A processing apparatus includes a chuck table having a holding surface for holding a workpiece; a horizontal moving mechanism that moves the chuck table in a horizontal direction and is supplied with a first oil; and a vertical moving mechanism that moves a processing unit in a vertical direction and is supplied with a second oil. Before mounting the workpiece on the holding surface, the holding surface is imaged by a camera while being irradiated with light, and it is examined whether or not the picked-up image is emitting light. If there is a light-emitting part in the picked-up image, it is determined that oil is adhered to the light-emitting part.

An apparatus for leak test is provided with: a gas dissolution portion having function to degasify a unused liquid; a liquid filling and circulation portion for filling the gas dissolved liquid in the test piece; a high-pressure application portion for pressurizing the filled gas dissolved liquid; a leak test portion for detecting the gas in the liquid vapor leaking out in the vacuum container from leak hole(s) of the test piece resulting from high-pressure application; and a liquid collection portion for collecting the gas dissolved liquid as relieving high pressure. The leak test process under high pressure is conducted in the closed circulated flow path. The leak test process uses the liquid easy for gas to be dissolved and to flow through the leak hole(s). Further, the leak test process uses the gas easy to dissolve in the liquid or to be detected.

An apparatus for leak test is provided with: a gas dissolution portion having function to degasify a unused liquid; a liquid filling and circulation portion for filling the gas dissolved liquid in the test piece; a high-pressure application portion for pressurizing the filled gas dissolved liquid; a leak test portion for detecting the gas in the liquid vapor leaking out in the vacuum container from leak hole(s) of the test piece resulting from high-pressure application; and a liquid collection portion for collecting the gas dissolved liquid as relieving high pressure. The leak test process under high pressure is conducted in the closed circulated flow path. The leak test process uses the liquid easy for gas to be dissolved and to flow through the leak hole(s). Further, the leak test process uses the gas easy to dissolve in the liquid or to be detected.

The invention concerns a process for detecting water leaks in smelting furnaces (2; 4) or in metal or alloy treatment plants, comprising the following steps: (i) providing at least one smelting furnace (2; 4), or at least one metal or alloy treatment plant provided with a water cooling system (5) and being connected to a process fume exhaust system; (ii) mixing in the cooling water a tracer chemical which is volatile in the event of water leakage together with the exhaust gases and which is suitable to be detected by an analysis system of the exhaust gases; and (iii) detecting said tracer chemical contained in the exhaust gases by said analysis system comprised in said process fume exhaust plant, wherein said tracer chemical is deuterated water. The invention further refers to a Plant for the production of metals or alloys.

A leak detector is provided for leak-testing objects that are to be tested by spraying tracer gas, the leak detector including: a detection inlet configured to be connected to an object that is to be tested; a pumping device including a vacuum line connected to the detection inlet, a rough-vacuum pump connected to the vacuum line, and a turbomolecular vacuum pump connected to the vacuum line, a delivery of which is connected to the rough-vacuum pump; and a gas detector connected to the turbomolecular vacuum pump, the pumping device further including an ancillary pump connected to the rough-vacuum pump and being configured to lower an ultimate-vacuum pressure of tracer gas in the rough-vacuum pump. A leak detection method for leak-testing objects that are to be tested by spraying tracer gas is also provided.

A system, device, and method for leak detection and monitoring. The system includes a plurality of gas sensors with wireless connectivity adapted to be distributed over an area of interest that contains a suspected gas leak. An aggregator aggregates leak detection data obtained from the plurality of gas sensors. At web-based user interface allow viewing of the data on any of various non-specific electronic devices. The user interface is simultaneously accessible on a plurality of wireless mobile devices. A wireless local area network, such as a mesh network with the sensors as nodes, interconnects each of the plurality of gas sensors and the aggregator.

A recovery and recharge apparatus and method for delivering a dose of fluorescent dye to an air conditioning/HVAC system. A supply line provides for both recovering and recharging of refrigerant into the system. The supply line includes a first segment connected to the recovery and recharge unit and having a single internal conduit for channeling reclaimed refrigerant into the recovery and recharge unit and for channeling refrigerant from the reservoir. A dye compartment is fluidly connected to the first segment and includes an interior cavity with an access panel for permitting access to the cavity for receiving a fluorescent dye material. A second segment is fluidly connected to the dye compartment and has an outlet port for connecting to a low side connection on the air conditioning/HVAC system. Preferably one way valves are located on opposite sides of the dye compartment and allow recovered refrigerant to bypass the dye compartment.

A recovery and recharge apparatus and method for delivering a dose of fluorescent dye to an air conditioning/HVAC system. A supply line provides for both recovering and recharging of refrigerant into the system. The supply line includes a first segment connected to the recovery and recharge unit and having a single internal conduit for channeling reclaimed refrigerant into the recovery and recharge unit and for channeling refrigerant from the reservoir. A dye compartment is fluidly connected to the first segment and includes an interior cavity with an access panel for permitting access to the cavity for receiving a fluorescent dye material. A second segment is fluidly connected to the dye compartment and has an outlet port for connecting to a low side connection on the air conditioning/HVAC system. Preferably one way valves are located on opposite sides of the dye compartment and allow recovered refrigerant to bypass the dye compartment.

A leak detection system includes a testing interface, which includes a rotation holder configured to retain and rotate a package. The testing interface includes a plunger apparatus configured to actuate a plunger to apply a pressure to the package before and/or during the package being inspected using a high voltage leak detection (HVLD) apparatus. The testing interface also includes a controller configured to operate and coordinate the operation of the testing interface with operation of the HVLD apparatus.

A differential gas sensor includes a first sensor component to selectively detect a first gas present in the environment and to supply a first output signal, a second sensor component configured to supply a second output signal, and a circuit configured to determine a difference between the first output signal and the second output signal.