A leak inspection device includes an inspection mechanism that executes a first inspection process for compressing the insides of a first inspection chamber and a reference chamber, and inspecting the first inspection chamber for a pressure leak based on a differential pressure therebetween, and a second inspection process for compressing the insides of a second inspection chamber and the reference chamber, and inspecting the second inspection chamber for a pressure leak based on a differential pressure therebetween, a first pre-compression valve that opens and closes a first pre-compression path, and a control device that opens, during the execution of the first inspection process, the first pre-compression valve to pre-compress the second inspection chamber, and causes, in a state where the inside of the second inspection chamber is pre-compressed, the inspection mechanism to execute the second inspection process.

An apparatus for automatic leak detection, including a chamber to enclose a test specimen. A vacuum pump is in selectable fluid communication via an adiabatic noise cancellation valve with the chamber. A pressure transducer determines a pressure in the test specimen and transmits a pressure signal to a controller. The controller is to control the adiabatic noise cancellation valve to cause the vacuum pump to draw a vacuum from a space between the test specimen and the chamber thereby creating an adiabatic noise cancelling condition in which a temperature of the test specimen is stabilized. The controller is to control a flow of a test gas into the test specimen, and to determine a pressure decay rate from the pressure signal. The controller is to determine if the test specimen meets a leak test specification based on the pressure decay rate under the adiabatic noise cancelling condition.

A method for leak detection in a system including a compressor. A first pressure differential is determined in the system via a first pressure differential indicator (PDI). The first pressure differential is converted into a first flow measurement. A second flow measurement is determined downstream of the compressor using a second PDI. The first flow measurement and the second flow measurement are compared to determine whether a leak exists between the first PDI and the second PDI.

A leak detection device operable to measure fluid leaks in an element to be tested that is positioned in a first enclosure. In one example, a measuring module is positioned in a second enclosure and connected to the first enclosure and the element to be tested by an aeraulic connection. At least one of the first enclosure and the measuring module are thermally insulated using an insulating material.

A case airtightness evaluation method evaluates airtightness of a case mounted at a vehicle. A pressure measuring step of the evaluation method includes pressurizing or depressurizing air in the case, allowing pressure in the case to stabilize, and then measuring a pressure change in the case. During the measurement of the pressure change, a deformation amount acquiring step acquires a deformation amount of a specific location of the case. Based on the acquired deformation amount, a correcting step corrects the measured pressure change. Based on the corrected pressure change, an evaluating step evaluates airtightness of the case.

A leak check method includes: performing a first inspection of measuring a pressure in an internal space formed by a seal of the substrate holder, while evacuating the internal space, and detecting that the pressure reaches a first pressure threshold value within a predetermined first inspection time; performing a second inspection of closing the internal space that has been evacuated, measuring the pressure in the closed internal space, and detecting that the pressure in the closed internal space does not exceed a second pressure threshold value within a predetermined second inspection time; and performing a third inspection of measuring a pressure difference between the pressure in the closed internal space and a vacuum pressure in a master container, and detecting that an amount of increase in the pressure difference within a predetermined third inspection time is kept equal to or below a pressure difference threshold value.

The invention relates to energy saving in vacuum systems by means of a method and a controller enabling to consider the fluctuation in system-pressure of a system by determining a maximum system-pressure S2H and a minimum system-pressure S2h for each working cycle W.sub.C based on a determined target system-pressure p.sub.n.sup.− and a pre-set system-pressure p.sub.0.sup.− for the current working cycle W.sub.Cn (n=1, 2, 3, . . . ). The method is especially adapted to fluctuations in system-pressure level of a vacuum system comprising a vacuum gripper tool.

The present invention specifically relates to the pneumatic and electronic application of a pneumatic leak meter based on absolute pressure drop measurement having the peculiarity of compensating for ambient variations such as ambient temperature and temperature of the measured part, as well as mechanical deformations of the component being tested caused by the pressure being applied.

A pressure monitoring device is provided for use with a tool such as a medical endoscope. The device includes a housing which is fluidically coupled with an internal volume of the endoscope. A pump is used to change the pressure inside the device housing and endoscope, thereby establishing a pressure differential from the ambient environment. During an endoscopy procedure, the pressure inside the device housing is monitored, and a change in pressure exceeding a predefined limit causes an alarm signal indicating a leak has occurred in the endoscope. The device housing may be directly mounted to the endoscope, located remotely and connected with a coupling tube, or integrated with an accessory device connected to the endoscope. The pump may be integrated internally to the device housing, or it may be a separate external pump which is connected to the housing. The pressure differential may be positive or negative relative to ambient.

A leak check method includes: performing a first inspection of measuring a pressure in an internal space formed by a seal of the substrate holder, while evacuating the internal space, and detecting that the pressure reaches a first pressure threshold value within a predetermined first inspection time; performing a second inspection of closing the internal space that has been evacuated, measuring the pressure in the closed internal space, and detecting that the pressure in the closed internal space does not exceed a second pressure threshold value within a predetermined second inspection time; and performing a third inspection of measuring a pressure difference between the pressure in the closed internal space and a vacuum pressure in a master container, and detecting that an amount of increase in the pressure difference within a predetermined third inspection time is kept equal to or below a pressure difference threshold value.