G PHYSICS
G01 MEASURING; TESTING
G01L MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
1/00 Measuring force or stress, in general
G01L1/14 by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
G01L1/142 using capacitors
G01L1/148 using semiconductive material, e.g. silicon