Even a radiation thermometer using a quantum infrared sensor appropriately measures the temperature of a substrate irradiated with a flash of light. A heat treatment apparatus includes a quantum infrared sensor configured to measure a temperature of the first substrate and a temperature of the second substrate. The heat treatment apparatus further includes a temperature correction unit configured to correct, using a correction coefficient calculated based on the reference temperature and the shift temperature, a temperature of the second substrate on which second heat treatment having irradiation with the flash of light is performed, the temperature being measured by the quantum infrared sensor.

According to an aspect, a detection device, includes a flexible substrate, a plurality of light sensors provided in a detection region of the flexible substrate, a terminal that is provided at one end of the flexible substrate and is capable of being coupled to an external device, and a peripheral circuit that is provided on the flexible substrate and located between the detection region and the terminal.

The present invention relates to a method for generating a security identifier for a control unit (10) of a battery system (100), comprising the steps of supplying an operation voltage to the control unit (10), outputting calibration data from a non-volatile memory element (15a) of the control unit (10), and generating a security identifier from the calibration data using a security algorithm. Therein, the calibration data is based on at least one testing process performed on the control unit (10) and is required for a faultless operation of the control unit (10). Further, according to a method for generating an activation key for a control unit (10) of a battery system (100) an activation key is generated based on such security identifier and output from the control unit (10). The invention further relates to an activation method for such control unit (10), wherein a control unit (10) is activated in response to the validation of such security identifier. The present invention further relates to a control unit (10) for performing such methods and further relates to the use of calibration data for generating a security identifier.

The present invention relates to a method for generating a security identifier for a control unit (10) of a battery system (100), comprising the steps of supplying an operation voltage to the control unit (10), outputting calibration data from a non-volatile memory element (15a) of the control unit (10), and generating a security identifier from the calibration data using a security algorithm. Therein, the calibration data is based on at least one testing process performed on the control unit (10) and is required for a faultless operation of the control unit (10). Further, according to a method for generating an activation key for a control unit (10) of a battery system (100) an activation key is generated based on such security identifier and output from the control unit (10). The invention further relates to an activation method for such control unit (10), wherein a control unit (10) is activated in response to the validation of such security identifier. The present invention further relates to a control unit (10) for performing such methods and further relates to the use of calibration data for generating a security identifier.

An upper radiation thermometer is provided obliquely above a semiconductor wafer to be measured. The upper radiation thermometer includes a photovoltaic detector that produces an electromotive force when receiving light. The photovoltaic detector has both high-speed responsivity and good noise properties in a low-frequency range. The upper radiation thermometer does not require a mechanism for cooling because the photovoltaic detector is capable of obtaining sufficient sensitivity at room temperature without being cooled. There is no need to provide a light chopper and a differentiating circuit in the upper radiation thermometer. This allows the upper radiation thermometer to measure the front surface temperature of the semiconductor wafer with a simple configuration both during preheating by means of halogen lamps and during flash irradiation.

Systems and methods for thermal radiation detection utilizing a thermal radiation detection system are provided. The thermal radiation detection system includes one or more Indium Antimonide (InSb)-based photodiode infrared detectors and a temperature sensing circuit. The temperature sensing circuit is configured to generate signals correlated to the temperatures of one or more of the plurality of infrared sensor elements. The thermal radiation detection system also includes a signal processing circuit.

Disclosed herein is a sensor system including four interconnected resistors, where two of the resistors are photoconductive detectors, where the photoconductive detectors are illuminated with light at least at two different wavelengths, where two of the resistors does not change their resistance due to the illumination, where an external voltage is applicable to the sensor system, where a differential voltage is measurable, which depends on the resistance changes of the illuminated photoconductive detectors, where the differential voltage gives a mathematical ratio of the four respective resistances.

A lens allows infrared light to pass therethrough. An infrared sensor includes infrared detection elements arranged in two or more columns. The infrared sensor is rotated around a scan rotation axis that passes through part of the lens to scan a detection range, and outputs an output signal indicating a thermal image of the detection range. At least two infrared detection elements in the infrared sensor are located at positions displaced from each other with respect to the scan rotation axis. Among the infrared detection elements, the number of first infrared detection elements having a smaller half-width of a point spread function in a scan direction than that in the direction of the scan rotation axis is larger than the number of second infrared detection elements having a larger half-width of a point spread function in the scan direction than that in the direction of the scan rotation axis.

A lens allows infrared light to pass therethrough. An infrared sensor includes infrared detection elements arranged in two or more columns. The infrared sensor is rotated around a scan rotation axis that passes through part of the lens to scan a detection range, and outputs an output signal indicating a thermal image of the detection range. At least two infrared detection elements in the infrared sensor are located at positions displaced from each other with respect to the scan rotation axis. Among the infrared detection elements, the number of first infrared detection elements having a smaller half-width of a point spread function in a scan direction than that in the direction of the scan rotation axis is larger than the number of second infrared detection elements having a larger half-width of a point spread function in the scan direction than that in the direction of the scan rotation axis.

An infrared thermometer measures a temperature of an energy zone. The infrared thermometer comprises a beam splitter for splitting an incident light beam from an energy zone into an infrared light beam and a visible light beam; an infrared detector for detecting the infrared light beam and generating a signal indicative of a temperature of the energy zone according to the detected infrared light beam; and a sighting device having an optical module for generating a reflective reticle image and transmitting the visible light beam to generate a target image at a sight window, wherein the sighting device is configured to superimpose the reflective reticle image over the target image at the sight window to align the infrared detector with the energy zone. The infrared thermometer and an associated measurement method facilitate the alignment of the energy zone by the users, thereby improving the accuracy of the measurement.