW
Methods, apparatuses and systems for sensing are disclosed herein. An example sensor may include an omnidirectional reflector, a calibration source located inside the omnidirectional reflector and configured to generate one or more calibration beams, a first filter configured to filter one or more first beams including any of a first portion of the incoming beams collected and concentrated by the omnidirectional reflector, and a first detector configured to detect the filtered one or more first beams.
SENSOR WITH AN OMNIDIRECTIONAL FIELD OF VIEW
Methods, apparatuses and systems for sensing are disclosed herein. An example sensor may include an omnidirectional reflector, a calibration source located inside the omnidirectional reflector and configured to generate one or more calibration beams, a first filter configured to filter one or more first beams including any of a first portion of the incoming beams collected and concentrated by the omnidirectional reflector, and a first detector configured to detect the filtered one or more first beams.