Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration.

A sensor includes an inner channel with: a first portion; a second portion in communication with the first portion; a storage zone in communication with the first portion; a baffle plate extending inside the first portion; the first portion and the baffle plate being sized such that, in an air stream entering the sensor through a first, open end of the first portion and containing first particles with a diameter of 10 μm or less and second particles with a diameter of more than 10 μm, the first particles reach the second portion of the inner channel while the second particles reach the storage zone.

A particle detector for rapidly detecting and identifying sub 20 nm particles in Ultra Pure Water (UPW) is disclosed. The detector has a nano particle extractor, a nanoparticle collector, and a tracer particle introducer. The extractor limits the size of droplets output to a predetermined size. The extractor includes (1) a liquid sample inlet, (2) a nebulizer connected to the liquid sample inlet (the nebulizer has a gas supply, and an outlet), (3) an impactor arranged to receive material output from the nebulizer, (4) an evaporator connected to the nebulizer and impactor for providing an aerosol at the extractor outlet, and (5) an aerosol connected to the evaporator. The collector us connected to the extractor and has: (1) a collector inlet connected to the aerosol outlet of the extractor, (2) a vapor condensation growth tube connected to the collector inlet, and (3) a repositionable particle capture plate arranged to receive material output from the growth tube at spatially varying positions. The tracer particle introducer is connected to the liquid sample inlet of the extractor. It includes a tracer particle supply connected to a pump which is connected to the extractor. A method for rapid identification of sub−20 nm particles in UPW is also disclosed.

The present invention relates to a dust measurement device and method which can increase the accuracy of dust measurement by deriving a mass concentration on the basis of a number concentration distribution according to particle sizes. The dust measurement device of the present invention comprises: a charging unit for charging a feed material with electrical charges; a first dust collecting unit including a first and a second dust collecting electrode which are spaced apart from each other, through which the material passes, and to which different voltages are applied; a second dust collecting unit for collecting the material which has passed through the first dust collecting unit; a current measurement unit for measuring current flowing through the second dust collecting unit; and a control unit for calculating a mass concentration of the material by using the value of the current measured by the current measurement unit and adjusting voltages applied to the charging unit and the first dust collecting unit on the basis of the mass concentration.

Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration.

The present invention relates to a dust measurement device and method which can increase the accuracy of dust measurement by deriving a mass concentration on the basis of a number concentration distribution according to particle sizes. The dust measurement device of the present invention comprises: a charging unit for charging a feed material with electrical charges; a first dust collecting unit including a first and a second dust collecting electrode which are spaced apart from each other, through which the material passes, and to which different voltages are applied; a second dust collecting unit for collecting the material which has passed through the first dust collecting unit; a current measurement unit for measuring current flowing through the second dust collecting unit; and a control unit for calculating a mass concentration of the material by using the value of the current measured by the current measurement unit and adjusting voltages applied to the charging unit and the first dust collecting unit on the basis of the mass concentration.

Provided herein are particle detection systems, and related methods configured to characterize a liquid sample, comprising: a first probe configured to determine a first parameter set of a plurality of first particles in a liquid sample, the first particles characterized by a size characteristic selected from a first size range; wherein the first parameter set comprises a first size distribution and a first concentration; and a second probe configured to determine a second parameter set of one or more second particles in the liquid sample, the second particles being characterized by a size characteristic selected from a second size range; wherein the second parameter set comprises a second size distribution and a second concentration.

By irradiating target liquid L containing fine bubbles with ultrasonic waves from an ultrasonic irradiation device 102, the fine bubbles in the target liquid L is reduced. By irradiating the target liquid L with ultrasonic waves, fine bubbles in the target liquid L can be reduced effectively. By using ultrasonic waves, bubbles with small diameters, particularly fine bubbles, can be effectively reduced, so that fine bubbles in the target liquid L can be efficiently reduced.

A particle detecting device is provided. The particle detecting device includes a base and a detecting element. The base includes a detecting channel, a beam channel and a light trapping region. A light trapping structure corresponding to the beam channel is disposed in the light trapping region. The detecting element includes a microprocessor, a particle sensor and a laser transmitter. The particle sensor is disposed at an orthogonal position where the detecting channel intersects the beam channel. When the particle sensor and the laser transmitter are enabled, the laser transmitter transmits the projecting light source to the beam channel, and the particle sensor detects the size and the concentration of the suspended particles contained in the gas in the detecting channel. The projecting light source is projected on the light trapping structure so that a stray light being directly reflected back to the beam channel is reduced.

A sensor includes an inner channel with: a first portion; a second portion in communication with the first portion; a storage zone in communication with the first portion; a baffle plate extending inside the first portion; the first portion and the baffle plate being sized such that, in an air stream entering the sensor through a first, open end of the first portion and containing first particles with a diameter of 10 m or less and second particles with a diameter of more than 10 m, the first particles reach the second portion of the inner channel while the second particles reach the storage zone.