A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.

A pressure gauge includes: an outer container defining an outer chamber set to a reference pressure (Pr); an inner container disposed in the outer container; and a tube setting the inside of a first inner chamber of the inner container to a measurement pressure (Px). The inner container includes: a cylindrical rigid wall portion; first and second pressure receiving plates that displace due to a differential pressure between the reference pressure and the measurement pressure; a bellows partitioning the inner container into the first inner chamber and a second inner chamber; and a pressure detection element disposed in the second inner chamber and detecting the measurement pressure based on the displacements of the first and the second pressure receiving plates. The outer chamber and the second inner chamber are set to the reference pressure of a high vacuum that is lower than a lower limit of the measurement pressure.

A pressure gauge includes: an outer container defining an outer chamber set to a reference pressure (Pr); an inner container disposed in the outer container; and a tube setting the inside of a first inner chamber of the inner container to a measurement pressure (Px). The inner container includes: a cylindrical rigid wall portion; first and second pressure receiving plates that displace due to a differential pressure between the reference pressure and the measurement pressure; a bellows partitioning the inner container into the first inner chamber and a second inner chamber; and a pressure detection element disposed in the second inner chamber and detecting the measurement pressure based on the displacements of the first and the second pressure receiving plates. The outer chamber and the second inner chamber are set to the reference pressure of a high vacuum that is lower than a lower limit of the measurement pressure.

A differential pressure transmitter configured to provide an absolute pressure measurement is presented. The differential pressure sensor comprises a first process fluid inlet. The differential pressure sensor also comprises a second process fluid inlet. The differential pressure sensor also comprises a differential pressure sensor operably coupled to the first and second process fluid inlets. The differential pressure sensor also comprises an absolute pressure cap coupled to the second pressure inlet. The cap comprises a volume of gas within an expansion feature. The volume of gas has a reference pressure. The expansion feature is configured to allow for expansion of the volume of gas in response to a temperature increase, such that the volume of gas maintains the reference pressure.

There is described an optical pressure sensor comprising a sensor housing and an optical pressure cell mounted within the sensor housing and dividing the sensor housing into a first fluid space and a second fluid space. The optical pressure cell comprises a front side exposed to a pressure in the first fluid space and a back side exposed to a pressure in the second fluid space. The optical pressure sensor further comprises a fluid communication arrangement allowing pressure equalization between the pressure in the first fluid space on the front side and the pressure in the second fluid space on the back side of the optical pressure cell.

A differential pressure transmitter configured to provide an absolute pressure measurement is presented. The differential pressure sensor comprises a first process fluid inlet. The differential pressure sensor also comprises a second process fluid inlet. The differential pressure sensor also comprises a differential pressure sensor operably coupled to the first and second process fluid inlets. The differential pressure sensor also comprises an absolute pressure cap coupled to the second pressure inlet. The cap comprises a volume of gas within an expansion feature. The volume of gas has a reference pressure. The expansion feature is configured to allow for expansion of the volume of gas in response to a temperature increase, such that the volume of gas maintains the reference pressure.

A fluidic chip device configured for processing a fluid, wherein the fluidic chip device comprises a plurality of layers laminated to one another, wherein at least a part of the layers comprises a patterned section of an alternating sequence of bars and fluidic channels for conducting the fluid under pressure, the patterned section being configured for being displaceable in response to the pressure, and a pressure detector responding to the displacement of the patterned section by generating a detector signal being indicative of a value of the pressure.

There is described an optical pressure sensor comprising a sensor housing and an optical pressure cell mounted within the sensor housing and dividing the sensor housing into a first fluid space and a second fluid space. The optical pressure cell comprises a front side exposed to a pressure in the first fluid space and a back side exposed to a pressure in the second fluid space. The optical pressure sensor further comprises a fluid communication arrangement allowing pressure equalization between the pressure in the first fluid space on the front side and the pressure in the second fluid space on the back side of the optical pressure cell.

A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.

A diaphragm pressure gauge includes: a structure disposed under pressure to be measured; two diaphragms attached to the structure so as to oppose each other; and a detection element that is fixed to the two diaphragms to detect displacements of the two diaphragms. In each of the two diaphragms, when one of two surfaces is designated an opposing surface and the other surface is designated a non-opposing surface, the structure and the two diaphragms set a space faced by one of the opposing surface and the non-opposing surface as an airtight space to be kept in a reference vacuum, and the other of the opposing surface and the non-opposing surface is subjected to the pressure to be measured.